7/9/2012	12:12:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	12:12:58 AM	Recipe started at 12:12 AM
7/9/2012	12:12:58 AM	Helium valve closed
7/9/2012	12:12:58 AM	H2 valve closed
7/9/2012	12:12:58 AM	BCl3 valve closed
7/9/2012	12:12:58 AM	PH3 valve closed
7/9/2012	12:12:58 AM	SiCl4 pre valve closed
7/9/2012	12:12:58 AM	SiCl4 post valve closed
7/9/2012	12:12:58 AM	Main Vac valve closed
7/9/2012	12:12:58 AM	Bypass valve closed
7/9/2012	12:12:58 AM	Bubbler valve closed
7/9/2012	12:12:58 AM	Helium MFC set to  0.000000
7/9/2012	12:12:58 AM	H2 MFC set to  0.000000
7/9/2012	12:12:58 AM	BCl3 MFC set to  0.000000
7/9/2012	12:12:58 AM	PH3 MFC set to  0.000000
7/9/2012	12:12:58 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:12:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:12:58 AM	Tube furnace set to 0
7/9/2012	12:13:01 AM	H2 valve closed
7/9/2012	12:13:01 AM	BCl3 valve closed
7/9/2012	12:13:01 AM	PH3 valve closed
7/9/2012	12:13:01 AM	SiCl4 pre valve closed
7/9/2012	12:13:01 AM	SiCl4 post valve closed
7/9/2012	12:13:01 AM	Main Vac valve closed
7/9/2012	12:13:01 AM	Bypass valve closed
7/9/2012	12:13:01 AM	Bubbler valve closed
7/9/2012	12:13:01 AM	Helium valve opened
7/9/2012	12:13:01 AM	Helium MFC set to  500.000000
7/9/2012	12:13:01 AM	H2 MFC set to  0.000000
7/9/2012	12:13:01 AM	BCl3 MFC set to  0.000000
7/9/2012	12:13:01 AM	PH3 MFC set to  0.000000
7/9/2012	12:13:01 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:13:01 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:13:01 AM	Tube furnace set to 0
7/9/2012	12:13:08 AM	Helium valve closed
7/9/2012	12:13:08 AM	H2 valve closed
7/9/2012	12:13:08 AM	BCl3 valve closed
7/9/2012	12:13:08 AM	PH3 valve closed
7/9/2012	12:13:08 AM	SiCl4 pre valve closed
7/9/2012	12:13:08 AM	SiCl4 post valve closed
7/9/2012	12:13:08 AM	Main Vac valve closed
7/9/2012	12:13:08 AM	Bypass valve closed
7/9/2012	12:13:09 AM	Bubbler valve closed
7/9/2012	12:13:09 AM	Helium MFC set to  0.000000
7/9/2012	12:13:09 AM	H2 MFC set to  0.000000
7/9/2012	12:13:09 AM	BCl3 MFC set to  0.000000
7/9/2012	12:13:09 AM	PH3 MFC set to  0.000000
7/9/2012	12:13:09 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:13:09 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:13:09 AM	Tube furnace set to 0
7/9/2012	12:13:10 AM	Run finished at 12:13 AM
7/9/2012	12:13:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	12:14:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	12:14:47 AM	Recipe started at 12:14 AM
7/9/2012	12:14:47 AM	Helium valve closed
7/9/2012	12:14:47 AM	H2 valve closed
7/9/2012	12:14:47 AM	BCl3 valve closed
7/9/2012	12:14:47 AM	PH3 valve closed
7/9/2012	12:14:47 AM	SiCl4 pre valve closed
7/9/2012	12:14:47 AM	SiCl4 post valve closed
7/9/2012	12:14:47 AM	Main Vac valve closed
7/9/2012	12:14:47 AM	Bubbler valve closed
7/9/2012	12:14:47 AM	Bypass valve opened
7/9/2012	12:14:47 AM	Helium MFC set to  0.000000
7/9/2012	12:14:47 AM	H2 MFC set to  0.000000
7/9/2012	12:14:47 AM	BCl3 MFC set to  0.000000
7/9/2012	12:14:47 AM	PH3 MFC set to  0.000000
7/9/2012	12:14:47 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:14:47 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:14:47 AM	Tube furnace set to 0
7/9/2012	12:15:52 AM	Helium valve closed
7/9/2012	12:15:52 AM	H2 valve closed
7/9/2012	12:15:52 AM	BCl3 valve closed
7/9/2012	12:15:52 AM	PH3 valve closed
7/9/2012	12:15:52 AM	SiCl4 pre valve closed
7/9/2012	12:15:52 AM	SiCl4 post valve closed
7/9/2012	12:15:52 AM	Main Vac valve closed
7/9/2012	12:15:52 AM	Bubbler valve closed
7/9/2012	12:15:52 AM	Bypass valve opened
7/9/2012	12:15:52 AM	Helium MFC set to  0.000000
7/9/2012	12:15:52 AM	H2 MFC set to  0.000000
7/9/2012	12:15:52 AM	BCl3 MFC set to  0.000000
7/9/2012	12:15:52 AM	PH3 MFC set to  0.000000
7/9/2012	12:15:52 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:15:52 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:15:52 AM	Tube furnace set to 0
7/9/2012	12:16:52 AM	Helium valve closed
7/9/2012	12:16:52 AM	H2 valve closed
7/9/2012	12:16:52 AM	BCl3 valve closed
7/9/2012	12:16:52 AM	PH3 valve closed
7/9/2012	12:16:53 AM	SiCl4 pre valve closed
7/9/2012	12:16:53 AM	SiCl4 post valve closed
7/9/2012	12:16:53 AM	Bypass valve closed
7/9/2012	12:16:53 AM	Bubbler valve closed
7/9/2012	12:16:53 AM	Main Vac valve opened
7/9/2012	12:16:53 AM	Helium MFC set to  0.000000
7/9/2012	12:16:53 AM	H2 MFC set to  0.000000
7/9/2012	12:16:53 AM	BCl3 MFC set to  0.000000
7/9/2012	12:16:53 AM	PH3 MFC set to  0.000000
7/9/2012	12:16:53 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:16:53 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:16:53 AM	Tube furnace set to 0
7/9/2012	12:16:54 AM	Run finished at 12:16 AM
7/9/2012	12:16:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	12:18:56 AM	Recipe started at 12:18 AM
7/9/2012	12:18:56 AM	Helium valve closed
7/9/2012	12:18:56 AM	H2 valve closed
7/9/2012	12:18:56 AM	BCl3 valve closed
7/9/2012	12:18:56 AM	PH3 valve closed
7/9/2012	12:18:56 AM	SiCl4 pre valve closed
7/9/2012	12:18:56 AM	SiCl4 post valve closed
7/9/2012	12:18:56 AM	Bypass valve closed
7/9/2012	12:18:56 AM	Bubbler valve closed
7/9/2012	12:18:56 AM	Main Vac valve opened
7/9/2012	12:18:56 AM	Helium MFC set to  0.000000
7/9/2012	12:18:56 AM	H2 MFC set to  0.000000
7/9/2012	12:18:56 AM	BCl3 MFC set to  0.000000
7/9/2012	12:18:56 AM	PH3 MFC set to  0.000000
7/9/2012	12:18:56 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:18:56 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:18:56 AM	Tube furnace set to 0
7/9/2012	12:19:26 AM	H2 valve closed
7/9/2012	12:19:26 AM	BCl3 valve closed
7/9/2012	12:19:26 AM	PH3 valve closed
7/9/2012	12:19:26 AM	SiCl4 pre valve closed
7/9/2012	12:19:26 AM	SiCl4 post valve closed
7/9/2012	12:19:26 AM	Bypass valve closed
7/9/2012	12:19:26 AM	Bubbler valve closed
7/9/2012	12:19:26 AM	Helium valve opened
7/9/2012	12:19:26 AM	Main Vac valve opened
7/9/2012	12:19:26 AM	Helium MFC set to  20.000000
7/9/2012	12:19:26 AM	H2 MFC set to  0.000000
7/9/2012	12:19:26 AM	BCl3 MFC set to  0.000000
7/9/2012	12:19:26 AM	PH3 MFC set to  0.000000
7/9/2012	12:19:26 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:19:26 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:19:26 AM	Tube furnace set to 0
7/9/2012	12:19:56 AM	Helium valve closed
7/9/2012	12:19:56 AM	H2 valve closed
7/9/2012	12:19:56 AM	BCl3 valve closed
7/9/2012	12:19:56 AM	PH3 valve closed
7/9/2012	12:19:56 AM	SiCl4 pre valve closed
7/9/2012	12:19:56 AM	SiCl4 post valve closed
7/9/2012	12:19:56 AM	Bypass valve closed
7/9/2012	12:19:56 AM	Bubbler valve closed
7/9/2012	12:19:56 AM	Main Vac valve opened
7/9/2012	12:19:56 AM	Helium MFC set to  0.000000
7/9/2012	12:19:56 AM	H2 MFC set to  0.000000
7/9/2012	12:19:56 AM	BCl3 MFC set to  0.000000
7/9/2012	12:19:56 AM	PH3 MFC set to  0.000000
7/9/2012	12:19:56 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:19:56 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:19:56 AM	Tube furnace set to 0
7/9/2012	12:20:26 AM	H2 valve closed
7/9/2012	12:20:26 AM	BCl3 valve closed
7/9/2012	12:20:26 AM	PH3 valve closed
7/9/2012	12:20:26 AM	SiCl4 pre valve closed
7/9/2012	12:20:26 AM	SiCl4 post valve closed
7/9/2012	12:20:26 AM	Bypass valve closed
7/9/2012	12:20:27 AM	Bubbler valve closed
7/9/2012	12:20:27 AM	Helium valve opened
7/9/2012	12:20:27 AM	Main Vac valve opened
7/9/2012	12:20:27 AM	Helium MFC set to  20.000000
7/9/2012	12:20:27 AM	H2 MFC set to  0.000000
7/9/2012	12:20:27 AM	BCl3 MFC set to  0.000000
7/9/2012	12:20:27 AM	PH3 MFC set to  0.000000
7/9/2012	12:20:27 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:20:27 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:20:27 AM	Tube furnace set to 0
7/9/2012	12:20:57 AM	Helium valve closed
7/9/2012	12:20:57 AM	H2 valve closed
7/9/2012	12:20:57 AM	BCl3 valve closed
7/9/2012	12:20:57 AM	PH3 valve closed
7/9/2012	12:20:57 AM	SiCl4 pre valve closed
7/9/2012	12:20:57 AM	SiCl4 post valve closed
7/9/2012	12:20:57 AM	Bypass valve closed
7/9/2012	12:20:57 AM	Bubbler valve closed
7/9/2012	12:20:57 AM	Main Vac valve opened
7/9/2012	12:20:57 AM	Helium MFC set to  0.000000
7/9/2012	12:20:57 AM	H2 MFC set to  0.000000
7/9/2012	12:20:57 AM	BCl3 MFC set to  0.000000
7/9/2012	12:20:57 AM	PH3 MFC set to  0.000000
7/9/2012	12:20:57 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:20:57 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:20:57 AM	Tube furnace set to 0
7/9/2012	12:21:27 AM	H2 valve closed
7/9/2012	12:21:27 AM	BCl3 valve closed
7/9/2012	12:21:27 AM	PH3 valve closed
7/9/2012	12:21:27 AM	SiCl4 pre valve closed
7/9/2012	12:21:27 AM	SiCl4 post valve closed
7/9/2012	12:21:27 AM	Bypass valve closed
7/9/2012	12:21:27 AM	Bubbler valve closed
7/9/2012	12:21:27 AM	Helium valve opened
7/9/2012	12:21:27 AM	Main Vac valve opened
7/9/2012	12:21:27 AM	Helium MFC set to  20.000000
7/9/2012	12:21:27 AM	H2 MFC set to  0.000000
7/9/2012	12:21:27 AM	BCl3 MFC set to  0.000000
7/9/2012	12:21:27 AM	PH3 MFC set to  0.000000
7/9/2012	12:21:27 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:21:27 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:21:27 AM	Tube furnace set to 0
7/9/2012	12:21:57 AM	Helium valve closed
7/9/2012	12:21:57 AM	H2 valve closed
7/9/2012	12:21:57 AM	BCl3 valve closed
7/9/2012	12:21:57 AM	PH3 valve closed
7/9/2012	12:21:57 AM	SiCl4 pre valve closed
7/9/2012	12:21:57 AM	SiCl4 post valve closed
7/9/2012	12:21:57 AM	Bypass valve closed
7/9/2012	12:21:57 AM	Bubbler valve closed
7/9/2012	12:21:57 AM	Main Vac valve opened
7/9/2012	12:21:57 AM	Helium MFC set to  0.000000
7/9/2012	12:21:57 AM	H2 MFC set to  0.000000
7/9/2012	12:21:57 AM	BCl3 MFC set to  0.000000
7/9/2012	12:21:57 AM	PH3 MFC set to  0.000000
7/9/2012	12:21:57 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:21:57 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:21:57 AM	Tube furnace set to 0
7/9/2012	12:22:27 AM	H2 valve closed
7/9/2012	12:22:27 AM	BCl3 valve closed
7/9/2012	12:22:27 AM	PH3 valve closed
7/9/2012	12:22:27 AM	SiCl4 pre valve closed
7/9/2012	12:22:27 AM	SiCl4 post valve closed
7/9/2012	12:22:27 AM	Bypass valve closed
7/9/2012	12:22:27 AM	Bubbler valve closed
7/9/2012	12:22:27 AM	Helium valve opened
7/9/2012	12:22:27 AM	Main Vac valve opened
7/9/2012	12:22:27 AM	Helium MFC set to  20.000000
7/9/2012	12:22:27 AM	H2 MFC set to  0.000000
7/9/2012	12:22:27 AM	BCl3 MFC set to  0.000000
7/9/2012	12:22:27 AM	PH3 MFC set to  0.000000
7/9/2012	12:22:27 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:22:27 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:22:28 AM	Tube furnace set to 0
7/9/2012	12:22:58 AM	Helium valve closed
7/9/2012	12:22:58 AM	H2 valve closed
7/9/2012	12:22:58 AM	BCl3 valve closed
7/9/2012	12:22:58 AM	PH3 valve closed
7/9/2012	12:22:58 AM	SiCl4 pre valve closed
7/9/2012	12:22:58 AM	SiCl4 post valve closed
7/9/2012	12:22:58 AM	Bypass valve closed
7/9/2012	12:22:58 AM	Bubbler valve closed
7/9/2012	12:22:58 AM	Main Vac valve opened
7/9/2012	12:22:58 AM	Helium MFC set to  0.000000
7/9/2012	12:22:58 AM	H2 MFC set to  0.000000
7/9/2012	12:22:58 AM	BCl3 MFC set to  0.000000
7/9/2012	12:22:58 AM	PH3 MFC set to  0.000000
7/9/2012	12:22:58 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:22:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:22:58 AM	Tube furnace set to 0
7/9/2012	12:23:28 AM	H2 valve closed
7/9/2012	12:23:28 AM	BCl3 valve closed
7/9/2012	12:23:28 AM	PH3 valve closed
7/9/2012	12:23:28 AM	SiCl4 pre valve closed
7/9/2012	12:23:28 AM	SiCl4 post valve closed
7/9/2012	12:23:28 AM	Bypass valve closed
7/9/2012	12:23:28 AM	Bubbler valve closed
7/9/2012	12:23:28 AM	Helium valve opened
7/9/2012	12:23:28 AM	Main Vac valve opened
7/9/2012	12:23:28 AM	Helium MFC set to  20.000000
7/9/2012	12:23:28 AM	H2 MFC set to  0.000000
7/9/2012	12:23:28 AM	BCl3 MFC set to  0.000000
7/9/2012	12:23:28 AM	PH3 MFC set to  0.000000
7/9/2012	12:23:28 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:23:28 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:23:28 AM	Tube furnace set to 0
7/9/2012	12:23:58 AM	Helium valve closed
7/9/2012	12:23:58 AM	H2 valve closed
7/9/2012	12:23:58 AM	BCl3 valve closed
7/9/2012	12:23:58 AM	PH3 valve closed
7/9/2012	12:23:58 AM	SiCl4 pre valve closed
7/9/2012	12:23:58 AM	SiCl4 post valve closed
7/9/2012	12:23:58 AM	Bypass valve closed
7/9/2012	12:23:58 AM	Bubbler valve closed
7/9/2012	12:23:58 AM	Main Vac valve opened
7/9/2012	12:23:58 AM	Helium MFC set to  0.000000
7/9/2012	12:23:58 AM	H2 MFC set to  0.000000
7/9/2012	12:23:58 AM	BCl3 MFC set to  0.000000
7/9/2012	12:23:58 AM	PH3 MFC set to  0.000000
7/9/2012	12:23:58 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:23:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:23:58 AM	Tube furnace set to 0
7/9/2012	12:24:28 AM	H2 valve closed
7/9/2012	12:24:28 AM	BCl3 valve closed
7/9/2012	12:24:28 AM	PH3 valve closed
7/9/2012	12:24:28 AM	SiCl4 pre valve closed
7/9/2012	12:24:28 AM	SiCl4 post valve closed
7/9/2012	12:24:28 AM	Bypass valve closed
7/9/2012	12:24:28 AM	Bubbler valve closed
7/9/2012	12:24:28 AM	Helium valve opened
7/9/2012	12:24:28 AM	Main Vac valve opened
7/9/2012	12:24:28 AM	Helium MFC set to  20.000000
7/9/2012	12:24:28 AM	H2 MFC set to  0.000000
7/9/2012	12:24:28 AM	BCl3 MFC set to  0.000000
7/9/2012	12:24:28 AM	PH3 MFC set to  0.000000
7/9/2012	12:24:28 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:24:28 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:24:29 AM	Tube furnace set to 0
7/9/2012	12:24:59 AM	Helium valve closed
7/9/2012	12:24:59 AM	H2 valve closed
7/9/2012	12:24:59 AM	BCl3 valve closed
7/9/2012	12:24:59 AM	PH3 valve closed
7/9/2012	12:24:59 AM	SiCl4 pre valve closed
7/9/2012	12:24:59 AM	SiCl4 post valve closed
7/9/2012	12:24:59 AM	Bypass valve closed
7/9/2012	12:24:59 AM	Bubbler valve closed
7/9/2012	12:24:59 AM	Main Vac valve opened
7/9/2012	12:24:59 AM	Helium MFC set to  0.000000
7/9/2012	12:24:59 AM	H2 MFC set to  0.000000
7/9/2012	12:24:59 AM	BCl3 MFC set to  0.000000
7/9/2012	12:24:59 AM	PH3 MFC set to  0.000000
7/9/2012	12:24:59 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:24:59 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:24:59 AM	Tube furnace set to 0
7/9/2012	12:25:29 AM	H2 valve closed
7/9/2012	12:25:29 AM	BCl3 valve closed
7/9/2012	12:25:29 AM	PH3 valve closed
7/9/2012	12:25:29 AM	SiCl4 pre valve closed
7/9/2012	12:25:29 AM	SiCl4 post valve closed
7/9/2012	12:25:29 AM	Bypass valve closed
7/9/2012	12:25:29 AM	Bubbler valve closed
7/9/2012	12:25:29 AM	Helium valve opened
7/9/2012	12:25:29 AM	Main Vac valve opened
7/9/2012	12:25:29 AM	Helium MFC set to  20.000000
7/9/2012	12:25:29 AM	H2 MFC set to  0.000000
7/9/2012	12:25:29 AM	BCl3 MFC set to  0.000000
7/9/2012	12:25:29 AM	PH3 MFC set to  0.000000
7/9/2012	12:25:29 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:25:29 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:25:29 AM	Tube furnace set to 0
7/9/2012	12:25:59 AM	Helium valve closed
7/9/2012	12:25:59 AM	H2 valve closed
7/9/2012	12:25:59 AM	BCl3 valve closed
7/9/2012	12:25:59 AM	PH3 valve closed
7/9/2012	12:25:59 AM	SiCl4 pre valve closed
7/9/2012	12:25:59 AM	SiCl4 post valve closed
7/9/2012	12:25:59 AM	Bypass valve closed
7/9/2012	12:25:59 AM	Bubbler valve closed
7/9/2012	12:25:59 AM	Main Vac valve opened
7/9/2012	12:25:59 AM	Helium MFC set to  0.000000
7/9/2012	12:25:59 AM	H2 MFC set to  0.000000
7/9/2012	12:25:59 AM	BCl3 MFC set to  0.000000
7/9/2012	12:25:59 AM	PH3 MFC set to  0.000000
7/9/2012	12:25:59 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:25:59 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:25:59 AM	Tube furnace set to 0
7/9/2012	12:26:29 AM	H2 valve closed
7/9/2012	12:26:29 AM	BCl3 valve closed
7/9/2012	12:26:29 AM	PH3 valve closed
7/9/2012	12:26:29 AM	SiCl4 pre valve closed
7/9/2012	12:26:29 AM	SiCl4 post valve closed
7/9/2012	12:26:29 AM	Bypass valve closed
7/9/2012	12:26:29 AM	Bubbler valve closed
7/9/2012	12:26:29 AM	Helium valve opened
7/9/2012	12:26:29 AM	Main Vac valve opened
7/9/2012	12:26:29 AM	Helium MFC set to  20.000000
7/9/2012	12:26:29 AM	H2 MFC set to  0.000000
7/9/2012	12:26:29 AM	BCl3 MFC set to  0.000000
7/9/2012	12:26:29 AM	PH3 MFC set to  0.000000
7/9/2012	12:26:29 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:26:29 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:26:30 AM	Tube furnace set to 0
7/9/2012	12:27:00 AM	Helium valve closed
7/9/2012	12:27:00 AM	H2 valve closed
7/9/2012	12:27:00 AM	BCl3 valve closed
7/9/2012	12:27:00 AM	PH3 valve closed
7/9/2012	12:27:00 AM	SiCl4 pre valve closed
7/9/2012	12:27:00 AM	SiCl4 post valve closed
7/9/2012	12:27:00 AM	Bypass valve closed
7/9/2012	12:27:00 AM	Bubbler valve closed
7/9/2012	12:27:00 AM	Main Vac valve opened
7/9/2012	12:27:00 AM	Helium MFC set to  0.000000
7/9/2012	12:27:00 AM	H2 MFC set to  0.000000
7/9/2012	12:27:00 AM	BCl3 MFC set to  0.000000
7/9/2012	12:27:00 AM	PH3 MFC set to  0.000000
7/9/2012	12:27:00 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:27:00 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:27:00 AM	Tube furnace set to 0
7/9/2012	12:27:30 AM	H2 valve closed
7/9/2012	12:27:30 AM	BCl3 valve closed
7/9/2012	12:27:30 AM	PH3 valve closed
7/9/2012	12:27:30 AM	SiCl4 pre valve closed
7/9/2012	12:27:30 AM	SiCl4 post valve closed
7/9/2012	12:27:30 AM	Bypass valve closed
7/9/2012	12:27:30 AM	Bubbler valve closed
7/9/2012	12:27:30 AM	Helium valve opened
7/9/2012	12:27:30 AM	Main Vac valve opened
7/9/2012	12:27:30 AM	Helium MFC set to  20.000000
7/9/2012	12:27:30 AM	H2 MFC set to  0.000000
7/9/2012	12:27:30 AM	BCl3 MFC set to  0.000000
7/9/2012	12:27:30 AM	PH3 MFC set to  0.000000
7/9/2012	12:27:30 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:27:30 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:27:30 AM	Tube furnace set to 0
7/9/2012	12:28:00 AM	Helium valve closed
7/9/2012	12:28:00 AM	H2 valve closed
7/9/2012	12:28:00 AM	BCl3 valve closed
7/9/2012	12:28:00 AM	PH3 valve closed
7/9/2012	12:28:00 AM	SiCl4 pre valve closed
7/9/2012	12:28:00 AM	SiCl4 post valve closed
7/9/2012	12:28:00 AM	Bypass valve closed
7/9/2012	12:28:00 AM	Bubbler valve closed
7/9/2012	12:28:00 AM	Main Vac valve opened
7/9/2012	12:28:00 AM	Helium MFC set to  0.000000
7/9/2012	12:28:00 AM	H2 MFC set to  0.000000
7/9/2012	12:28:00 AM	BCl3 MFC set to  0.000000
7/9/2012	12:28:00 AM	PH3 MFC set to  0.000000
7/9/2012	12:28:00 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:28:00 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:28:00 AM	Tube furnace set to 200
7/9/2012	12:28:30 AM	H2 valve closed
7/9/2012	12:28:30 AM	BCl3 valve closed
7/9/2012	12:28:30 AM	PH3 valve closed
7/9/2012	12:28:30 AM	SiCl4 pre valve closed
7/9/2012	12:28:30 AM	SiCl4 post valve closed
7/9/2012	12:28:30 AM	Bypass valve closed
7/9/2012	12:28:30 AM	Bubbler valve closed
7/9/2012	12:28:30 AM	Helium valve opened
7/9/2012	12:28:30 AM	Main Vac valve opened
7/9/2012	12:28:30 AM	Helium MFC set to  20.000000
7/9/2012	12:28:30 AM	H2 MFC set to  0.000000
7/9/2012	12:28:30 AM	BCl3 MFC set to  0.000000
7/9/2012	12:28:30 AM	PH3 MFC set to  0.000000
7/9/2012	12:28:30 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:28:30 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:28:30 AM	Tube furnace set to 200
7/9/2012	12:29:00 AM	Helium valve closed
7/9/2012	12:29:01 AM	H2 valve closed
7/9/2012	12:29:01 AM	BCl3 valve closed
7/9/2012	12:29:01 AM	PH3 valve closed
7/9/2012	12:29:01 AM	SiCl4 pre valve closed
7/9/2012	12:29:01 AM	SiCl4 post valve closed
7/9/2012	12:29:01 AM	Bypass valve closed
7/9/2012	12:29:01 AM	Bubbler valve closed
7/9/2012	12:29:01 AM	Main Vac valve opened
7/9/2012	12:29:01 AM	Helium MFC set to  0.000000
7/9/2012	12:29:01 AM	H2 MFC set to  0.000000
7/9/2012	12:29:01 AM	BCl3 MFC set to  0.000000
7/9/2012	12:29:01 AM	PH3 MFC set to  0.000000
7/9/2012	12:29:01 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:29:01 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:29:01 AM	Tube furnace set to 200
7/9/2012	12:29:31 AM	H2 valve closed
7/9/2012	12:29:31 AM	BCl3 valve closed
7/9/2012	12:29:31 AM	PH3 valve closed
7/9/2012	12:29:31 AM	SiCl4 pre valve closed
7/9/2012	12:29:31 AM	SiCl4 post valve closed
7/9/2012	12:29:31 AM	Bypass valve closed
7/9/2012	12:29:31 AM	Bubbler valve closed
7/9/2012	12:29:31 AM	Helium valve opened
7/9/2012	12:29:31 AM	Main Vac valve opened
7/9/2012	12:29:31 AM	Helium MFC set to  20.000000
7/9/2012	12:29:31 AM	H2 MFC set to  0.000000
7/9/2012	12:29:31 AM	BCl3 MFC set to  0.000000
7/9/2012	12:29:31 AM	PH3 MFC set to  0.000000
7/9/2012	12:29:31 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:29:31 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:29:31 AM	Tube furnace set to 200
7/9/2012	12:30:01 AM	Helium valve closed
7/9/2012	12:30:01 AM	H2 valve closed
7/9/2012	12:30:01 AM	BCl3 valve closed
7/9/2012	12:30:01 AM	PH3 valve closed
7/9/2012	12:30:01 AM	SiCl4 pre valve closed
7/9/2012	12:30:01 AM	SiCl4 post valve closed
7/9/2012	12:30:01 AM	Bypass valve closed
7/9/2012	12:30:01 AM	Bubbler valve closed
7/9/2012	12:30:01 AM	Main Vac valve opened
7/9/2012	12:30:01 AM	Helium MFC set to  0.000000
7/9/2012	12:30:01 AM	H2 MFC set to  0.000000
7/9/2012	12:30:01 AM	BCl3 MFC set to  0.000000
7/9/2012	12:30:01 AM	PH3 MFC set to  0.000000
7/9/2012	12:30:01 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:30:01 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:30:01 AM	Tube furnace set to 200
7/9/2012	12:30:31 AM	H2 valve closed
7/9/2012	12:30:31 AM	BCl3 valve closed
7/9/2012	12:30:31 AM	PH3 valve closed
7/9/2012	12:30:31 AM	SiCl4 pre valve closed
7/9/2012	12:30:31 AM	SiCl4 post valve closed
7/9/2012	12:30:31 AM	Bypass valve closed
7/9/2012	12:30:31 AM	Bubbler valve closed
7/9/2012	12:30:31 AM	Helium valve opened
7/9/2012	12:30:31 AM	Main Vac valve opened
7/9/2012	12:30:31 AM	Helium MFC set to  20.000000
7/9/2012	12:30:31 AM	H2 MFC set to  0.000000
7/9/2012	12:30:31 AM	BCl3 MFC set to  0.000000
7/9/2012	12:30:31 AM	PH3 MFC set to  0.000000
7/9/2012	12:30:31 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:30:31 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:30:31 AM	Tube furnace set to 200
7/9/2012	12:31:01 AM	Helium valve closed
7/9/2012	12:31:01 AM	H2 valve closed
7/9/2012	12:31:01 AM	BCl3 valve closed
7/9/2012	12:31:01 AM	PH3 valve closed
7/9/2012	12:31:01 AM	SiCl4 pre valve closed
7/9/2012	12:31:01 AM	SiCl4 post valve closed
7/9/2012	12:31:01 AM	Bypass valve closed
7/9/2012	12:31:01 AM	Bubbler valve closed
7/9/2012	12:31:01 AM	Main Vac valve opened
7/9/2012	12:31:01 AM	Helium MFC set to  0.000000
7/9/2012	12:31:01 AM	H2 MFC set to  0.000000
7/9/2012	12:31:01 AM	BCl3 MFC set to  0.000000
7/9/2012	12:31:01 AM	PH3 MFC set to  0.000000
7/9/2012	12:31:02 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:31:02 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:31:02 AM	Tube furnace set to 200
7/9/2012	12:31:32 AM	H2 valve closed
7/9/2012	12:31:32 AM	BCl3 valve closed
7/9/2012	12:31:32 AM	PH3 valve closed
7/9/2012	12:31:32 AM	SiCl4 pre valve closed
7/9/2012	12:31:32 AM	SiCl4 post valve closed
7/9/2012	12:31:32 AM	Bypass valve closed
7/9/2012	12:31:32 AM	Bubbler valve closed
7/9/2012	12:31:32 AM	Helium valve opened
7/9/2012	12:31:32 AM	Main Vac valve opened
7/9/2012	12:31:32 AM	Helium MFC set to  20.000000
7/9/2012	12:31:32 AM	H2 MFC set to  0.000000
7/9/2012	12:31:32 AM	BCl3 MFC set to  0.000000
7/9/2012	12:31:32 AM	PH3 MFC set to  0.000000
7/9/2012	12:31:32 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:31:32 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:31:32 AM	Tube furnace set to 200
7/9/2012	12:32:02 AM	Helium valve closed
7/9/2012	12:32:02 AM	H2 valve closed
7/9/2012	12:32:02 AM	BCl3 valve closed
7/9/2012	12:32:02 AM	PH3 valve closed
7/9/2012	12:32:02 AM	SiCl4 pre valve closed
7/9/2012	12:32:02 AM	SiCl4 post valve closed
7/9/2012	12:32:02 AM	Bypass valve closed
7/9/2012	12:32:02 AM	Bubbler valve closed
7/9/2012	12:32:02 AM	Main Vac valve opened
7/9/2012	12:32:02 AM	Helium MFC set to  0.000000
7/9/2012	12:32:02 AM	H2 MFC set to  0.000000
7/9/2012	12:32:02 AM	BCl3 MFC set to  0.000000
7/9/2012	12:32:02 AM	PH3 MFC set to  0.000000
7/9/2012	12:32:02 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:32:02 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:32:02 AM	Tube furnace set to 200
7/9/2012	12:32:32 AM	H2 valve closed
7/9/2012	12:32:32 AM	BCl3 valve closed
7/9/2012	12:32:32 AM	PH3 valve closed
7/9/2012	12:32:32 AM	SiCl4 pre valve closed
7/9/2012	12:32:32 AM	SiCl4 post valve closed
7/9/2012	12:32:32 AM	Bypass valve closed
7/9/2012	12:32:32 AM	Bubbler valve closed
7/9/2012	12:32:32 AM	Helium valve opened
7/9/2012	12:32:32 AM	Main Vac valve opened
7/9/2012	12:32:32 AM	Helium MFC set to  20.000000
7/9/2012	12:32:32 AM	H2 MFC set to  0.000000
7/9/2012	12:32:32 AM	BCl3 MFC set to  0.000000
7/9/2012	12:32:32 AM	PH3 MFC set to  0.000000
7/9/2012	12:32:32 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:32:32 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:32:32 AM	Tube furnace set to 200
7/9/2012	12:33:02 AM	Helium valve closed
7/9/2012	12:33:02 AM	H2 valve closed
7/9/2012	12:33:02 AM	BCl3 valve closed
7/9/2012	12:33:02 AM	PH3 valve closed
7/9/2012	12:33:02 AM	SiCl4 pre valve closed
7/9/2012	12:33:02 AM	SiCl4 post valve closed
7/9/2012	12:33:02 AM	Bypass valve closed
7/9/2012	12:33:02 AM	Bubbler valve closed
7/9/2012	12:33:02 AM	Main Vac valve opened
7/9/2012	12:33:02 AM	Helium MFC set to  0.000000
7/9/2012	12:33:02 AM	H2 MFC set to  0.000000
7/9/2012	12:33:02 AM	BCl3 MFC set to  0.000000
7/9/2012	12:33:02 AM	PH3 MFC set to  0.000000
7/9/2012	12:33:02 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:33:02 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:33:03 AM	Tube furnace set to 200
7/9/2012	12:33:33 AM	H2 valve closed
7/9/2012	12:33:33 AM	BCl3 valve closed
7/9/2012	12:33:33 AM	PH3 valve closed
7/9/2012	12:33:33 AM	SiCl4 pre valve closed
7/9/2012	12:33:33 AM	SiCl4 post valve closed
7/9/2012	12:33:33 AM	Bypass valve closed
7/9/2012	12:33:33 AM	Bubbler valve closed
7/9/2012	12:33:33 AM	Helium valve opened
7/9/2012	12:33:33 AM	Main Vac valve opened
7/9/2012	12:33:33 AM	Helium MFC set to  20.000000
7/9/2012	12:33:33 AM	H2 MFC set to  0.000000
7/9/2012	12:33:33 AM	BCl3 MFC set to  0.000000
7/9/2012	12:33:33 AM	PH3 MFC set to  0.000000
7/9/2012	12:33:33 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:33:33 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:33:33 AM	Tube furnace set to 200
7/9/2012	12:34:03 AM	Helium valve closed
7/9/2012	12:34:03 AM	H2 valve closed
7/9/2012	12:34:03 AM	BCl3 valve closed
7/9/2012	12:34:03 AM	PH3 valve closed
7/9/2012	12:34:03 AM	SiCl4 pre valve closed
7/9/2012	12:34:03 AM	SiCl4 post valve closed
7/9/2012	12:34:03 AM	Bypass valve closed
7/9/2012	12:34:03 AM	Bubbler valve closed
7/9/2012	12:34:03 AM	Main Vac valve opened
7/9/2012	12:34:03 AM	Helium MFC set to  0.000000
7/9/2012	12:34:03 AM	H2 MFC set to  0.000000
7/9/2012	12:34:03 AM	BCl3 MFC set to  0.000000
7/9/2012	12:34:03 AM	PH3 MFC set to  0.000000
7/9/2012	12:34:03 AM	SiCl4 MFC set to  0.000000
7/9/2012	12:34:03 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	12:34:03 AM	Tube furnace set to 0
7/9/2012	12:34:04 AM	Run finished at 12:34 AM
7/9/2012	1:09:01 AM	Main Vac valve closed
7/9/2012	1:09:19 AM	Main Vac valve opened
7/9/2012	1:10:12 AM	Recipe started at 1:10 AM
7/9/2012	1:10:13 AM	Helium valve closed
7/9/2012	1:10:13 AM	H2 valve closed
7/9/2012	1:10:13 AM	BCl3 valve closed
7/9/2012	1:10:13 AM	PH3 valve closed
7/9/2012	1:10:13 AM	SiCl4 pre valve closed
7/9/2012	1:10:13 AM	SiCl4 post valve closed
7/9/2012	1:10:13 AM	Main Vac valve closed
7/9/2012	1:10:13 AM	Bypass valve closed
7/9/2012	1:10:13 AM	Bubbler valve closed
7/9/2012	1:10:13 AM	Helium MFC set to  0.000000
7/9/2012	1:10:13 AM	H2 MFC set to  0.000000
7/9/2012	1:10:13 AM	BCl3 MFC set to  0.000000
7/9/2012	1:10:13 AM	PH3 MFC set to  0.000000
7/9/2012	1:10:13 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:10:13 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:10:13 AM	Tube furnace set to 0
7/9/2012	1:10:16 AM	Helium valve closed
7/9/2012	1:10:16 AM	BCl3 valve closed
7/9/2012	1:10:16 AM	PH3 valve closed
7/9/2012	1:10:16 AM	SiCl4 pre valve closed
7/9/2012	1:10:16 AM	SiCl4 post valve closed
7/9/2012	1:10:16 AM	Main Vac valve closed
7/9/2012	1:10:16 AM	Bypass valve closed
7/9/2012	1:10:16 AM	Bubbler valve closed
7/9/2012	1:10:16 AM	H2 valve opened
7/9/2012	1:10:16 AM	Helium MFC set to  0.000000
7/9/2012	1:10:16 AM	H2 MFC set to  500.000000
7/9/2012	1:10:16 AM	BCl3 MFC set to  0.000000
7/9/2012	1:10:16 AM	PH3 MFC set to  0.000000
7/9/2012	1:10:16 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:10:16 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:10:16 AM	Tube furnace set to 0
7/9/2012	1:11:29 AM	Helium valve closed
7/9/2012	1:11:29 AM	BCl3 valve closed
7/9/2012	1:11:29 AM	PH3 valve closed
7/9/2012	1:11:30 AM	SiCl4 pre valve closed
7/9/2012	1:11:30 AM	SiCl4 post valve closed
7/9/2012	1:11:30 AM	Main Vac valve closed
7/9/2012	1:11:30 AM	Bypass valve closed
7/9/2012	1:11:30 AM	H2 valve opened
7/9/2012	1:11:30 AM	Bubbler valve opened
7/9/2012	1:11:30 AM	Helium MFC set to  0.000000
7/9/2012	1:11:30 AM	H2 MFC set to  500.000000
7/9/2012	1:11:30 AM	BCl3 MFC set to  0.000000
7/9/2012	1:11:30 AM	PH3 MFC set to  0.000000
7/9/2012	1:11:30 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:11:30 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:11:30 AM	Tube furnace set to 0
7/9/2012	1:11:31 AM	Helium valve closed
7/9/2012	1:11:31 AM	BCl3 valve closed
7/9/2012	1:11:31 AM	PH3 valve closed
7/9/2012	1:11:31 AM	SiCl4 pre valve closed
7/9/2012	1:11:31 AM	SiCl4 post valve closed
7/9/2012	1:11:31 AM	Main Vac valve closed
7/9/2012	1:11:31 AM	Bypass valve closed
7/9/2012	1:11:31 AM	H2 valve opened
7/9/2012	1:11:31 AM	Bubbler valve opened
7/9/2012	1:11:31 AM	Helium MFC set to  0.000000
7/9/2012	1:11:31 AM	H2 MFC set to  500.000000
7/9/2012	1:11:31 AM	BCl3 MFC set to  0.000000
7/9/2012	1:11:31 AM	PH3 MFC set to  0.000000
7/9/2012	1:11:31 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:11:31 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:11:31 AM	Tube furnace set to 1000
7/9/2012	1:18:57 AM	Run aborted at 1:18 AM
7/9/2012	1:18:57 AM	Helium valve closed
7/9/2012	1:18:57 AM	H2 valve closed
7/9/2012	1:18:57 AM	BCl3 valve closed
7/9/2012	1:18:57 AM	PH3 valve closed
7/9/2012	1:18:57 AM	SiCl4 pre valve closed
7/9/2012	1:18:57 AM	SiCl4 post valve closed
7/9/2012	1:18:57 AM	Bypass valve closed
7/9/2012	1:18:57 AM	Main Vac valve closed
7/9/2012	1:18:57 AM	Bubbler valve closed
7/9/2012	1:18:57 AM	Helium MFC set to  0.000000
7/9/2012	1:18:57 AM	H2 MFC set to  0.000000
7/9/2012	1:18:57 AM	BCl3 MFC set to  0.000000
7/9/2012	1:18:57 AM	PH3 MFC set to  0.000000
7/9/2012	1:18:57 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:18:58 AM	Tube furnace set to 0
7/9/2012	1:19:16 AM	Recipe started at 1:19 AM
7/9/2012	1:19:16 AM	Helium valve closed
7/9/2012	1:19:16 AM	H2 valve closed
7/9/2012	1:19:16 AM	BCl3 valve closed
7/9/2012	1:19:16 AM	PH3 valve closed
7/9/2012	1:19:16 AM	SiCl4 pre valve closed
7/9/2012	1:19:16 AM	SiCl4 post valve closed
7/9/2012	1:19:16 AM	Main Vac valve closed
7/9/2012	1:19:16 AM	Bypass valve closed
7/9/2012	1:19:16 AM	Bubbler valve closed
7/9/2012	1:19:16 AM	Helium MFC set to  0.000000
7/9/2012	1:19:16 AM	H2 MFC set to  0.000000
7/9/2012	1:19:16 AM	BCl3 MFC set to  0.000000
7/9/2012	1:19:16 AM	PH3 MFC set to  0.000000
7/9/2012	1:19:16 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:19:16 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:19:16 AM	Tube furnace set to 0
7/9/2012	1:19:19 AM	Helium valve closed
7/9/2012	1:19:19 AM	BCl3 valve closed
7/9/2012	1:19:19 AM	PH3 valve closed
7/9/2012	1:19:19 AM	SiCl4 pre valve closed
7/9/2012	1:19:19 AM	SiCl4 post valve closed
7/9/2012	1:19:19 AM	Main Vac valve closed
7/9/2012	1:19:19 AM	Bypass valve closed
7/9/2012	1:19:19 AM	Bubbler valve closed
7/9/2012	1:19:19 AM	H2 valve opened
7/9/2012	1:19:19 AM	Helium MFC set to  0.000000
7/9/2012	1:19:19 AM	H2 MFC set to  500.000000
7/9/2012	1:19:19 AM	BCl3 MFC set to  0.000000
7/9/2012	1:19:19 AM	PH3 MFC set to  0.000000
7/9/2012	1:19:19 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:19:19 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:19:19 AM	Tube furnace set to 0
7/9/2012	1:19:21 AM	Helium valve closed
7/9/2012	1:19:21 AM	BCl3 valve closed
7/9/2012	1:19:21 AM	PH3 valve closed
7/9/2012	1:19:21 AM	SiCl4 pre valve closed
7/9/2012	1:19:21 AM	SiCl4 post valve closed
7/9/2012	1:19:21 AM	Main Vac valve closed
7/9/2012	1:19:21 AM	Bypass valve closed
7/9/2012	1:19:21 AM	H2 valve opened
7/9/2012	1:19:21 AM	Bubbler valve opened
7/9/2012	1:19:21 AM	Helium MFC set to  0.000000
7/9/2012	1:19:21 AM	H2 MFC set to  500.000000
7/9/2012	1:19:21 AM	BCl3 MFC set to  0.000000
7/9/2012	1:19:21 AM	PH3 MFC set to  0.000000
7/9/2012	1:19:21 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:19:21 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:19:21 AM	Tube furnace set to 0
7/9/2012	1:19:22 AM	Helium valve closed
7/9/2012	1:19:22 AM	BCl3 valve closed
7/9/2012	1:19:22 AM	PH3 valve closed
7/9/2012	1:19:22 AM	SiCl4 pre valve closed
7/9/2012	1:19:22 AM	SiCl4 post valve closed
7/9/2012	1:19:22 AM	Main Vac valve closed
7/9/2012	1:19:22 AM	Bypass valve closed
7/9/2012	1:19:22 AM	H2 valve opened
7/9/2012	1:19:22 AM	Bubbler valve opened
7/9/2012	1:19:22 AM	Helium MFC set to  0.000000
7/9/2012	1:19:22 AM	H2 MFC set to  500.000000
7/9/2012	1:19:22 AM	BCl3 MFC set to  0.000000
7/9/2012	1:19:22 AM	PH3 MFC set to  0.000000
7/9/2012	1:19:22 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:19:22 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:19:22 AM	Tube furnace set to 1000
7/9/2012	1:19:41 AM	Run aborted at 1:19 AM
7/9/2012	1:19:41 AM	Helium valve closed
7/9/2012	1:19:41 AM	H2 valve closed
7/9/2012	1:19:41 AM	BCl3 valve closed
7/9/2012	1:19:41 AM	PH3 valve closed
7/9/2012	1:19:41 AM	SiCl4 pre valve closed
7/9/2012	1:19:41 AM	SiCl4 post valve closed
7/9/2012	1:19:41 AM	Bypass valve closed
7/9/2012	1:19:41 AM	Main Vac valve closed
7/9/2012	1:19:41 AM	Bubbler valve closed
7/9/2012	1:19:41 AM	Helium MFC set to  0.000000
7/9/2012	1:19:41 AM	H2 MFC set to  0.000000
7/9/2012	1:19:41 AM	BCl3 MFC set to  0.000000
7/9/2012	1:19:41 AM	PH3 MFC set to  0.000000
7/9/2012	1:19:41 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:19:41 AM	Tube furnace set to 0
7/9/2012	1:20:04 AM	Recipe started at 1:20 AM
7/9/2012	1:20:04 AM	Helium valve closed
7/9/2012	1:20:04 AM	H2 valve closed
7/9/2012	1:20:04 AM	BCl3 valve closed
7/9/2012	1:20:04 AM	PH3 valve closed
7/9/2012	1:20:04 AM	SiCl4 pre valve closed
7/9/2012	1:20:04 AM	SiCl4 post valve closed
7/9/2012	1:20:04 AM	Main Vac valve closed
7/9/2012	1:20:04 AM	Bypass valve closed
7/9/2012	1:20:04 AM	Bubbler valve closed
7/9/2012	1:20:04 AM	Helium MFC set to  0.000000
7/9/2012	1:20:04 AM	H2 MFC set to  0.000000
7/9/2012	1:20:04 AM	BCl3 MFC set to  0.000000
7/9/2012	1:20:04 AM	PH3 MFC set to  0.000000
7/9/2012	1:20:04 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:20:04 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:20:04 AM	Tube furnace set to 0
7/9/2012	1:20:07 AM	Helium valve closed
7/9/2012	1:20:07 AM	BCl3 valve closed
7/9/2012	1:20:07 AM	PH3 valve closed
7/9/2012	1:20:07 AM	SiCl4 pre valve closed
7/9/2012	1:20:07 AM	SiCl4 post valve closed
7/9/2012	1:20:07 AM	Main Vac valve closed
7/9/2012	1:20:07 AM	Bypass valve closed
7/9/2012	1:20:07 AM	Bubbler valve closed
7/9/2012	1:20:07 AM	H2 valve opened
7/9/2012	1:20:07 AM	Helium MFC set to  0.000000
7/9/2012	1:20:07 AM	H2 MFC set to  500.000000
7/9/2012	1:20:07 AM	BCl3 MFC set to  0.000000
7/9/2012	1:20:07 AM	PH3 MFC set to  0.000000
7/9/2012	1:20:07 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:20:07 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:20:07 AM	Tube furnace set to 0
7/9/2012	1:20:09 AM	Helium valve closed
7/9/2012	1:20:09 AM	BCl3 valve closed
7/9/2012	1:20:09 AM	PH3 valve closed
7/9/2012	1:20:09 AM	SiCl4 pre valve closed
7/9/2012	1:20:09 AM	SiCl4 post valve closed
7/9/2012	1:20:09 AM	Main Vac valve closed
7/9/2012	1:20:09 AM	Bypass valve closed
7/9/2012	1:20:09 AM	H2 valve opened
7/9/2012	1:20:09 AM	Bubbler valve opened
7/9/2012	1:20:09 AM	Helium MFC set to  0.000000
7/9/2012	1:20:09 AM	H2 MFC set to  500.000000
7/9/2012	1:20:09 AM	BCl3 MFC set to  0.000000
7/9/2012	1:20:09 AM	PH3 MFC set to  0.000000
7/9/2012	1:20:09 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:20:09 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:20:09 AM	Tube furnace set to 0
7/9/2012	1:20:10 AM	Helium valve closed
7/9/2012	1:20:10 AM	BCl3 valve closed
7/9/2012	1:20:10 AM	PH3 valve closed
7/9/2012	1:20:10 AM	SiCl4 pre valve closed
7/9/2012	1:20:10 AM	SiCl4 post valve closed
7/9/2012	1:20:10 AM	Main Vac valve closed
7/9/2012	1:20:10 AM	Bypass valve closed
7/9/2012	1:20:10 AM	H2 valve opened
7/9/2012	1:20:10 AM	Bubbler valve opened
7/9/2012	1:20:10 AM	Helium MFC set to  0.000000
7/9/2012	1:20:10 AM	H2 MFC set to  500.000000
7/9/2012	1:20:10 AM	BCl3 MFC set to  0.000000
7/9/2012	1:20:10 AM	PH3 MFC set to  0.000000
7/9/2012	1:20:10 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:20:10 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:20:10 AM	Tube furnace set to 1000
7/9/2012	1:31:50 AM	Helium valve closed
7/9/2012	1:31:50 AM	PH3 valve closed
7/9/2012	1:31:50 AM	Main Vac valve closed
7/9/2012	1:31:50 AM	Bypass valve closed
7/9/2012	1:31:50 AM	H2 valve opened
7/9/2012	1:31:50 AM	BCl3 valve opened
7/9/2012	1:31:50 AM	SiCl4 pre valve opened
7/9/2012	1:31:50 AM	SiCl4 post valve opened
7/9/2012	1:31:50 AM	Bubbler valve opened
7/9/2012	1:31:50 AM	Helium MFC set to  0.000000
7/9/2012	1:31:50 AM	H2 MFC set to  450.000000
7/9/2012	1:31:50 AM	BCl3 MFC set to  1.500000
7/9/2012	1:31:50 AM	PH3 MFC set to  0.000000
7/9/2012	1:31:50 AM	SiCl4 MFC set to  50.000000
7/9/2012	1:31:50 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:31:50 AM	Tube furnace set to 1000
7/9/2012	1:42:50 AM	Helium valve closed
7/9/2012	1:42:50 AM	BCl3 valve closed
7/9/2012	1:42:50 AM	PH3 valve closed
7/9/2012	1:42:50 AM	SiCl4 pre valve closed
7/9/2012	1:42:50 AM	SiCl4 post valve closed
7/9/2012	1:42:50 AM	Main Vac valve closed
7/9/2012	1:42:50 AM	Bypass valve closed
7/9/2012	1:42:50 AM	H2 valve opened
7/9/2012	1:42:50 AM	Bubbler valve opened
7/9/2012	1:42:50 AM	Helium MFC set to  0.000000
7/9/2012	1:42:50 AM	H2 MFC set to  500.000000
7/9/2012	1:42:50 AM	BCl3 MFC set to  0.000000
7/9/2012	1:42:50 AM	PH3 MFC set to  0.000000
7/9/2012	1:42:50 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:42:50 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:42:51 AM	Tube furnace set to 950
7/9/2012	1:44:51 AM	Helium valve closed
7/9/2012	1:44:51 AM	BCl3 valve closed
7/9/2012	1:44:51 AM	PH3 valve closed
7/9/2012	1:44:51 AM	SiCl4 pre valve closed
7/9/2012	1:44:51 AM	SiCl4 post valve closed
7/9/2012	1:44:51 AM	Main Vac valve closed
7/9/2012	1:44:51 AM	Bypass valve closed
7/9/2012	1:44:51 AM	H2 valve opened
7/9/2012	1:44:51 AM	Bubbler valve opened
7/9/2012	1:44:51 AM	Helium MFC set to  0.000000
7/9/2012	1:44:51 AM	H2 MFC set to  500.000000
7/9/2012	1:44:51 AM	BCl3 MFC set to  0.000000
7/9/2012	1:44:51 AM	PH3 MFC set to  0.000000
7/9/2012	1:44:51 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:44:51 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:44:51 AM	Tube furnace set to 900
7/9/2012	1:46:51 AM	Helium valve closed
7/9/2012	1:46:51 AM	BCl3 valve closed
7/9/2012	1:46:51 AM	PH3 valve closed
7/9/2012	1:46:51 AM	SiCl4 pre valve closed
7/9/2012	1:46:51 AM	SiCl4 post valve closed
7/9/2012	1:46:51 AM	Main Vac valve closed
7/9/2012	1:46:51 AM	Bypass valve closed
7/9/2012	1:46:51 AM	H2 valve opened
7/9/2012	1:46:51 AM	Bubbler valve opened
7/9/2012	1:46:51 AM	Helium MFC set to  0.000000
7/9/2012	1:46:51 AM	H2 MFC set to  500.000000
7/9/2012	1:46:51 AM	BCl3 MFC set to  0.000000
7/9/2012	1:46:51 AM	PH3 MFC set to  0.000000
7/9/2012	1:46:51 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:46:51 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:46:51 AM	Tube furnace set to 850
7/9/2012	1:48:51 AM	H2 valve closed
7/9/2012	1:48:51 AM	BCl3 valve closed
7/9/2012	1:48:51 AM	PH3 valve closed
7/9/2012	1:48:51 AM	SiCl4 pre valve closed
7/9/2012	1:48:51 AM	SiCl4 post valve closed
7/9/2012	1:48:51 AM	Main Vac valve closed
7/9/2012	1:48:51 AM	Bypass valve closed
7/9/2012	1:48:51 AM	Helium valve opened
7/9/2012	1:48:51 AM	Bubbler valve opened
7/9/2012	1:48:51 AM	Helium MFC set to  500.000000
7/9/2012	1:48:51 AM	H2 MFC set to  0.000000
7/9/2012	1:48:51 AM	BCl3 MFC set to  0.000000
7/9/2012	1:48:51 AM	PH3 MFC set to  0.000000
7/9/2012	1:48:51 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:48:51 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:48:51 AM	Tube furnace set to 800
7/9/2012	1:50:51 AM	H2 valve closed
7/9/2012	1:50:51 AM	BCl3 valve closed
7/9/2012	1:50:51 AM	PH3 valve closed
7/9/2012	1:50:51 AM	SiCl4 pre valve closed
7/9/2012	1:50:51 AM	SiCl4 post valve closed
7/9/2012	1:50:51 AM	Main Vac valve closed
7/9/2012	1:50:51 AM	Bypass valve closed
7/9/2012	1:50:51 AM	Helium valve opened
7/9/2012	1:50:51 AM	Bubbler valve opened
7/9/2012	1:50:51 AM	Helium MFC set to  500.000000
7/9/2012	1:50:51 AM	H2 MFC set to  0.000000
7/9/2012	1:50:51 AM	BCl3 MFC set to  0.000000
7/9/2012	1:50:51 AM	PH3 MFC set to  0.000000
7/9/2012	1:50:51 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:50:51 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:50:51 AM	Tube furnace set to 750
7/9/2012	1:52:51 AM	H2 valve closed
7/9/2012	1:52:51 AM	BCl3 valve closed
7/9/2012	1:52:51 AM	PH3 valve closed
7/9/2012	1:52:51 AM	SiCl4 pre valve closed
7/9/2012	1:52:51 AM	SiCl4 post valve closed
7/9/2012	1:52:52 AM	Main Vac valve closed
7/9/2012	1:52:52 AM	Bypass valve closed
7/9/2012	1:52:52 AM	Helium valve opened
7/9/2012	1:52:52 AM	Bubbler valve opened
7/9/2012	1:52:52 AM	Helium MFC set to  500.000000
7/9/2012	1:52:52 AM	H2 MFC set to  0.000000
7/9/2012	1:52:52 AM	BCl3 MFC set to  0.000000
7/9/2012	1:52:52 AM	PH3 MFC set to  0.000000
7/9/2012	1:52:52 AM	SiCl4 MFC set to  0.000000
7/9/2012	1:52:52 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	1:52:52 AM	Tube furnace set to 0
7/9/2012	2:12:25 AM	Helium valve closed
7/9/2012	2:12:25 AM	H2 valve closed
7/9/2012	2:12:25 AM	BCl3 valve closed
7/9/2012	2:12:25 AM	PH3 valve closed
7/9/2012	2:12:25 AM	SiCl4 pre valve closed
7/9/2012	2:12:25 AM	SiCl4 post valve closed
7/9/2012	2:12:25 AM	Main Vac valve closed
7/9/2012	2:12:25 AM	Bypass valve closed
7/9/2012	2:12:25 AM	Bubbler valve closed
7/9/2012	2:12:25 AM	Helium MFC set to  0.000000
7/9/2012	2:12:25 AM	H2 MFC set to  0.000000
7/9/2012	2:12:25 AM	BCl3 MFC set to  0.000000
7/9/2012	2:12:25 AM	PH3 MFC set to  0.000000
7/9/2012	2:12:25 AM	SiCl4 MFC set to  0.000000
7/9/2012	2:12:25 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	2:12:25 AM	Tube furnace set to 0
7/9/2012	2:12:26 AM	Run finished at 2:12 AM
7/9/2012	2:18:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	2:18:32 AM	Recipe started at 2:18 AM
7/9/2012	2:18:32 AM	Helium valve closed
7/9/2012	2:18:32 AM	H2 valve closed
7/9/2012	2:18:32 AM	BCl3 valve closed
7/9/2012	2:18:32 AM	PH3 valve closed
7/9/2012	2:18:32 AM	SiCl4 pre valve closed
7/9/2012	2:18:32 AM	SiCl4 post valve closed
7/9/2012	2:18:32 AM	Main Vac valve closed
7/9/2012	2:18:32 AM	Bypass valve closed
7/9/2012	2:18:32 AM	Bubbler valve closed
7/9/2012	2:18:32 AM	Helium MFC set to  0.000000
7/9/2012	2:18:32 AM	H2 MFC set to  0.000000
7/9/2012	2:18:32 AM	BCl3 MFC set to  0.000000
7/9/2012	2:18:32 AM	PH3 MFC set to  0.000000
7/9/2012	2:18:32 AM	SiCl4 MFC set to  0.000000
7/9/2012	2:18:32 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	2:18:32 AM	Tube furnace set to 0
7/9/2012	2:18:35 AM	H2 valve closed
7/9/2012	2:18:35 AM	BCl3 valve closed
7/9/2012	2:18:35 AM	PH3 valve closed
7/9/2012	2:18:35 AM	SiCl4 pre valve closed
7/9/2012	2:18:35 AM	SiCl4 post valve closed
7/9/2012	2:18:35 AM	Main Vac valve closed
7/9/2012	2:18:35 AM	Bypass valve closed
7/9/2012	2:18:35 AM	Bubbler valve closed
7/9/2012	2:18:35 AM	Helium valve opened
7/9/2012	2:18:35 AM	Helium MFC set to  500.000000
7/9/2012	2:18:35 AM	H2 MFC set to  0.000000
7/9/2012	2:18:35 AM	BCl3 MFC set to  0.000000
7/9/2012	2:18:35 AM	PH3 MFC set to  0.000000
7/9/2012	2:18:35 AM	SiCl4 MFC set to  0.000000
7/9/2012	2:18:35 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	2:18:36 AM	Tube furnace set to 0
7/9/2012	2:18:39 AM	Helium valve closed
7/9/2012	2:18:39 AM	H2 valve closed
7/9/2012	2:18:39 AM	BCl3 valve closed
7/9/2012	2:18:39 AM	PH3 valve closed
7/9/2012	2:18:39 AM	SiCl4 pre valve closed
7/9/2012	2:18:39 AM	SiCl4 post valve closed
7/9/2012	2:18:39 AM	Main Vac valve closed
7/9/2012	2:18:39 AM	Bypass valve closed
7/9/2012	2:18:39 AM	Bubbler valve closed
7/9/2012	2:18:39 AM	Helium MFC set to  0.000000
7/9/2012	2:18:39 AM	H2 MFC set to  0.000000
7/9/2012	2:18:39 AM	BCl3 MFC set to  0.000000
7/9/2012	2:18:39 AM	PH3 MFC set to  0.000000
7/9/2012	2:18:39 AM	SiCl4 MFC set to  0.000000
7/9/2012	2:18:39 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	2:18:39 AM	Tube furnace set to 0
7/9/2012	2:18:40 AM	Run finished at 2:18 AM
7/9/2012	2:18:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	2:19:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	2:19:52 AM	Recipe started at 2:19 AM
7/9/2012	2:19:52 AM	Helium valve closed
7/9/2012	2:19:52 AM	H2 valve closed
7/9/2012	2:19:52 AM	BCl3 valve closed
7/9/2012	2:19:52 AM	PH3 valve closed
7/9/2012	2:19:52 AM	SiCl4 pre valve closed
7/9/2012	2:19:52 AM	SiCl4 post valve closed
7/9/2012	2:19:52 AM	Main Vac valve closed
7/9/2012	2:19:52 AM	Bubbler valve closed
7/9/2012	2:19:52 AM	Bypass valve opened
7/9/2012	2:19:52 AM	Helium MFC set to  0.000000
7/9/2012	2:19:52 AM	H2 MFC set to  0.000000
7/9/2012	2:19:52 AM	BCl3 MFC set to  0.000000
7/9/2012	2:19:52 AM	PH3 MFC set to  0.000000
7/9/2012	2:19:52 AM	SiCl4 MFC set to  0.000000
7/9/2012	2:19:52 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	2:19:52 AM	Tube furnace set to 0
7/9/2012	2:20:54 AM	Helium valve closed
7/9/2012	2:20:54 AM	H2 valve closed
7/9/2012	2:20:54 AM	BCl3 valve closed
7/9/2012	2:20:54 AM	PH3 valve closed
7/9/2012	2:20:54 AM	SiCl4 pre valve closed
7/9/2012	2:20:54 AM	SiCl4 post valve closed
7/9/2012	2:20:54 AM	Main Vac valve closed
7/9/2012	2:20:54 AM	Bubbler valve closed
7/9/2012	2:20:54 AM	Bypass valve opened
7/9/2012	2:20:54 AM	Helium MFC set to  0.000000
7/9/2012	2:20:54 AM	H2 MFC set to  0.000000
7/9/2012	2:20:54 AM	BCl3 MFC set to  0.000000
7/9/2012	2:20:54 AM	PH3 MFC set to  0.000000
7/9/2012	2:20:54 AM	SiCl4 MFC set to  0.000000
7/9/2012	2:20:54 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	2:20:54 AM	Tube furnace set to 0
7/9/2012	2:21:54 AM	Helium valve closed
7/9/2012	2:21:54 AM	H2 valve closed
7/9/2012	2:21:54 AM	BCl3 valve closed
7/9/2012	2:21:54 AM	PH3 valve closed
7/9/2012	2:21:54 AM	SiCl4 pre valve closed
7/9/2012	2:21:54 AM	SiCl4 post valve closed
7/9/2012	2:21:54 AM	Bypass valve closed
7/9/2012	2:21:54 AM	Bubbler valve closed
7/9/2012	2:21:54 AM	Main Vac valve opened
7/9/2012	2:21:54 AM	Helium MFC set to  0.000000
7/9/2012	2:21:54 AM	H2 MFC set to  0.000000
7/9/2012	2:21:54 AM	BCl3 MFC set to  0.000000
7/9/2012	2:21:54 AM	PH3 MFC set to  0.000000
7/9/2012	2:21:54 AM	SiCl4 MFC set to  0.000000
7/9/2012	2:21:54 AM	Bypass solenoid MFC set to  0.000000
7/9/2012	2:21:55 AM	Tube furnace set to 0
7/9/2012	2:21:56 AM	Run finished at 2:21 AM
7/9/2012	2:21:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	4:33:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	4:33:09 PM	Recipe started at 4:33 PM
7/9/2012	4:33:09 PM	Helium valve closed
7/9/2012	4:33:09 PM	H2 valve closed
7/9/2012	4:33:09 PM	BCl3 valve closed
7/9/2012	4:33:09 PM	PH3 valve closed
7/9/2012	4:33:09 PM	SiCl4 pre valve closed
7/9/2012	4:33:09 PM	SiCl4 post valve closed
7/9/2012	4:33:09 PM	Main Vac valve closed
7/9/2012	4:33:09 PM	Bypass valve closed
7/9/2012	4:33:09 PM	Bubbler valve closed
7/9/2012	4:33:09 PM	Helium MFC set to  0.000000
7/9/2012	4:33:09 PM	H2 MFC set to  0.000000
7/9/2012	4:33:09 PM	BCl3 MFC set to  0.000000
7/9/2012	4:33:09 PM	PH3 MFC set to  0.000000
7/9/2012	4:33:09 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:33:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:33:09 PM	Tube furnace set to 0
7/9/2012	4:33:12 PM	H2 valve closed
7/9/2012	4:33:12 PM	BCl3 valve closed
7/9/2012	4:33:12 PM	PH3 valve closed
7/9/2012	4:33:12 PM	SiCl4 pre valve closed
7/9/2012	4:33:12 PM	SiCl4 post valve closed
7/9/2012	4:33:12 PM	Main Vac valve closed
7/9/2012	4:33:12 PM	Bypass valve closed
7/9/2012	4:33:12 PM	Bubbler valve closed
7/9/2012	4:33:12 PM	Helium valve opened
7/9/2012	4:33:12 PM	Helium MFC set to  500.000000
7/9/2012	4:33:12 PM	H2 MFC set to  0.000000
7/9/2012	4:33:12 PM	BCl3 MFC set to  0.000000
7/9/2012	4:33:12 PM	PH3 MFC set to  0.000000
7/9/2012	4:33:12 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:33:12 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:33:13 PM	Tube furnace set to 0
7/9/2012	4:34:26 PM	Helium valve closed
7/9/2012	4:34:26 PM	H2 valve closed
7/9/2012	4:34:26 PM	BCl3 valve closed
7/9/2012	4:34:26 PM	PH3 valve closed
7/9/2012	4:34:26 PM	SiCl4 pre valve closed
7/9/2012	4:34:26 PM	SiCl4 post valve closed
7/9/2012	4:34:26 PM	Main Vac valve closed
7/9/2012	4:34:26 PM	Bypass valve closed
7/9/2012	4:34:26 PM	Bubbler valve closed
7/9/2012	4:34:26 PM	Helium MFC set to  0.000000
7/9/2012	4:34:26 PM	H2 MFC set to  0.000000
7/9/2012	4:34:26 PM	BCl3 MFC set to  0.000000
7/9/2012	4:34:26 PM	PH3 MFC set to  0.000000
7/9/2012	4:34:26 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:34:26 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:34:27 PM	Tube furnace set to 0
7/9/2012	4:34:28 PM	Run finished at 4:34 PM
7/9/2012	4:34:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	4:49:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	4:49:32 PM	Recipe started at 4:49 PM
7/9/2012	4:49:32 PM	Helium valve closed
7/9/2012	4:49:32 PM	H2 valve closed
7/9/2012	4:49:32 PM	BCl3 valve closed
7/9/2012	4:49:32 PM	PH3 valve closed
7/9/2012	4:49:32 PM	SiCl4 pre valve closed
7/9/2012	4:49:32 PM	SiCl4 post valve closed
7/9/2012	4:49:32 PM	Main Vac valve closed
7/9/2012	4:49:32 PM	Bubbler valve closed
7/9/2012	4:49:32 PM	Bypass valve opened
7/9/2012	4:49:32 PM	Helium MFC set to  0.000000
7/9/2012	4:49:32 PM	H2 MFC set to  0.000000
7/9/2012	4:49:32 PM	BCl3 MFC set to  0.000000
7/9/2012	4:49:32 PM	PH3 MFC set to  0.000000
7/9/2012	4:49:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:49:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:49:32 PM	Tube furnace set to 0
7/9/2012	4:50:42 PM	Helium valve closed
7/9/2012	4:50:42 PM	H2 valve closed
7/9/2012	4:50:42 PM	BCl3 valve closed
7/9/2012	4:50:42 PM	PH3 valve closed
7/9/2012	4:50:42 PM	SiCl4 pre valve closed
7/9/2012	4:50:42 PM	SiCl4 post valve closed
7/9/2012	4:50:42 PM	Main Vac valve closed
7/9/2012	4:50:42 PM	Bubbler valve closed
7/9/2012	4:50:42 PM	Bypass valve opened
7/9/2012	4:50:42 PM	Helium MFC set to  0.000000
7/9/2012	4:50:42 PM	H2 MFC set to  0.000000
7/9/2012	4:50:42 PM	BCl3 MFC set to  0.000000
7/9/2012	4:50:42 PM	PH3 MFC set to  0.000000
7/9/2012	4:50:42 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:50:42 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:50:42 PM	Tube furnace set to 0
7/9/2012	4:51:43 PM	Helium valve closed
7/9/2012	4:51:43 PM	H2 valve closed
7/9/2012	4:51:43 PM	BCl3 valve closed
7/9/2012	4:51:43 PM	PH3 valve closed
7/9/2012	4:51:43 PM	SiCl4 pre valve closed
7/9/2012	4:51:43 PM	SiCl4 post valve closed
7/9/2012	4:51:43 PM	Bypass valve closed
7/9/2012	4:51:43 PM	Bubbler valve closed
7/9/2012	4:51:43 PM	Main Vac valve opened
7/9/2012	4:51:43 PM	Helium MFC set to  0.000000
7/9/2012	4:51:43 PM	H2 MFC set to  0.000000
7/9/2012	4:51:43 PM	BCl3 MFC set to  0.000000
7/9/2012	4:51:43 PM	PH3 MFC set to  0.000000
7/9/2012	4:51:43 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:51:43 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:51:43 PM	Tube furnace set to 0
7/9/2012	4:51:44 PM	Run finished at 4:51 PM
7/9/2012	4:51:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	4:52:09 PM	Recipe started at 4:52 PM
7/9/2012	4:52:09 PM	Helium valve closed
7/9/2012	4:52:09 PM	H2 valve closed
7/9/2012	4:52:09 PM	BCl3 valve closed
7/9/2012	4:52:09 PM	PH3 valve closed
7/9/2012	4:52:09 PM	SiCl4 pre valve closed
7/9/2012	4:52:09 PM	SiCl4 post valve closed
7/9/2012	4:52:09 PM	Bypass valve closed
7/9/2012	4:52:09 PM	Bubbler valve closed
7/9/2012	4:52:09 PM	Main Vac valve opened
7/9/2012	4:52:09 PM	Helium MFC set to  0.000000
7/9/2012	4:52:09 PM	H2 MFC set to  0.000000
7/9/2012	4:52:09 PM	BCl3 MFC set to  0.000000
7/9/2012	4:52:09 PM	PH3 MFC set to  0.000000
7/9/2012	4:52:09 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:52:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:52:09 PM	Tube furnace set to 150
7/9/2012	4:52:39 PM	H2 valve closed
7/9/2012	4:52:39 PM	BCl3 valve closed
7/9/2012	4:52:39 PM	PH3 valve closed
7/9/2012	4:52:39 PM	SiCl4 pre valve closed
7/9/2012	4:52:39 PM	SiCl4 post valve closed
7/9/2012	4:52:39 PM	Bypass valve closed
7/9/2012	4:52:39 PM	Bubbler valve closed
7/9/2012	4:52:39 PM	Helium valve opened
7/9/2012	4:52:39 PM	Main Vac valve opened
7/9/2012	4:52:39 PM	Helium MFC set to  20.000000
7/9/2012	4:52:39 PM	H2 MFC set to  0.000000
7/9/2012	4:52:39 PM	BCl3 MFC set to  0.000000
7/9/2012	4:52:39 PM	PH3 MFC set to  0.000000
7/9/2012	4:52:39 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:52:39 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:52:39 PM	Tube furnace set to 150
7/9/2012	4:53:09 PM	Helium valve closed
7/9/2012	4:53:09 PM	H2 valve closed
7/9/2012	4:53:09 PM	BCl3 valve closed
7/9/2012	4:53:09 PM	PH3 valve closed
7/9/2012	4:53:09 PM	SiCl4 pre valve closed
7/9/2012	4:53:09 PM	SiCl4 post valve closed
7/9/2012	4:53:09 PM	Bypass valve closed
7/9/2012	4:53:09 PM	Bubbler valve closed
7/9/2012	4:53:09 PM	Main Vac valve opened
7/9/2012	4:53:09 PM	Helium MFC set to  0.000000
7/9/2012	4:53:09 PM	H2 MFC set to  0.000000
7/9/2012	4:53:09 PM	BCl3 MFC set to  0.000000
7/9/2012	4:53:09 PM	PH3 MFC set to  0.000000
7/9/2012	4:53:09 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:53:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:53:10 PM	Tube furnace set to 150
7/9/2012	4:53:40 PM	H2 valve closed
7/9/2012	4:53:40 PM	BCl3 valve closed
7/9/2012	4:53:40 PM	PH3 valve closed
7/9/2012	4:53:40 PM	SiCl4 pre valve closed
7/9/2012	4:53:40 PM	SiCl4 post valve closed
7/9/2012	4:53:40 PM	Bypass valve closed
7/9/2012	4:53:40 PM	Bubbler valve closed
7/9/2012	4:53:40 PM	Helium valve opened
7/9/2012	4:53:40 PM	Main Vac valve opened
7/9/2012	4:53:40 PM	Helium MFC set to  20.000000
7/9/2012	4:53:40 PM	H2 MFC set to  0.000000
7/9/2012	4:53:40 PM	BCl3 MFC set to  0.000000
7/9/2012	4:53:40 PM	PH3 MFC set to  0.000000
7/9/2012	4:53:40 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:53:40 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:53:40 PM	Tube furnace set to 150
7/9/2012	4:54:10 PM	Helium valve closed
7/9/2012	4:54:10 PM	H2 valve closed
7/9/2012	4:54:10 PM	BCl3 valve closed
7/9/2012	4:54:10 PM	PH3 valve closed
7/9/2012	4:54:10 PM	SiCl4 pre valve closed
7/9/2012	4:54:10 PM	SiCl4 post valve closed
7/9/2012	4:54:10 PM	Bypass valve closed
7/9/2012	4:54:10 PM	Bubbler valve closed
7/9/2012	4:54:10 PM	Main Vac valve opened
7/9/2012	4:54:10 PM	Helium MFC set to  0.000000
7/9/2012	4:54:10 PM	H2 MFC set to  0.000000
7/9/2012	4:54:10 PM	BCl3 MFC set to  0.000000
7/9/2012	4:54:10 PM	PH3 MFC set to  0.000000
7/9/2012	4:54:10 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:54:10 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:54:10 PM	Tube furnace set to 150
7/9/2012	4:54:40 PM	H2 valve closed
7/9/2012	4:54:40 PM	BCl3 valve closed
7/9/2012	4:54:40 PM	PH3 valve closed
7/9/2012	4:54:40 PM	SiCl4 pre valve closed
7/9/2012	4:54:40 PM	SiCl4 post valve closed
7/9/2012	4:54:40 PM	Bypass valve closed
7/9/2012	4:54:40 PM	Bubbler valve closed
7/9/2012	4:54:40 PM	Helium valve opened
7/9/2012	4:54:40 PM	Main Vac valve opened
7/9/2012	4:54:40 PM	Helium MFC set to  20.000000
7/9/2012	4:54:40 PM	H2 MFC set to  0.000000
7/9/2012	4:54:40 PM	BCl3 MFC set to  0.000000
7/9/2012	4:54:40 PM	PH3 MFC set to  0.000000
7/9/2012	4:54:40 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:54:40 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:54:40 PM	Tube furnace set to 150
7/9/2012	4:55:10 PM	Helium valve closed
7/9/2012	4:55:10 PM	H2 valve closed
7/9/2012	4:55:10 PM	BCl3 valve closed
7/9/2012	4:55:10 PM	PH3 valve closed
7/9/2012	4:55:10 PM	SiCl4 pre valve closed
7/9/2012	4:55:10 PM	SiCl4 post valve closed
7/9/2012	4:55:10 PM	Bypass valve closed
7/9/2012	4:55:10 PM	Bubbler valve closed
7/9/2012	4:55:10 PM	Main Vac valve opened
7/9/2012	4:55:10 PM	Helium MFC set to  0.000000
7/9/2012	4:55:10 PM	H2 MFC set to  0.000000
7/9/2012	4:55:10 PM	BCl3 MFC set to  0.000000
7/9/2012	4:55:10 PM	PH3 MFC set to  0.000000
7/9/2012	4:55:10 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:55:10 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:55:11 PM	Tube furnace set to 150
7/9/2012	4:55:41 PM	H2 valve closed
7/9/2012	4:55:41 PM	BCl3 valve closed
7/9/2012	4:55:41 PM	PH3 valve closed
7/9/2012	4:55:41 PM	SiCl4 pre valve closed
7/9/2012	4:55:41 PM	SiCl4 post valve closed
7/9/2012	4:55:41 PM	Bypass valve closed
7/9/2012	4:55:41 PM	Bubbler valve closed
7/9/2012	4:55:41 PM	Helium valve opened
7/9/2012	4:55:41 PM	Main Vac valve opened
7/9/2012	4:55:41 PM	Helium MFC set to  20.000000
7/9/2012	4:55:41 PM	H2 MFC set to  0.000000
7/9/2012	4:55:41 PM	BCl3 MFC set to  0.000000
7/9/2012	4:55:41 PM	PH3 MFC set to  0.000000
7/9/2012	4:55:41 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:55:41 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:55:41 PM	Tube furnace set to 150
7/9/2012	4:56:11 PM	Helium valve closed
7/9/2012	4:56:11 PM	H2 valve closed
7/9/2012	4:56:11 PM	BCl3 valve closed
7/9/2012	4:56:11 PM	PH3 valve closed
7/9/2012	4:56:11 PM	SiCl4 pre valve closed
7/9/2012	4:56:11 PM	SiCl4 post valve closed
7/9/2012	4:56:11 PM	Bypass valve closed
7/9/2012	4:56:11 PM	Bubbler valve closed
7/9/2012	4:56:11 PM	Main Vac valve opened
7/9/2012	4:56:11 PM	Helium MFC set to  0.000000
7/9/2012	4:56:11 PM	H2 MFC set to  0.000000
7/9/2012	4:56:11 PM	BCl3 MFC set to  0.000000
7/9/2012	4:56:11 PM	PH3 MFC set to  0.000000
7/9/2012	4:56:11 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:56:11 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:56:11 PM	Tube furnace set to 150
7/9/2012	4:56:41 PM	H2 valve closed
7/9/2012	4:56:41 PM	BCl3 valve closed
7/9/2012	4:56:41 PM	PH3 valve closed
7/9/2012	4:56:41 PM	SiCl4 pre valve closed
7/9/2012	4:56:41 PM	SiCl4 post valve closed
7/9/2012	4:56:41 PM	Bypass valve closed
7/9/2012	4:56:41 PM	Bubbler valve closed
7/9/2012	4:56:41 PM	Helium valve opened
7/9/2012	4:56:41 PM	Main Vac valve opened
7/9/2012	4:56:41 PM	Helium MFC set to  20.000000
7/9/2012	4:56:41 PM	H2 MFC set to  0.000000
7/9/2012	4:56:41 PM	BCl3 MFC set to  0.000000
7/9/2012	4:56:41 PM	PH3 MFC set to  0.000000
7/9/2012	4:56:41 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:56:41 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:56:41 PM	Tube furnace set to 150
7/9/2012	4:57:11 PM	Helium valve closed
7/9/2012	4:57:11 PM	H2 valve closed
7/9/2012	4:57:11 PM	BCl3 valve closed
7/9/2012	4:57:11 PM	PH3 valve closed
7/9/2012	4:57:11 PM	SiCl4 pre valve closed
7/9/2012	4:57:11 PM	SiCl4 post valve closed
7/9/2012	4:57:11 PM	Bypass valve closed
7/9/2012	4:57:11 PM	Bubbler valve closed
7/9/2012	4:57:11 PM	Main Vac valve opened
7/9/2012	4:57:11 PM	Helium MFC set to  0.000000
7/9/2012	4:57:11 PM	H2 MFC set to  0.000000
7/9/2012	4:57:11 PM	BCl3 MFC set to  0.000000
7/9/2012	4:57:11 PM	PH3 MFC set to  0.000000
7/9/2012	4:57:11 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:57:11 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:57:12 PM	Tube furnace set to 150
7/9/2012	4:57:42 PM	H2 valve closed
7/9/2012	4:57:42 PM	BCl3 valve closed
7/9/2012	4:57:42 PM	PH3 valve closed
7/9/2012	4:57:42 PM	SiCl4 pre valve closed
7/9/2012	4:57:42 PM	SiCl4 post valve closed
7/9/2012	4:57:42 PM	Bypass valve closed
7/9/2012	4:57:42 PM	Bubbler valve closed
7/9/2012	4:57:42 PM	Helium valve opened
7/9/2012	4:57:42 PM	Main Vac valve opened
7/9/2012	4:57:42 PM	Helium MFC set to  20.000000
7/9/2012	4:57:42 PM	H2 MFC set to  0.000000
7/9/2012	4:57:42 PM	BCl3 MFC set to  0.000000
7/9/2012	4:57:42 PM	PH3 MFC set to  0.000000
7/9/2012	4:57:42 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:57:42 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:57:42 PM	Tube furnace set to 150
7/9/2012	4:58:12 PM	Helium valve closed
7/9/2012	4:58:12 PM	H2 valve closed
7/9/2012	4:58:12 PM	BCl3 valve closed
7/9/2012	4:58:12 PM	PH3 valve closed
7/9/2012	4:58:12 PM	SiCl4 pre valve closed
7/9/2012	4:58:12 PM	SiCl4 post valve closed
7/9/2012	4:58:12 PM	Bypass valve closed
7/9/2012	4:58:12 PM	Bubbler valve closed
7/9/2012	4:58:12 PM	Main Vac valve opened
7/9/2012	4:58:12 PM	Helium MFC set to  0.000000
7/9/2012	4:58:12 PM	H2 MFC set to  0.000000
7/9/2012	4:58:12 PM	BCl3 MFC set to  0.000000
7/9/2012	4:58:12 PM	PH3 MFC set to  0.000000
7/9/2012	4:58:12 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:58:12 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:58:12 PM	Tube furnace set to 150
7/9/2012	4:58:42 PM	H2 valve closed
7/9/2012	4:58:42 PM	BCl3 valve closed
7/9/2012	4:58:42 PM	PH3 valve closed
7/9/2012	4:58:42 PM	SiCl4 pre valve closed
7/9/2012	4:58:42 PM	SiCl4 post valve closed
7/9/2012	4:58:42 PM	Bypass valve closed
7/9/2012	4:58:42 PM	Bubbler valve closed
7/9/2012	4:58:42 PM	Helium valve opened
7/9/2012	4:58:42 PM	Main Vac valve opened
7/9/2012	4:58:42 PM	Helium MFC set to  20.000000
7/9/2012	4:58:42 PM	H2 MFC set to  0.000000
7/9/2012	4:58:42 PM	BCl3 MFC set to  0.000000
7/9/2012	4:58:42 PM	PH3 MFC set to  0.000000
7/9/2012	4:58:42 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:58:42 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:58:42 PM	Tube furnace set to 150
7/9/2012	4:59:12 PM	Helium valve closed
7/9/2012	4:59:12 PM	H2 valve closed
7/9/2012	4:59:12 PM	BCl3 valve closed
7/9/2012	4:59:12 PM	PH3 valve closed
7/9/2012	4:59:12 PM	SiCl4 pre valve closed
7/9/2012	4:59:12 PM	SiCl4 post valve closed
7/9/2012	4:59:12 PM	Bypass valve closed
7/9/2012	4:59:12 PM	Bubbler valve closed
7/9/2012	4:59:12 PM	Main Vac valve opened
7/9/2012	4:59:12 PM	Helium MFC set to  0.000000
7/9/2012	4:59:12 PM	H2 MFC set to  0.000000
7/9/2012	4:59:12 PM	BCl3 MFC set to  0.000000
7/9/2012	4:59:12 PM	PH3 MFC set to  0.000000
7/9/2012	4:59:12 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:59:12 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:59:12 PM	Tube furnace set to 150
7/9/2012	4:59:43 PM	H2 valve closed
7/9/2012	4:59:43 PM	BCl3 valve closed
7/9/2012	4:59:43 PM	PH3 valve closed
7/9/2012	4:59:43 PM	SiCl4 pre valve closed
7/9/2012	4:59:43 PM	SiCl4 post valve closed
7/9/2012	4:59:43 PM	Bypass valve closed
7/9/2012	4:59:43 PM	Bubbler valve closed
7/9/2012	4:59:43 PM	Helium valve opened
7/9/2012	4:59:43 PM	Main Vac valve opened
7/9/2012	4:59:43 PM	Helium MFC set to  20.000000
7/9/2012	4:59:43 PM	H2 MFC set to  0.000000
7/9/2012	4:59:43 PM	BCl3 MFC set to  0.000000
7/9/2012	4:59:43 PM	PH3 MFC set to  0.000000
7/9/2012	4:59:43 PM	SiCl4 MFC set to  0.000000
7/9/2012	4:59:43 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	4:59:43 PM	Tube furnace set to 150
7/9/2012	5:00:13 PM	Helium valve closed
7/9/2012	5:00:13 PM	H2 valve closed
7/9/2012	5:00:13 PM	BCl3 valve closed
7/9/2012	5:00:13 PM	PH3 valve closed
7/9/2012	5:00:13 PM	SiCl4 pre valve closed
7/9/2012	5:00:13 PM	SiCl4 post valve closed
7/9/2012	5:00:13 PM	Bypass valve closed
7/9/2012	5:00:13 PM	Bubbler valve closed
7/9/2012	5:00:13 PM	Main Vac valve opened
7/9/2012	5:00:13 PM	Helium MFC set to  0.000000
7/9/2012	5:00:13 PM	H2 MFC set to  0.000000
7/9/2012	5:00:13 PM	BCl3 MFC set to  0.000000
7/9/2012	5:00:13 PM	PH3 MFC set to  0.000000
7/9/2012	5:00:13 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:00:13 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:00:13 PM	Tube furnace set to 150
7/9/2012	5:00:43 PM	H2 valve closed
7/9/2012	5:00:43 PM	BCl3 valve closed
7/9/2012	5:00:43 PM	PH3 valve closed
7/9/2012	5:00:43 PM	SiCl4 pre valve closed
7/9/2012	5:00:43 PM	SiCl4 post valve closed
7/9/2012	5:00:43 PM	Bypass valve closed
7/9/2012	5:00:43 PM	Bubbler valve closed
7/9/2012	5:00:43 PM	Helium valve opened
7/9/2012	5:00:43 PM	Main Vac valve opened
7/9/2012	5:00:43 PM	Helium MFC set to  20.000000
7/9/2012	5:00:43 PM	H2 MFC set to  0.000000
7/9/2012	5:00:43 PM	BCl3 MFC set to  0.000000
7/9/2012	5:00:43 PM	PH3 MFC set to  0.000000
7/9/2012	5:00:43 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:00:43 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:00:43 PM	Tube furnace set to 150
7/9/2012	5:01:13 PM	Helium valve closed
7/9/2012	5:01:13 PM	H2 valve closed
7/9/2012	5:01:13 PM	BCl3 valve closed
7/9/2012	5:01:13 PM	PH3 valve closed
7/9/2012	5:01:13 PM	SiCl4 pre valve closed
7/9/2012	5:01:13 PM	SiCl4 post valve closed
7/9/2012	5:01:13 PM	Bypass valve closed
7/9/2012	5:01:13 PM	Bubbler valve closed
7/9/2012	5:01:13 PM	Main Vac valve opened
7/9/2012	5:01:13 PM	Helium MFC set to  0.000000
7/9/2012	5:01:13 PM	H2 MFC set to  0.000000
7/9/2012	5:01:13 PM	BCl3 MFC set to  0.000000
7/9/2012	5:01:13 PM	PH3 MFC set to  0.000000
7/9/2012	5:01:13 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:01:13 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:01:13 PM	Tube furnace set to 150
7/9/2012	5:01:43 PM	H2 valve closed
7/9/2012	5:01:43 PM	BCl3 valve closed
7/9/2012	5:01:43 PM	PH3 valve closed
7/9/2012	5:01:43 PM	SiCl4 pre valve closed
7/9/2012	5:01:43 PM	SiCl4 post valve closed
7/9/2012	5:01:43 PM	Bypass valve closed
7/9/2012	5:01:43 PM	Bubbler valve closed
7/9/2012	5:01:43 PM	Helium valve opened
7/9/2012	5:01:43 PM	Main Vac valve opened
7/9/2012	5:01:43 PM	Helium MFC set to  20.000000
7/9/2012	5:01:44 PM	H2 MFC set to  0.000000
7/9/2012	5:01:44 PM	BCl3 MFC set to  0.000000
7/9/2012	5:01:44 PM	PH3 MFC set to  0.000000
7/9/2012	5:01:44 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:01:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:01:44 PM	Tube furnace set to 150
7/9/2012	5:02:14 PM	Helium valve closed
7/9/2012	5:02:14 PM	H2 valve closed
7/9/2012	5:02:14 PM	BCl3 valve closed
7/9/2012	5:02:14 PM	PH3 valve closed
7/9/2012	5:02:14 PM	SiCl4 pre valve closed
7/9/2012	5:02:14 PM	SiCl4 post valve closed
7/9/2012	5:02:14 PM	Bypass valve closed
7/9/2012	5:02:14 PM	Bubbler valve closed
7/9/2012	5:02:14 PM	Main Vac valve opened
7/9/2012	5:02:14 PM	Helium MFC set to  0.000000
7/9/2012	5:02:14 PM	H2 MFC set to  0.000000
7/9/2012	5:02:14 PM	BCl3 MFC set to  0.000000
7/9/2012	5:02:14 PM	PH3 MFC set to  0.000000
7/9/2012	5:02:14 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:02:14 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:02:14 PM	Tube furnace set to 150
7/9/2012	5:02:15 PM	Run finished at 5:02 PM
7/9/2012	5:06:52 PM	Recipe started at 5:06 PM
7/9/2012	5:06:52 PM	Helium valve closed
7/9/2012	5:06:52 PM	H2 valve closed
7/9/2012	5:06:52 PM	BCl3 valve closed
7/9/2012	5:06:52 PM	PH3 valve closed
7/9/2012	5:06:52 PM	SiCl4 pre valve closed
7/9/2012	5:06:52 PM	SiCl4 post valve closed
7/9/2012	5:06:52 PM	Bypass valve closed
7/9/2012	5:06:52 PM	Bubbler valve closed
7/9/2012	5:06:52 PM	Main Vac valve opened
7/9/2012	5:06:52 PM	Helium MFC set to  0.000000
7/9/2012	5:06:52 PM	H2 MFC set to  0.000000
7/9/2012	5:06:52 PM	BCl3 MFC set to  0.000000
7/9/2012	5:06:52 PM	PH3 MFC set to  0.000000
7/9/2012	5:06:52 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:06:52 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:06:52 PM	Tube furnace set to 150
7/9/2012	5:07:22 PM	H2 valve closed
7/9/2012	5:07:22 PM	BCl3 valve closed
7/9/2012	5:07:22 PM	PH3 valve closed
7/9/2012	5:07:22 PM	SiCl4 pre valve closed
7/9/2012	5:07:22 PM	SiCl4 post valve closed
7/9/2012	5:07:22 PM	Bypass valve closed
7/9/2012	5:07:22 PM	Bubbler valve closed
7/9/2012	5:07:22 PM	Helium valve opened
7/9/2012	5:07:22 PM	Main Vac valve opened
7/9/2012	5:07:22 PM	Helium MFC set to  20.000000
7/9/2012	5:07:22 PM	H2 MFC set to  0.000000
7/9/2012	5:07:22 PM	BCl3 MFC set to  0.000000
7/9/2012	5:07:22 PM	PH3 MFC set to  0.000000
7/9/2012	5:07:22 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:07:22 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:07:22 PM	Tube furnace set to 150
7/9/2012	5:07:52 PM	Helium valve closed
7/9/2012	5:07:52 PM	H2 valve closed
7/9/2012	5:07:52 PM	BCl3 valve closed
7/9/2012	5:07:52 PM	PH3 valve closed
7/9/2012	5:07:52 PM	SiCl4 pre valve closed
7/9/2012	5:07:52 PM	SiCl4 post valve closed
7/9/2012	5:07:52 PM	Bypass valve closed
7/9/2012	5:07:52 PM	Bubbler valve closed
7/9/2012	5:07:52 PM	Main Vac valve opened
7/9/2012	5:07:52 PM	Helium MFC set to  0.000000
7/9/2012	5:07:52 PM	H2 MFC set to  0.000000
7/9/2012	5:07:52 PM	BCl3 MFC set to  0.000000
7/9/2012	5:07:52 PM	PH3 MFC set to  0.000000
7/9/2012	5:07:52 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:07:52 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:07:52 PM	Tube furnace set to 150
7/9/2012	5:08:22 PM	H2 valve closed
7/9/2012	5:08:22 PM	BCl3 valve closed
7/9/2012	5:08:22 PM	PH3 valve closed
7/9/2012	5:08:22 PM	SiCl4 pre valve closed
7/9/2012	5:08:22 PM	SiCl4 post valve closed
7/9/2012	5:08:23 PM	Bypass valve closed
7/9/2012	5:08:23 PM	Bubbler valve closed
7/9/2012	5:08:23 PM	Helium valve opened
7/9/2012	5:08:23 PM	Main Vac valve opened
7/9/2012	5:08:23 PM	Helium MFC set to  20.000000
7/9/2012	5:08:23 PM	H2 MFC set to  0.000000
7/9/2012	5:08:23 PM	BCl3 MFC set to  0.000000
7/9/2012	5:08:23 PM	PH3 MFC set to  0.000000
7/9/2012	5:08:23 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:08:23 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:08:23 PM	Tube furnace set to 150
7/9/2012	5:08:53 PM	Helium valve closed
7/9/2012	5:08:53 PM	H2 valve closed
7/9/2012	5:08:53 PM	BCl3 valve closed
7/9/2012	5:08:53 PM	PH3 valve closed
7/9/2012	5:08:53 PM	SiCl4 pre valve closed
7/9/2012	5:08:53 PM	SiCl4 post valve closed
7/9/2012	5:08:53 PM	Bypass valve closed
7/9/2012	5:08:53 PM	Bubbler valve closed
7/9/2012	5:08:53 PM	Main Vac valve opened
7/9/2012	5:08:53 PM	Helium MFC set to  0.000000
7/9/2012	5:08:53 PM	H2 MFC set to  0.000000
7/9/2012	5:08:53 PM	BCl3 MFC set to  0.000000
7/9/2012	5:08:53 PM	PH3 MFC set to  0.000000
7/9/2012	5:08:53 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:08:53 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:08:53 PM	Tube furnace set to 150
7/9/2012	5:09:23 PM	H2 valve closed
7/9/2012	5:09:23 PM	BCl3 valve closed
7/9/2012	5:09:23 PM	PH3 valve closed
7/9/2012	5:09:23 PM	SiCl4 pre valve closed
7/9/2012	5:09:23 PM	SiCl4 post valve closed
7/9/2012	5:09:23 PM	Bypass valve closed
7/9/2012	5:09:23 PM	Bubbler valve closed
7/9/2012	5:09:23 PM	Helium valve opened
7/9/2012	5:09:23 PM	Main Vac valve opened
7/9/2012	5:09:23 PM	Helium MFC set to  20.000000
7/9/2012	5:09:23 PM	H2 MFC set to  0.000000
7/9/2012	5:09:23 PM	BCl3 MFC set to  0.000000
7/9/2012	5:09:23 PM	PH3 MFC set to  0.000000
7/9/2012	5:09:23 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:09:23 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:09:23 PM	Tube furnace set to 150
7/9/2012	5:09:53 PM	Helium valve closed
7/9/2012	5:09:53 PM	H2 valve closed
7/9/2012	5:09:53 PM	BCl3 valve closed
7/9/2012	5:09:53 PM	PH3 valve closed
7/9/2012	5:09:53 PM	SiCl4 pre valve closed
7/9/2012	5:09:53 PM	SiCl4 post valve closed
7/9/2012	5:09:53 PM	Bypass valve closed
7/9/2012	5:09:53 PM	Bubbler valve closed
7/9/2012	5:09:53 PM	Main Vac valve opened
7/9/2012	5:09:53 PM	Helium MFC set to  0.000000
7/9/2012	5:09:53 PM	H2 MFC set to  0.000000
7/9/2012	5:09:53 PM	BCl3 MFC set to  0.000000
7/9/2012	5:09:53 PM	PH3 MFC set to  0.000000
7/9/2012	5:09:53 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:09:53 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:09:53 PM	Tube furnace set to 150
7/9/2012	5:10:23 PM	H2 valve closed
7/9/2012	5:10:23 PM	BCl3 valve closed
7/9/2012	5:10:23 PM	PH3 valve closed
7/9/2012	5:10:23 PM	SiCl4 pre valve closed
7/9/2012	5:10:23 PM	SiCl4 post valve closed
7/9/2012	5:10:23 PM	Bypass valve closed
7/9/2012	5:10:23 PM	Bubbler valve closed
7/9/2012	5:10:23 PM	Helium valve opened
7/9/2012	5:10:23 PM	Main Vac valve opened
7/9/2012	5:10:23 PM	Helium MFC set to  20.000000
7/9/2012	5:10:23 PM	H2 MFC set to  0.000000
7/9/2012	5:10:23 PM	BCl3 MFC set to  0.000000
7/9/2012	5:10:23 PM	PH3 MFC set to  0.000000
7/9/2012	5:10:23 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:10:23 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:10:24 PM	Tube furnace set to 150
7/9/2012	5:10:54 PM	Helium valve closed
7/9/2012	5:10:54 PM	H2 valve closed
7/9/2012	5:10:54 PM	BCl3 valve closed
7/9/2012	5:10:54 PM	PH3 valve closed
7/9/2012	5:10:54 PM	SiCl4 pre valve closed
7/9/2012	5:10:54 PM	SiCl4 post valve closed
7/9/2012	5:10:54 PM	Bypass valve closed
7/9/2012	5:10:54 PM	Bubbler valve closed
7/9/2012	5:10:54 PM	Main Vac valve opened
7/9/2012	5:10:54 PM	Helium MFC set to  0.000000
7/9/2012	5:10:54 PM	H2 MFC set to  0.000000
7/9/2012	5:10:54 PM	BCl3 MFC set to  0.000000
7/9/2012	5:10:54 PM	PH3 MFC set to  0.000000
7/9/2012	5:10:54 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:10:54 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:10:54 PM	Tube furnace set to 150
7/9/2012	5:11:24 PM	H2 valve closed
7/9/2012	5:11:24 PM	BCl3 valve closed
7/9/2012	5:11:24 PM	PH3 valve closed
7/9/2012	5:11:24 PM	SiCl4 pre valve closed
7/9/2012	5:11:24 PM	SiCl4 post valve closed
7/9/2012	5:11:24 PM	Bypass valve closed
7/9/2012	5:11:24 PM	Bubbler valve closed
7/9/2012	5:11:24 PM	Helium valve opened
7/9/2012	5:11:24 PM	Main Vac valve opened
7/9/2012	5:11:24 PM	Helium MFC set to  20.000000
7/9/2012	5:11:24 PM	H2 MFC set to  0.000000
7/9/2012	5:11:24 PM	BCl3 MFC set to  0.000000
7/9/2012	5:11:24 PM	PH3 MFC set to  0.000000
7/9/2012	5:11:24 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:11:24 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:11:24 PM	Tube furnace set to 150
7/9/2012	5:11:54 PM	Helium valve closed
7/9/2012	5:11:54 PM	H2 valve closed
7/9/2012	5:11:54 PM	BCl3 valve closed
7/9/2012	5:11:54 PM	PH3 valve closed
7/9/2012	5:11:54 PM	SiCl4 pre valve closed
7/9/2012	5:11:54 PM	SiCl4 post valve closed
7/9/2012	5:11:54 PM	Bypass valve closed
7/9/2012	5:11:54 PM	Bubbler valve closed
7/9/2012	5:11:54 PM	Main Vac valve opened
7/9/2012	5:11:54 PM	Helium MFC set to  0.000000
7/9/2012	5:11:54 PM	H2 MFC set to  0.000000
7/9/2012	5:11:54 PM	BCl3 MFC set to  0.000000
7/9/2012	5:11:54 PM	PH3 MFC set to  0.000000
7/9/2012	5:11:54 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:11:54 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:11:54 PM	Tube furnace set to 150
7/9/2012	5:12:24 PM	H2 valve closed
7/9/2012	5:12:24 PM	BCl3 valve closed
7/9/2012	5:12:25 PM	PH3 valve closed
7/9/2012	5:12:25 PM	SiCl4 pre valve closed
7/9/2012	5:12:25 PM	SiCl4 post valve closed
7/9/2012	5:12:25 PM	Bypass valve closed
7/9/2012	5:12:25 PM	Bubbler valve closed
7/9/2012	5:12:25 PM	Helium valve opened
7/9/2012	5:12:25 PM	Main Vac valve opened
7/9/2012	5:12:25 PM	Helium MFC set to  20.000000
7/9/2012	5:12:25 PM	H2 MFC set to  0.000000
7/9/2012	5:12:25 PM	BCl3 MFC set to  0.000000
7/9/2012	5:12:25 PM	PH3 MFC set to  0.000000
7/9/2012	5:12:25 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:12:25 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:12:25 PM	Tube furnace set to 150
7/9/2012	5:12:55 PM	Helium valve closed
7/9/2012	5:12:55 PM	H2 valve closed
7/9/2012	5:12:55 PM	BCl3 valve closed
7/9/2012	5:12:55 PM	PH3 valve closed
7/9/2012	5:12:55 PM	SiCl4 pre valve closed
7/9/2012	5:12:55 PM	SiCl4 post valve closed
7/9/2012	5:12:55 PM	Bypass valve closed
7/9/2012	5:12:55 PM	Bubbler valve closed
7/9/2012	5:12:55 PM	Main Vac valve opened
7/9/2012	5:12:55 PM	Helium MFC set to  0.000000
7/9/2012	5:12:55 PM	H2 MFC set to  0.000000
7/9/2012	5:12:55 PM	BCl3 MFC set to  0.000000
7/9/2012	5:12:55 PM	PH3 MFC set to  0.000000
7/9/2012	5:12:55 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:12:55 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:12:55 PM	Tube furnace set to 150
7/9/2012	5:13:25 PM	H2 valve closed
7/9/2012	5:13:25 PM	BCl3 valve closed
7/9/2012	5:13:25 PM	PH3 valve closed
7/9/2012	5:13:25 PM	SiCl4 pre valve closed
7/9/2012	5:13:25 PM	SiCl4 post valve closed
7/9/2012	5:13:25 PM	Bypass valve closed
7/9/2012	5:13:25 PM	Bubbler valve closed
7/9/2012	5:13:25 PM	Helium valve opened
7/9/2012	5:13:25 PM	Main Vac valve opened
7/9/2012	5:13:25 PM	Helium MFC set to  20.000000
7/9/2012	5:13:25 PM	H2 MFC set to  0.000000
7/9/2012	5:13:25 PM	BCl3 MFC set to  0.000000
7/9/2012	5:13:25 PM	PH3 MFC set to  0.000000
7/9/2012	5:13:25 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:13:25 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:13:25 PM	Tube furnace set to 150
7/9/2012	5:13:55 PM	Helium valve closed
7/9/2012	5:13:55 PM	H2 valve closed
7/9/2012	5:13:55 PM	BCl3 valve closed
7/9/2012	5:13:55 PM	PH3 valve closed
7/9/2012	5:13:55 PM	SiCl4 pre valve closed
7/9/2012	5:13:55 PM	SiCl4 post valve closed
7/9/2012	5:13:55 PM	Bypass valve closed
7/9/2012	5:13:55 PM	Bubbler valve closed
7/9/2012	5:13:55 PM	Main Vac valve opened
7/9/2012	5:13:55 PM	Helium MFC set to  0.000000
7/9/2012	5:13:55 PM	H2 MFC set to  0.000000
7/9/2012	5:13:55 PM	BCl3 MFC set to  0.000000
7/9/2012	5:13:55 PM	PH3 MFC set to  0.000000
7/9/2012	5:13:55 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:13:55 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:13:55 PM	Tube furnace set to 150
7/9/2012	5:14:25 PM	H2 valve closed
7/9/2012	5:14:25 PM	BCl3 valve closed
7/9/2012	5:14:25 PM	PH3 valve closed
7/9/2012	5:14:25 PM	SiCl4 pre valve closed
7/9/2012	5:14:25 PM	SiCl4 post valve closed
7/9/2012	5:14:26 PM	Bypass valve closed
7/9/2012	5:14:26 PM	Bubbler valve closed
7/9/2012	5:14:26 PM	Helium valve opened
7/9/2012	5:14:26 PM	Main Vac valve opened
7/9/2012	5:14:26 PM	Helium MFC set to  20.000000
7/9/2012	5:14:26 PM	H2 MFC set to  0.000000
7/9/2012	5:14:26 PM	BCl3 MFC set to  0.000000
7/9/2012	5:14:26 PM	PH3 MFC set to  0.000000
7/9/2012	5:14:26 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:14:26 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:14:26 PM	Tube furnace set to 150
7/9/2012	5:14:56 PM	Helium valve closed
7/9/2012	5:14:56 PM	H2 valve closed
7/9/2012	5:14:56 PM	BCl3 valve closed
7/9/2012	5:14:56 PM	PH3 valve closed
7/9/2012	5:14:56 PM	SiCl4 pre valve closed
7/9/2012	5:14:56 PM	SiCl4 post valve closed
7/9/2012	5:14:56 PM	Bypass valve closed
7/9/2012	5:14:56 PM	Bubbler valve closed
7/9/2012	5:14:56 PM	Main Vac valve opened
7/9/2012	5:14:56 PM	Helium MFC set to  0.000000
7/9/2012	5:14:56 PM	H2 MFC set to  0.000000
7/9/2012	5:14:56 PM	BCl3 MFC set to  0.000000
7/9/2012	5:14:56 PM	PH3 MFC set to  0.000000
7/9/2012	5:14:56 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:14:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:14:56 PM	Tube furnace set to 150
7/9/2012	5:15:26 PM	H2 valve closed
7/9/2012	5:15:26 PM	BCl3 valve closed
7/9/2012	5:15:26 PM	PH3 valve closed
7/9/2012	5:15:26 PM	SiCl4 pre valve closed
7/9/2012	5:15:26 PM	SiCl4 post valve closed
7/9/2012	5:15:26 PM	Bypass valve closed
7/9/2012	5:15:26 PM	Bubbler valve closed
7/9/2012	5:15:26 PM	Helium valve opened
7/9/2012	5:15:26 PM	Main Vac valve opened
7/9/2012	5:15:26 PM	Helium MFC set to  20.000000
7/9/2012	5:15:26 PM	H2 MFC set to  0.000000
7/9/2012	5:15:26 PM	BCl3 MFC set to  0.000000
7/9/2012	5:15:26 PM	PH3 MFC set to  0.000000
7/9/2012	5:15:26 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:15:26 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:15:26 PM	Tube furnace set to 150
7/9/2012	5:15:56 PM	Helium valve closed
7/9/2012	5:15:56 PM	H2 valve closed
7/9/2012	5:15:56 PM	BCl3 valve closed
7/9/2012	5:15:56 PM	PH3 valve closed
7/9/2012	5:15:56 PM	SiCl4 pre valve closed
7/9/2012	5:15:56 PM	SiCl4 post valve closed
7/9/2012	5:15:56 PM	Bypass valve closed
7/9/2012	5:15:56 PM	Bubbler valve closed
7/9/2012	5:15:56 PM	Main Vac valve opened
7/9/2012	5:15:56 PM	Helium MFC set to  0.000000
7/9/2012	5:15:56 PM	H2 MFC set to  0.000000
7/9/2012	5:15:56 PM	BCl3 MFC set to  0.000000
7/9/2012	5:15:56 PM	PH3 MFC set to  0.000000
7/9/2012	5:15:56 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:15:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:15:56 PM	Tube furnace set to 150
7/9/2012	5:16:26 PM	H2 valve closed
7/9/2012	5:16:26 PM	BCl3 valve closed
7/9/2012	5:16:26 PM	PH3 valve closed
7/9/2012	5:16:26 PM	SiCl4 pre valve closed
7/9/2012	5:16:26 PM	SiCl4 post valve closed
7/9/2012	5:16:26 PM	Bypass valve closed
7/9/2012	5:16:26 PM	Bubbler valve closed
7/9/2012	5:16:26 PM	Helium valve opened
7/9/2012	5:16:26 PM	Main Vac valve opened
7/9/2012	5:16:26 PM	Helium MFC set to  20.000000
7/9/2012	5:16:26 PM	H2 MFC set to  0.000000
7/9/2012	5:16:26 PM	BCl3 MFC set to  0.000000
7/9/2012	5:16:26 PM	PH3 MFC set to  0.000000
7/9/2012	5:16:26 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:16:26 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:16:27 PM	Tube furnace set to 150
7/9/2012	5:16:30 PM	Run aborted at 5:16 PM
7/9/2012	5:16:30 PM	Helium valve closed
7/9/2012	5:16:30 PM	H2 valve closed
7/9/2012	5:16:30 PM	BCl3 valve closed
7/9/2012	5:16:30 PM	PH3 valve closed
7/9/2012	5:16:30 PM	SiCl4 pre valve closed
7/9/2012	5:16:30 PM	SiCl4 post valve closed
7/9/2012	5:16:30 PM	Bypass valve closed
7/9/2012	5:16:30 PM	Main Vac valve closed
7/9/2012	5:16:30 PM	Bubbler valve closed
7/9/2012	5:16:30 PM	Helium MFC set to  0.000000
7/9/2012	5:16:30 PM	H2 MFC set to  0.000000
7/9/2012	5:16:30 PM	BCl3 MFC set to  0.000000
7/9/2012	5:16:30 PM	PH3 MFC set to  0.000000
7/9/2012	5:16:30 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:16:30 PM	Tube furnace set to 0
7/9/2012	5:16:37 PM	Main Vac valve opened
7/9/2012	5:16:59 PM	Main Vac valve closed
7/9/2012	5:17:08 PM	Main Vac valve opened
7/9/2012	5:20:35 PM	Recipe started at 5:20 PM
7/9/2012	5:20:35 PM	Helium valve closed
7/9/2012	5:20:35 PM	H2 valve closed
7/9/2012	5:20:35 PM	BCl3 valve closed
7/9/2012	5:20:35 PM	PH3 valve closed
7/9/2012	5:20:35 PM	SiCl4 pre valve closed
7/9/2012	5:20:35 PM	SiCl4 post valve closed
7/9/2012	5:20:35 PM	Main Vac valve closed
7/9/2012	5:20:35 PM	Bypass valve closed
7/9/2012	5:20:35 PM	Bubbler valve closed
7/9/2012	5:20:35 PM	Helium MFC set to  0.000000
7/9/2012	5:20:35 PM	H2 MFC set to  0.000000
7/9/2012	5:20:35 PM	BCl3 MFC set to  0.000000
7/9/2012	5:20:35 PM	PH3 MFC set to  0.000000
7/9/2012	5:20:35 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:20:35 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:20:36 PM	Tube furnace set to 0
7/9/2012	5:20:39 PM	Helium valve closed
7/9/2012	5:20:39 PM	BCl3 valve closed
7/9/2012	5:20:39 PM	PH3 valve closed
7/9/2012	5:20:39 PM	SiCl4 pre valve closed
7/9/2012	5:20:39 PM	SiCl4 post valve closed
7/9/2012	5:20:39 PM	Main Vac valve closed
7/9/2012	5:20:39 PM	Bypass valve closed
7/9/2012	5:20:39 PM	Bubbler valve closed
7/9/2012	5:20:39 PM	H2 valve opened
7/9/2012	5:20:39 PM	Helium MFC set to  0.000000
7/9/2012	5:20:39 PM	H2 MFC set to  500.000000
7/9/2012	5:20:39 PM	BCl3 MFC set to  0.000000
7/9/2012	5:20:39 PM	PH3 MFC set to  0.000000
7/9/2012	5:20:39 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:20:39 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:20:39 PM	Tube furnace set to 0
7/9/2012	5:21:51 PM	Helium valve closed
7/9/2012	5:21:51 PM	BCl3 valve closed
7/9/2012	5:21:51 PM	PH3 valve closed
7/9/2012	5:21:51 PM	SiCl4 pre valve closed
7/9/2012	5:21:51 PM	SiCl4 post valve closed
7/9/2012	5:21:51 PM	Main Vac valve closed
7/9/2012	5:21:51 PM	Bypass valve closed
7/9/2012	5:21:51 PM	H2 valve opened
7/9/2012	5:21:51 PM	Bubbler valve opened
7/9/2012	5:21:51 PM	Helium MFC set to  0.000000
7/9/2012	5:21:51 PM	H2 MFC set to  500.000000
7/9/2012	5:21:51 PM	BCl3 MFC set to  0.000000
7/9/2012	5:21:51 PM	PH3 MFC set to  0.000000
7/9/2012	5:21:51 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:21:51 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:21:51 PM	Tube furnace set to 0
7/9/2012	5:21:52 PM	Helium valve closed
7/9/2012	5:21:52 PM	BCl3 valve closed
7/9/2012	5:21:52 PM	PH3 valve closed
7/9/2012	5:21:52 PM	SiCl4 pre valve closed
7/9/2012	5:21:52 PM	SiCl4 post valve closed
7/9/2012	5:21:52 PM	Main Vac valve closed
7/9/2012	5:21:52 PM	Bypass valve closed
7/9/2012	5:21:52 PM	H2 valve opened
7/9/2012	5:21:52 PM	Bubbler valve opened
7/9/2012	5:21:52 PM	Helium MFC set to  0.000000
7/9/2012	5:21:52 PM	H2 MFC set to  500.000000
7/9/2012	5:21:52 PM	BCl3 MFC set to  0.000000
7/9/2012	5:21:52 PM	PH3 MFC set to  0.000000
7/9/2012	5:21:52 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:21:52 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:21:52 PM	Tube furnace set to 1000
7/9/2012	5:41:52 PM	Helium valve closed
7/9/2012	5:41:52 PM	PH3 valve closed
7/9/2012	5:41:52 PM	Main Vac valve closed
7/9/2012	5:41:52 PM	Bypass valve closed
7/9/2012	5:41:52 PM	H2 valve opened
7/9/2012	5:41:52 PM	BCl3 valve opened
7/9/2012	5:41:52 PM	SiCl4 pre valve opened
7/9/2012	5:41:52 PM	SiCl4 post valve opened
7/9/2012	5:41:52 PM	Bubbler valve opened
7/9/2012	5:41:52 PM	Helium MFC set to  0.000000
7/9/2012	5:41:52 PM	H2 MFC set to  500.000000
7/9/2012	5:41:52 PM	BCl3 MFC set to  1.000000
7/9/2012	5:41:52 PM	PH3 MFC set to  0.000000
7/9/2012	5:41:52 PM	SiCl4 MFC set to  50.000000
7/9/2012	5:41:52 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:41:53 PM	Tube furnace set to 1000
7/9/2012	5:56:53 PM	Helium valve closed
7/9/2012	5:56:53 PM	BCl3 valve closed
7/9/2012	5:56:53 PM	PH3 valve closed
7/9/2012	5:56:53 PM	SiCl4 pre valve closed
7/9/2012	5:56:53 PM	SiCl4 post valve closed
7/9/2012	5:56:53 PM	Main Vac valve closed
7/9/2012	5:56:53 PM	Bypass valve closed
7/9/2012	5:56:53 PM	H2 valve opened
7/9/2012	5:56:53 PM	Bubbler valve opened
7/9/2012	5:56:53 PM	Helium MFC set to  0.000000
7/9/2012	5:56:53 PM	H2 MFC set to  500.000000
7/9/2012	5:56:53 PM	BCl3 MFC set to  0.000000
7/9/2012	5:56:53 PM	PH3 MFC set to  0.000000
7/9/2012	5:56:53 PM	SiCl4 MFC set to  0.000000
7/9/2012	5:56:53 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	5:56:53 PM	Tube furnace set to 750
7/9/2012	6:01:53 PM	H2 valve closed
7/9/2012	6:01:53 PM	BCl3 valve closed
7/9/2012	6:01:53 PM	PH3 valve closed
7/9/2012	6:01:53 PM	SiCl4 pre valve closed
7/9/2012	6:01:53 PM	SiCl4 post valve closed
7/9/2012	6:01:53 PM	Main Vac valve closed
7/9/2012	6:01:53 PM	Bypass valve closed
7/9/2012	6:01:53 PM	Helium valve opened
7/9/2012	6:01:53 PM	Bubbler valve opened
7/9/2012	6:01:53 PM	Helium MFC set to  500.000000
7/9/2012	6:01:53 PM	H2 MFC set to  0.000000
7/9/2012	6:01:53 PM	BCl3 MFC set to  0.000000
7/9/2012	6:01:53 PM	PH3 MFC set to  0.000000
7/9/2012	6:01:53 PM	SiCl4 MFC set to  0.000000
7/9/2012	6:01:53 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	6:01:53 PM	Tube furnace set to 0
7/9/2012	6:21:53 PM	Helium valve closed
7/9/2012	6:21:53 PM	H2 valve closed
7/9/2012	6:21:53 PM	BCl3 valve closed
7/9/2012	6:21:53 PM	PH3 valve closed
7/9/2012	6:21:53 PM	SiCl4 pre valve closed
7/9/2012	6:21:53 PM	SiCl4 post valve closed
7/9/2012	6:21:53 PM	Main Vac valve closed
7/9/2012	6:21:53 PM	Bypass valve closed
7/9/2012	6:21:53 PM	Bubbler valve closed
7/9/2012	6:21:53 PM	Helium MFC set to  0.000000
7/9/2012	6:21:53 PM	H2 MFC set to  0.000000
7/9/2012	6:21:53 PM	BCl3 MFC set to  0.000000
7/9/2012	6:21:53 PM	PH3 MFC set to  0.000000
7/9/2012	6:21:53 PM	SiCl4 MFC set to  0.000000
7/9/2012	6:21:53 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	6:21:53 PM	Tube furnace set to 0
7/9/2012	6:21:54 PM	Run finished at 6:21 PM
7/9/2012	7:27:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	7:27:02 PM	Recipe started at 7:27 PM
7/9/2012	7:27:02 PM	Helium valve closed
7/9/2012	7:27:02 PM	H2 valve closed
7/9/2012	7:27:02 PM	BCl3 valve closed
7/9/2012	7:27:02 PM	PH3 valve closed
7/9/2012	7:27:02 PM	SiCl4 pre valve closed
7/9/2012	7:27:02 PM	SiCl4 post valve closed
7/9/2012	7:27:02 PM	Main Vac valve closed
7/9/2012	7:27:02 PM	Bypass valve closed
7/9/2012	7:27:02 PM	Bubbler valve closed
7/9/2012	7:27:02 PM	Helium MFC set to  0.000000
7/9/2012	7:27:02 PM	H2 MFC set to  0.000000
7/9/2012	7:27:02 PM	BCl3 MFC set to  0.000000
7/9/2012	7:27:02 PM	PH3 MFC set to  0.000000
7/9/2012	7:27:02 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:27:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:27:02 PM	Tube furnace set to 0
7/9/2012	7:27:05 PM	H2 valve closed
7/9/2012	7:27:05 PM	BCl3 valve closed
7/9/2012	7:27:05 PM	PH3 valve closed
7/9/2012	7:27:05 PM	SiCl4 pre valve closed
7/9/2012	7:27:05 PM	SiCl4 post valve closed
7/9/2012	7:27:05 PM	Main Vac valve closed
7/9/2012	7:27:05 PM	Bypass valve closed
7/9/2012	7:27:05 PM	Bubbler valve closed
7/9/2012	7:27:05 PM	Helium valve opened
7/9/2012	7:27:05 PM	Helium MFC set to  500.000000
7/9/2012	7:27:05 PM	H2 MFC set to  0.000000
7/9/2012	7:27:05 PM	BCl3 MFC set to  0.000000
7/9/2012	7:27:05 PM	PH3 MFC set to  0.000000
7/9/2012	7:27:05 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:27:05 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:27:05 PM	Tube furnace set to 0
7/9/2012	7:27:08 PM	Helium valve closed
7/9/2012	7:27:08 PM	H2 valve closed
7/9/2012	7:27:08 PM	BCl3 valve closed
7/9/2012	7:27:08 PM	PH3 valve closed
7/9/2012	7:27:08 PM	SiCl4 pre valve closed
7/9/2012	7:27:08 PM	SiCl4 post valve closed
7/9/2012	7:27:08 PM	Main Vac valve closed
7/9/2012	7:27:08 PM	Bypass valve closed
7/9/2012	7:27:08 PM	Bubbler valve closed
7/9/2012	7:27:08 PM	Helium MFC set to  0.000000
7/9/2012	7:27:08 PM	H2 MFC set to  0.000000
7/9/2012	7:27:08 PM	BCl3 MFC set to  0.000000
7/9/2012	7:27:08 PM	PH3 MFC set to  0.000000
7/9/2012	7:27:08 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:27:08 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:27:08 PM	Tube furnace set to 0
7/9/2012	7:27:09 PM	Run finished at 7:27 PM
7/9/2012	7:27:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	7:33:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	7:33:20 PM	Recipe started at 7:33 PM
7/9/2012	7:33:20 PM	Helium valve closed
7/9/2012	7:33:20 PM	H2 valve closed
7/9/2012	7:33:20 PM	BCl3 valve closed
7/9/2012	7:33:20 PM	PH3 valve closed
7/9/2012	7:33:20 PM	SiCl4 pre valve closed
7/9/2012	7:33:20 PM	SiCl4 post valve closed
7/9/2012	7:33:20 PM	Main Vac valve closed
7/9/2012	7:33:20 PM	Bubbler valve closed
7/9/2012	7:33:20 PM	Bypass valve opened
7/9/2012	7:33:20 PM	Helium MFC set to  0.000000
7/9/2012	7:33:20 PM	H2 MFC set to  0.000000
7/9/2012	7:33:20 PM	BCl3 MFC set to  0.000000
7/9/2012	7:33:20 PM	PH3 MFC set to  0.000000
7/9/2012	7:33:20 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:33:20 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:33:20 PM	Tube furnace set to 0
7/9/2012	7:34:32 PM	Helium valve closed
7/9/2012	7:34:32 PM	H2 valve closed
7/9/2012	7:34:32 PM	BCl3 valve closed
7/9/2012	7:34:32 PM	PH3 valve closed
7/9/2012	7:34:32 PM	SiCl4 pre valve closed
7/9/2012	7:34:32 PM	SiCl4 post valve closed
7/9/2012	7:34:32 PM	Main Vac valve closed
7/9/2012	7:34:32 PM	Bubbler valve closed
7/9/2012	7:34:32 PM	Bypass valve opened
7/9/2012	7:34:32 PM	Helium MFC set to  0.000000
7/9/2012	7:34:32 PM	H2 MFC set to  0.000000
7/9/2012	7:34:32 PM	BCl3 MFC set to  0.000000
7/9/2012	7:34:32 PM	PH3 MFC set to  0.000000
7/9/2012	7:34:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:34:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:34:32 PM	Tube furnace set to 0
7/9/2012	7:35:32 PM	Helium valve closed
7/9/2012	7:35:32 PM	H2 valve closed
7/9/2012	7:35:32 PM	BCl3 valve closed
7/9/2012	7:35:32 PM	PH3 valve closed
7/9/2012	7:35:32 PM	SiCl4 pre valve closed
7/9/2012	7:35:32 PM	SiCl4 post valve closed
7/9/2012	7:35:32 PM	Bypass valve closed
7/9/2012	7:35:32 PM	Bubbler valve closed
7/9/2012	7:35:32 PM	Main Vac valve opened
7/9/2012	7:35:32 PM	Helium MFC set to  0.000000
7/9/2012	7:35:32 PM	H2 MFC set to  0.000000
7/9/2012	7:35:32 PM	BCl3 MFC set to  0.000000
7/9/2012	7:35:32 PM	PH3 MFC set to  0.000000
7/9/2012	7:35:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:35:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:35:32 PM	Tube furnace set to 0
7/9/2012	7:35:33 PM	Run finished at 7:35 PM
7/9/2012	7:35:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	7:36:00 PM	Recipe started at 7:35 PM
7/9/2012	7:36:00 PM	Helium valve closed
7/9/2012	7:36:00 PM	H2 valve closed
7/9/2012	7:36:00 PM	BCl3 valve closed
7/9/2012	7:36:00 PM	PH3 valve closed
7/9/2012	7:36:00 PM	SiCl4 pre valve closed
7/9/2012	7:36:00 PM	SiCl4 post valve closed
7/9/2012	7:36:00 PM	Bypass valve closed
7/9/2012	7:36:00 PM	Bubbler valve closed
7/9/2012	7:36:00 PM	Main Vac valve opened
7/9/2012	7:36:00 PM	Helium MFC set to  0.000000
7/9/2012	7:36:01 PM	H2 MFC set to  0.000000
7/9/2012	7:36:01 PM	BCl3 MFC set to  0.000000
7/9/2012	7:36:01 PM	PH3 MFC set to  0.000000
7/9/2012	7:36:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:36:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:36:01 PM	Tube furnace set to 150
7/9/2012	7:36:31 PM	H2 valve closed
7/9/2012	7:36:31 PM	BCl3 valve closed
7/9/2012	7:36:31 PM	PH3 valve closed
7/9/2012	7:36:31 PM	SiCl4 pre valve closed
7/9/2012	7:36:31 PM	SiCl4 post valve closed
7/9/2012	7:36:31 PM	Bypass valve closed
7/9/2012	7:36:31 PM	Bubbler valve closed
7/9/2012	7:36:31 PM	Helium valve opened
7/9/2012	7:36:31 PM	Main Vac valve opened
7/9/2012	7:36:31 PM	Helium MFC set to  20.000000
7/9/2012	7:36:31 PM	H2 MFC set to  0.000000
7/9/2012	7:36:31 PM	BCl3 MFC set to  0.000000
7/9/2012	7:36:31 PM	PH3 MFC set to  0.000000
7/9/2012	7:36:31 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:36:31 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:36:31 PM	Tube furnace set to 150
7/9/2012	7:37:01 PM	Helium valve closed
7/9/2012	7:37:01 PM	H2 valve closed
7/9/2012	7:37:01 PM	BCl3 valve closed
7/9/2012	7:37:01 PM	PH3 valve closed
7/9/2012	7:37:01 PM	SiCl4 pre valve closed
7/9/2012	7:37:01 PM	SiCl4 post valve closed
7/9/2012	7:37:01 PM	Bypass valve closed
7/9/2012	7:37:01 PM	Bubbler valve closed
7/9/2012	7:37:01 PM	Main Vac valve opened
7/9/2012	7:37:01 PM	Helium MFC set to  0.000000
7/9/2012	7:37:01 PM	H2 MFC set to  0.000000
7/9/2012	7:37:01 PM	BCl3 MFC set to  0.000000
7/9/2012	7:37:01 PM	PH3 MFC set to  0.000000
7/9/2012	7:37:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:37:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:37:01 PM	Tube furnace set to 150
7/9/2012	7:37:31 PM	H2 valve closed
7/9/2012	7:37:31 PM	BCl3 valve closed
7/9/2012	7:37:31 PM	PH3 valve closed
7/9/2012	7:37:31 PM	SiCl4 pre valve closed
7/9/2012	7:37:31 PM	SiCl4 post valve closed
7/9/2012	7:37:31 PM	Bypass valve closed
7/9/2012	7:37:31 PM	Bubbler valve closed
7/9/2012	7:37:31 PM	Helium valve opened
7/9/2012	7:37:31 PM	Main Vac valve opened
7/9/2012	7:37:31 PM	Helium MFC set to  20.000000
7/9/2012	7:37:31 PM	H2 MFC set to  0.000000
7/9/2012	7:37:31 PM	BCl3 MFC set to  0.000000
7/9/2012	7:37:31 PM	PH3 MFC set to  0.000000
7/9/2012	7:37:31 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:37:31 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:37:31 PM	Tube furnace set to 150
7/9/2012	7:38:01 PM	Helium valve closed
7/9/2012	7:38:01 PM	H2 valve closed
7/9/2012	7:38:01 PM	BCl3 valve closed
7/9/2012	7:38:01 PM	PH3 valve closed
7/9/2012	7:38:01 PM	SiCl4 pre valve closed
7/9/2012	7:38:01 PM	SiCl4 post valve closed
7/9/2012	7:38:01 PM	Bypass valve closed
7/9/2012	7:38:01 PM	Bubbler valve closed
7/9/2012	7:38:01 PM	Main Vac valve opened
7/9/2012	7:38:01 PM	Helium MFC set to  0.000000
7/9/2012	7:38:01 PM	H2 MFC set to  0.000000
7/9/2012	7:38:01 PM	BCl3 MFC set to  0.000000
7/9/2012	7:38:01 PM	PH3 MFC set to  0.000000
7/9/2012	7:38:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:38:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:38:02 PM	Tube furnace set to 150
7/9/2012	7:38:32 PM	H2 valve closed
7/9/2012	7:38:32 PM	BCl3 valve closed
7/9/2012	7:38:32 PM	PH3 valve closed
7/9/2012	7:38:32 PM	SiCl4 pre valve closed
7/9/2012	7:38:32 PM	SiCl4 post valve closed
7/9/2012	7:38:32 PM	Bypass valve closed
7/9/2012	7:38:32 PM	Bubbler valve closed
7/9/2012	7:38:32 PM	Helium valve opened
7/9/2012	7:38:32 PM	Main Vac valve opened
7/9/2012	7:38:32 PM	Helium MFC set to  20.000000
7/9/2012	7:38:32 PM	H2 MFC set to  0.000000
7/9/2012	7:38:32 PM	BCl3 MFC set to  0.000000
7/9/2012	7:38:32 PM	PH3 MFC set to  0.000000
7/9/2012	7:38:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:38:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:38:32 PM	Tube furnace set to 150
7/9/2012	7:39:02 PM	Helium valve closed
7/9/2012	7:39:02 PM	H2 valve closed
7/9/2012	7:39:02 PM	BCl3 valve closed
7/9/2012	7:39:02 PM	PH3 valve closed
7/9/2012	7:39:02 PM	SiCl4 pre valve closed
7/9/2012	7:39:02 PM	SiCl4 post valve closed
7/9/2012	7:39:02 PM	Bypass valve closed
7/9/2012	7:39:02 PM	Bubbler valve closed
7/9/2012	7:39:02 PM	Main Vac valve opened
7/9/2012	7:39:02 PM	Helium MFC set to  0.000000
7/9/2012	7:39:02 PM	H2 MFC set to  0.000000
7/9/2012	7:39:02 PM	BCl3 MFC set to  0.000000
7/9/2012	7:39:02 PM	PH3 MFC set to  0.000000
7/9/2012	7:39:02 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:39:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:39:02 PM	Tube furnace set to 150
7/9/2012	7:39:32 PM	H2 valve closed
7/9/2012	7:39:32 PM	BCl3 valve closed
7/9/2012	7:39:32 PM	PH3 valve closed
7/9/2012	7:39:32 PM	SiCl4 pre valve closed
7/9/2012	7:39:32 PM	SiCl4 post valve closed
7/9/2012	7:39:32 PM	Bypass valve closed
7/9/2012	7:39:32 PM	Bubbler valve closed
7/9/2012	7:39:32 PM	Helium valve opened
7/9/2012	7:39:32 PM	Main Vac valve opened
7/9/2012	7:39:32 PM	Helium MFC set to  20.000000
7/9/2012	7:39:32 PM	H2 MFC set to  0.000000
7/9/2012	7:39:32 PM	BCl3 MFC set to  0.000000
7/9/2012	7:39:32 PM	PH3 MFC set to  0.000000
7/9/2012	7:39:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:39:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:39:32 PM	Tube furnace set to 150
7/9/2012	7:40:02 PM	Helium valve closed
7/9/2012	7:40:02 PM	H2 valve closed
7/9/2012	7:40:02 PM	BCl3 valve closed
7/9/2012	7:40:02 PM	PH3 valve closed
7/9/2012	7:40:02 PM	SiCl4 pre valve closed
7/9/2012	7:40:02 PM	SiCl4 post valve closed
7/9/2012	7:40:02 PM	Bypass valve closed
7/9/2012	7:40:02 PM	Bubbler valve closed
7/9/2012	7:40:02 PM	Main Vac valve opened
7/9/2012	7:40:02 PM	Helium MFC set to  0.000000
7/9/2012	7:40:02 PM	H2 MFC set to  0.000000
7/9/2012	7:40:02 PM	BCl3 MFC set to  0.000000
7/9/2012	7:40:02 PM	PH3 MFC set to  0.000000
7/9/2012	7:40:02 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:40:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:40:03 PM	Tube furnace set to 150
7/9/2012	7:40:33 PM	H2 valve closed
7/9/2012	7:40:33 PM	BCl3 valve closed
7/9/2012	7:40:33 PM	PH3 valve closed
7/9/2012	7:40:33 PM	SiCl4 pre valve closed
7/9/2012	7:40:33 PM	SiCl4 post valve closed
7/9/2012	7:40:33 PM	Bypass valve closed
7/9/2012	7:40:33 PM	Bubbler valve closed
7/9/2012	7:40:33 PM	Helium valve opened
7/9/2012	7:40:33 PM	Main Vac valve opened
7/9/2012	7:40:33 PM	Helium MFC set to  20.000000
7/9/2012	7:40:33 PM	H2 MFC set to  0.000000
7/9/2012	7:40:33 PM	BCl3 MFC set to  0.000000
7/9/2012	7:40:33 PM	PH3 MFC set to  0.000000
7/9/2012	7:40:33 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:40:33 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:40:33 PM	Tube furnace set to 150
7/9/2012	7:41:03 PM	Helium valve closed
7/9/2012	7:41:03 PM	H2 valve closed
7/9/2012	7:41:03 PM	BCl3 valve closed
7/9/2012	7:41:03 PM	PH3 valve closed
7/9/2012	7:41:03 PM	SiCl4 pre valve closed
7/9/2012	7:41:03 PM	SiCl4 post valve closed
7/9/2012	7:41:03 PM	Bypass valve closed
7/9/2012	7:41:03 PM	Bubbler valve closed
7/9/2012	7:41:03 PM	Main Vac valve opened
7/9/2012	7:41:03 PM	Helium MFC set to  0.000000
7/9/2012	7:41:03 PM	H2 MFC set to  0.000000
7/9/2012	7:41:03 PM	BCl3 MFC set to  0.000000
7/9/2012	7:41:03 PM	PH3 MFC set to  0.000000
7/9/2012	7:41:03 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:41:03 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:41:03 PM	Tube furnace set to 150
7/9/2012	7:41:33 PM	H2 valve closed
7/9/2012	7:41:33 PM	BCl3 valve closed
7/9/2012	7:41:33 PM	PH3 valve closed
7/9/2012	7:41:33 PM	SiCl4 pre valve closed
7/9/2012	7:41:33 PM	SiCl4 post valve closed
7/9/2012	7:41:33 PM	Bypass valve closed
7/9/2012	7:41:33 PM	Bubbler valve closed
7/9/2012	7:41:33 PM	Helium valve opened
7/9/2012	7:41:33 PM	Main Vac valve opened
7/9/2012	7:41:33 PM	Helium MFC set to  20.000000
7/9/2012	7:41:33 PM	H2 MFC set to  0.000000
7/9/2012	7:41:33 PM	BCl3 MFC set to  0.000000
7/9/2012	7:41:33 PM	PH3 MFC set to  0.000000
7/9/2012	7:41:33 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:41:33 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:41:33 PM	Tube furnace set to 150
7/9/2012	7:42:03 PM	Helium valve closed
7/9/2012	7:42:03 PM	H2 valve closed
7/9/2012	7:42:03 PM	BCl3 valve closed
7/9/2012	7:42:03 PM	PH3 valve closed
7/9/2012	7:42:03 PM	SiCl4 pre valve closed
7/9/2012	7:42:03 PM	SiCl4 post valve closed
7/9/2012	7:42:03 PM	Bypass valve closed
7/9/2012	7:42:03 PM	Bubbler valve closed
7/9/2012	7:42:03 PM	Main Vac valve opened
7/9/2012	7:42:03 PM	Helium MFC set to  0.000000
7/9/2012	7:42:03 PM	H2 MFC set to  0.000000
7/9/2012	7:42:03 PM	BCl3 MFC set to  0.000000
7/9/2012	7:42:03 PM	PH3 MFC set to  0.000000
7/9/2012	7:42:03 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:42:03 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:42:03 PM	Tube furnace set to 150
7/9/2012	7:42:34 PM	H2 valve closed
7/9/2012	7:42:34 PM	BCl3 valve closed
7/9/2012	7:42:34 PM	PH3 valve closed
7/9/2012	7:42:34 PM	SiCl4 pre valve closed
7/9/2012	7:42:34 PM	SiCl4 post valve closed
7/9/2012	7:42:34 PM	Bypass valve closed
7/9/2012	7:42:34 PM	Bubbler valve closed
7/9/2012	7:42:34 PM	Helium valve opened
7/9/2012	7:42:34 PM	Main Vac valve opened
7/9/2012	7:42:34 PM	Helium MFC set to  20.000000
7/9/2012	7:42:34 PM	H2 MFC set to  0.000000
7/9/2012	7:42:34 PM	BCl3 MFC set to  0.000000
7/9/2012	7:42:34 PM	PH3 MFC set to  0.000000
7/9/2012	7:42:34 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:42:34 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:42:34 PM	Tube furnace set to 150
7/9/2012	7:43:04 PM	Helium valve closed
7/9/2012	7:43:04 PM	H2 valve closed
7/9/2012	7:43:04 PM	BCl3 valve closed
7/9/2012	7:43:04 PM	PH3 valve closed
7/9/2012	7:43:04 PM	SiCl4 pre valve closed
7/9/2012	7:43:04 PM	SiCl4 post valve closed
7/9/2012	7:43:04 PM	Bypass valve closed
7/9/2012	7:43:04 PM	Bubbler valve closed
7/9/2012	7:43:04 PM	Main Vac valve opened
7/9/2012	7:43:04 PM	Helium MFC set to  0.000000
7/9/2012	7:43:04 PM	H2 MFC set to  0.000000
7/9/2012	7:43:04 PM	BCl3 MFC set to  0.000000
7/9/2012	7:43:04 PM	PH3 MFC set to  0.000000
7/9/2012	7:43:04 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:43:04 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:43:04 PM	Tube furnace set to 150
7/9/2012	7:43:34 PM	H2 valve closed
7/9/2012	7:43:34 PM	BCl3 valve closed
7/9/2012	7:43:34 PM	PH3 valve closed
7/9/2012	7:43:34 PM	SiCl4 pre valve closed
7/9/2012	7:43:34 PM	SiCl4 post valve closed
7/9/2012	7:43:34 PM	Bypass valve closed
7/9/2012	7:43:34 PM	Bubbler valve closed
7/9/2012	7:43:34 PM	Helium valve opened
7/9/2012	7:43:34 PM	Main Vac valve opened
7/9/2012	7:43:34 PM	Helium MFC set to  20.000000
7/9/2012	7:43:34 PM	H2 MFC set to  0.000000
7/9/2012	7:43:34 PM	BCl3 MFC set to  0.000000
7/9/2012	7:43:34 PM	PH3 MFC set to  0.000000
7/9/2012	7:43:34 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:43:34 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:43:34 PM	Tube furnace set to 150
7/9/2012	7:44:04 PM	Helium valve closed
7/9/2012	7:44:04 PM	H2 valve closed
7/9/2012	7:44:04 PM	BCl3 valve closed
7/9/2012	7:44:04 PM	PH3 valve closed
7/9/2012	7:44:04 PM	SiCl4 pre valve closed
7/9/2012	7:44:04 PM	SiCl4 post valve closed
7/9/2012	7:44:04 PM	Bypass valve closed
7/9/2012	7:44:04 PM	Bubbler valve closed
7/9/2012	7:44:04 PM	Main Vac valve opened
7/9/2012	7:44:04 PM	Helium MFC set to  0.000000
7/9/2012	7:44:04 PM	H2 MFC set to  0.000000
7/9/2012	7:44:04 PM	BCl3 MFC set to  0.000000
7/9/2012	7:44:04 PM	PH3 MFC set to  0.000000
7/9/2012	7:44:04 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:44:04 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:44:04 PM	Tube furnace set to 150
7/9/2012	7:44:34 PM	H2 valve closed
7/9/2012	7:44:34 PM	BCl3 valve closed
7/9/2012	7:44:34 PM	PH3 valve closed
7/9/2012	7:44:34 PM	SiCl4 pre valve closed
7/9/2012	7:44:34 PM	SiCl4 post valve closed
7/9/2012	7:44:34 PM	Bypass valve closed
7/9/2012	7:44:34 PM	Bubbler valve closed
7/9/2012	7:44:34 PM	Helium valve opened
7/9/2012	7:44:34 PM	Main Vac valve opened
7/9/2012	7:44:34 PM	Helium MFC set to  20.000000
7/9/2012	7:44:35 PM	H2 MFC set to  0.000000
7/9/2012	7:44:35 PM	BCl3 MFC set to  0.000000
7/9/2012	7:44:35 PM	PH3 MFC set to  0.000000
7/9/2012	7:44:35 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:44:35 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:44:35 PM	Tube furnace set to 150
7/9/2012	7:45:05 PM	Helium valve closed
7/9/2012	7:45:05 PM	H2 valve closed
7/9/2012	7:45:05 PM	BCl3 valve closed
7/9/2012	7:45:05 PM	PH3 valve closed
7/9/2012	7:45:05 PM	SiCl4 pre valve closed
7/9/2012	7:45:05 PM	SiCl4 post valve closed
7/9/2012	7:45:05 PM	Bypass valve closed
7/9/2012	7:45:05 PM	Bubbler valve closed
7/9/2012	7:45:05 PM	Main Vac valve opened
7/9/2012	7:45:05 PM	Helium MFC set to  0.000000
7/9/2012	7:45:05 PM	H2 MFC set to  0.000000
7/9/2012	7:45:05 PM	BCl3 MFC set to  0.000000
7/9/2012	7:45:05 PM	PH3 MFC set to  0.000000
7/9/2012	7:45:05 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:45:05 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:45:05 PM	Tube furnace set to 150
7/9/2012	7:45:35 PM	H2 valve closed
7/9/2012	7:45:35 PM	BCl3 valve closed
7/9/2012	7:45:35 PM	PH3 valve closed
7/9/2012	7:45:35 PM	SiCl4 pre valve closed
7/9/2012	7:45:35 PM	SiCl4 post valve closed
7/9/2012	7:45:35 PM	Bypass valve closed
7/9/2012	7:45:35 PM	Bubbler valve closed
7/9/2012	7:45:35 PM	Helium valve opened
7/9/2012	7:45:35 PM	Main Vac valve opened
7/9/2012	7:45:35 PM	Helium MFC set to  20.000000
7/9/2012	7:45:35 PM	H2 MFC set to  0.000000
7/9/2012	7:45:35 PM	BCl3 MFC set to  0.000000
7/9/2012	7:45:35 PM	PH3 MFC set to  0.000000
7/9/2012	7:45:35 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:45:35 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:45:35 PM	Tube furnace set to 150
7/9/2012	7:46:05 PM	Helium valve closed
7/9/2012	7:46:05 PM	H2 valve closed
7/9/2012	7:46:05 PM	BCl3 valve closed
7/9/2012	7:46:05 PM	PH3 valve closed
7/9/2012	7:46:05 PM	SiCl4 pre valve closed
7/9/2012	7:46:05 PM	SiCl4 post valve closed
7/9/2012	7:46:05 PM	Bypass valve closed
7/9/2012	7:46:05 PM	Bubbler valve closed
7/9/2012	7:46:05 PM	Main Vac valve opened
7/9/2012	7:46:05 PM	Helium MFC set to  0.000000
7/9/2012	7:46:05 PM	H2 MFC set to  0.000000
7/9/2012	7:46:05 PM	BCl3 MFC set to  0.000000
7/9/2012	7:46:05 PM	PH3 MFC set to  0.000000
7/9/2012	7:46:05 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:46:05 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:46:05 PM	Tube furnace set to 150
7/9/2012	7:46:06 PM	Run finished at 7:46 PM
7/9/2012	7:47:51 PM	Recipe started at 7:47 PM
7/9/2012	7:47:51 PM	Helium valve closed
7/9/2012	7:47:51 PM	H2 valve closed
7/9/2012	7:47:51 PM	BCl3 valve closed
7/9/2012	7:47:51 PM	PH3 valve closed
7/9/2012	7:47:51 PM	SiCl4 pre valve closed
7/9/2012	7:47:51 PM	SiCl4 post valve closed
7/9/2012	7:47:51 PM	Bypass valve closed
7/9/2012	7:47:51 PM	Bubbler valve closed
7/9/2012	7:47:51 PM	Main Vac valve opened
7/9/2012	7:47:51 PM	Helium MFC set to  0.000000
7/9/2012	7:47:51 PM	H2 MFC set to  0.000000
7/9/2012	7:47:51 PM	BCl3 MFC set to  0.000000
7/9/2012	7:47:51 PM	PH3 MFC set to  0.000000
7/9/2012	7:47:51 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:47:51 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:47:51 PM	Tube furnace set to 150
7/9/2012	7:48:12 PM	Run aborted at 7:48 PM
7/9/2012	7:48:12 PM	Helium valve closed
7/9/2012	7:48:12 PM	H2 valve closed
7/9/2012	7:48:12 PM	BCl3 valve closed
7/9/2012	7:48:12 PM	PH3 valve closed
7/9/2012	7:48:12 PM	SiCl4 pre valve closed
7/9/2012	7:48:12 PM	SiCl4 post valve closed
7/9/2012	7:48:12 PM	Bypass valve closed
7/9/2012	7:48:12 PM	Main Vac valve closed
7/9/2012	7:48:12 PM	Bubbler valve closed
7/9/2012	7:48:12 PM	Helium MFC set to  0.000000
7/9/2012	7:48:12 PM	H2 MFC set to  0.000000
7/9/2012	7:48:12 PM	BCl3 MFC set to  0.000000
7/9/2012	7:48:12 PM	PH3 MFC set to  0.000000
7/9/2012	7:48:12 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:48:12 PM	Tube furnace set to 0
7/9/2012	7:48:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	7:48:15 PM	Recipe started at 7:48 PM
7/9/2012	7:48:15 PM	Helium valve closed
7/9/2012	7:48:15 PM	H2 valve closed
7/9/2012	7:48:15 PM	BCl3 valve closed
7/9/2012	7:48:15 PM	PH3 valve closed
7/9/2012	7:48:15 PM	SiCl4 pre valve closed
7/9/2012	7:48:15 PM	SiCl4 post valve closed
7/9/2012	7:48:15 PM	Main Vac valve closed
7/9/2012	7:48:15 PM	Bypass valve closed
7/9/2012	7:48:15 PM	Bubbler valve closed
7/9/2012	7:48:15 PM	Helium MFC set to  0.000000
7/9/2012	7:48:15 PM	H2 MFC set to  0.000000
7/9/2012	7:48:15 PM	BCl3 MFC set to  0.000000
7/9/2012	7:48:15 PM	PH3 MFC set to  0.000000
7/9/2012	7:48:15 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:48:15 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:48:15 PM	Tube furnace set to 0
7/9/2012	7:48:18 PM	H2 valve closed
7/9/2012	7:48:18 PM	BCl3 valve closed
7/9/2012	7:48:18 PM	PH3 valve closed
7/9/2012	7:48:18 PM	SiCl4 pre valve closed
7/9/2012	7:48:18 PM	SiCl4 post valve closed
7/9/2012	7:48:18 PM	Main Vac valve closed
7/9/2012	7:48:18 PM	Bypass valve closed
7/9/2012	7:48:18 PM	Bubbler valve closed
7/9/2012	7:48:18 PM	Helium valve opened
7/9/2012	7:48:18 PM	Helium MFC set to  500.000000
7/9/2012	7:48:18 PM	H2 MFC set to  0.000000
7/9/2012	7:48:18 PM	BCl3 MFC set to  0.000000
7/9/2012	7:48:18 PM	PH3 MFC set to  0.000000
7/9/2012	7:48:18 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:48:18 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:48:18 PM	Tube furnace set to 0
7/9/2012	7:49:28 PM	Helium valve closed
7/9/2012	7:49:28 PM	H2 valve closed
7/9/2012	7:49:28 PM	BCl3 valve closed
7/9/2012	7:49:28 PM	PH3 valve closed
7/9/2012	7:49:28 PM	SiCl4 pre valve closed
7/9/2012	7:49:28 PM	SiCl4 post valve closed
7/9/2012	7:49:28 PM	Main Vac valve closed
7/9/2012	7:49:28 PM	Bypass valve closed
7/9/2012	7:49:28 PM	Bubbler valve closed
7/9/2012	7:49:28 PM	Helium MFC set to  0.000000
7/9/2012	7:49:28 PM	H2 MFC set to  0.000000
7/9/2012	7:49:28 PM	BCl3 MFC set to  0.000000
7/9/2012	7:49:28 PM	PH3 MFC set to  0.000000
7/9/2012	7:49:28 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:49:28 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:49:28 PM	Tube furnace set to 0
7/9/2012	7:49:29 PM	Run finished at 7:49 PM
7/9/2012	7:49:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	7:49:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	7:49:32 PM	Recipe started at 7:49 PM
7/9/2012	7:49:32 PM	Helium valve closed
7/9/2012	7:49:32 PM	H2 valve closed
7/9/2012	7:49:32 PM	BCl3 valve closed
7/9/2012	7:49:32 PM	PH3 valve closed
7/9/2012	7:49:32 PM	SiCl4 pre valve closed
7/9/2012	7:49:32 PM	SiCl4 post valve closed
7/9/2012	7:49:32 PM	Main Vac valve closed
7/9/2012	7:49:32 PM	Bubbler valve closed
7/9/2012	7:49:32 PM	Bypass valve opened
7/9/2012	7:49:32 PM	Helium MFC set to  0.000000
7/9/2012	7:49:32 PM	H2 MFC set to  0.000000
7/9/2012	7:49:32 PM	BCl3 MFC set to  0.000000
7/9/2012	7:49:32 PM	PH3 MFC set to  0.000000
7/9/2012	7:49:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:49:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:49:32 PM	Tube furnace set to 0
7/9/2012	7:50:28 PM	Helium valve closed
7/9/2012	7:50:28 PM	H2 valve closed
7/9/2012	7:50:28 PM	BCl3 valve closed
7/9/2012	7:50:28 PM	PH3 valve closed
7/9/2012	7:50:28 PM	SiCl4 pre valve closed
7/9/2012	7:50:28 PM	SiCl4 post valve closed
7/9/2012	7:50:28 PM	Main Vac valve closed
7/9/2012	7:50:28 PM	Bubbler valve closed
7/9/2012	7:50:28 PM	Bypass valve opened
7/9/2012	7:50:28 PM	Helium MFC set to  0.000000
7/9/2012	7:50:28 PM	H2 MFC set to  0.000000
7/9/2012	7:50:28 PM	BCl3 MFC set to  0.000000
7/9/2012	7:50:28 PM	PH3 MFC set to  0.000000
7/9/2012	7:50:28 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:50:28 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:50:28 PM	Tube furnace set to 0
7/9/2012	7:51:28 PM	Helium valve closed
7/9/2012	7:51:28 PM	H2 valve closed
7/9/2012	7:51:28 PM	BCl3 valve closed
7/9/2012	7:51:28 PM	PH3 valve closed
7/9/2012	7:51:28 PM	SiCl4 pre valve closed
7/9/2012	7:51:28 PM	SiCl4 post valve closed
7/9/2012	7:51:28 PM	Bypass valve closed
7/9/2012	7:51:28 PM	Bubbler valve closed
7/9/2012	7:51:28 PM	Main Vac valve opened
7/9/2012	7:51:28 PM	Helium MFC set to  0.000000
7/9/2012	7:51:28 PM	H2 MFC set to  0.000000
7/9/2012	7:51:28 PM	BCl3 MFC set to  0.000000
7/9/2012	7:51:28 PM	PH3 MFC set to  0.000000
7/9/2012	7:51:28 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:51:28 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:51:28 PM	Tube furnace set to 0
7/9/2012	7:51:30 PM	Run finished at 7:51 PM
7/9/2012	7:51:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	7:51:41 PM	Recipe started at 7:51 PM
7/9/2012	7:51:41 PM	Helium valve closed
7/9/2012	7:51:41 PM	H2 valve closed
7/9/2012	7:51:41 PM	BCl3 valve closed
7/9/2012	7:51:41 PM	PH3 valve closed
7/9/2012	7:51:41 PM	SiCl4 pre valve closed
7/9/2012	7:51:41 PM	SiCl4 post valve closed
7/9/2012	7:51:41 PM	Bypass valve closed
7/9/2012	7:51:41 PM	Bubbler valve closed
7/9/2012	7:51:41 PM	Main Vac valve opened
7/9/2012	7:51:41 PM	Helium MFC set to  0.000000
7/9/2012	7:51:41 PM	H2 MFC set to  0.000000
7/9/2012	7:51:41 PM	BCl3 MFC set to  0.000000
7/9/2012	7:51:41 PM	PH3 MFC set to  0.000000
7/9/2012	7:51:41 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:51:41 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:51:41 PM	Tube furnace set to 150
7/9/2012	7:52:11 PM	H2 valve closed
7/9/2012	7:52:11 PM	BCl3 valve closed
7/9/2012	7:52:11 PM	PH3 valve closed
7/9/2012	7:52:11 PM	SiCl4 pre valve closed
7/9/2012	7:52:11 PM	SiCl4 post valve closed
7/9/2012	7:52:11 PM	Bypass valve closed
7/9/2012	7:52:11 PM	Bubbler valve closed
7/9/2012	7:52:11 PM	Helium valve opened
7/9/2012	7:52:11 PM	Main Vac valve opened
7/9/2012	7:52:11 PM	Helium MFC set to  20.000000
7/9/2012	7:52:11 PM	H2 MFC set to  0.000000
7/9/2012	7:52:11 PM	BCl3 MFC set to  0.000000
7/9/2012	7:52:11 PM	PH3 MFC set to  0.000000
7/9/2012	7:52:11 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:52:11 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:52:11 PM	Tube furnace set to 150
7/9/2012	7:52:41 PM	Helium valve closed
7/9/2012	7:52:41 PM	H2 valve closed
7/9/2012	7:52:41 PM	BCl3 valve closed
7/9/2012	7:52:41 PM	PH3 valve closed
7/9/2012	7:52:41 PM	SiCl4 pre valve closed
7/9/2012	7:52:41 PM	SiCl4 post valve closed
7/9/2012	7:52:41 PM	Bypass valve closed
7/9/2012	7:52:41 PM	Bubbler valve closed
7/9/2012	7:52:41 PM	Main Vac valve opened
7/9/2012	7:52:41 PM	Helium MFC set to  0.000000
7/9/2012	7:52:41 PM	H2 MFC set to  0.000000
7/9/2012	7:52:41 PM	BCl3 MFC set to  0.000000
7/9/2012	7:52:41 PM	PH3 MFC set to  0.000000
7/9/2012	7:52:41 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:52:41 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:52:41 PM	Tube furnace set to 150
7/9/2012	7:53:11 PM	H2 valve closed
7/9/2012	7:53:11 PM	BCl3 valve closed
7/9/2012	7:53:11 PM	PH3 valve closed
7/9/2012	7:53:11 PM	SiCl4 pre valve closed
7/9/2012	7:53:11 PM	SiCl4 post valve closed
7/9/2012	7:53:11 PM	Bypass valve closed
7/9/2012	7:53:11 PM	Bubbler valve closed
7/9/2012	7:53:11 PM	Helium valve opened
7/9/2012	7:53:11 PM	Main Vac valve opened
7/9/2012	7:53:11 PM	Helium MFC set to  20.000000
7/9/2012	7:53:11 PM	H2 MFC set to  0.000000
7/9/2012	7:53:11 PM	BCl3 MFC set to  0.000000
7/9/2012	7:53:11 PM	PH3 MFC set to  0.000000
7/9/2012	7:53:11 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:53:11 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:53:12 PM	Tube furnace set to 150
7/9/2012	7:53:42 PM	Helium valve closed
7/9/2012	7:53:42 PM	H2 valve closed
7/9/2012	7:53:42 PM	BCl3 valve closed
7/9/2012	7:53:42 PM	PH3 valve closed
7/9/2012	7:53:42 PM	SiCl4 pre valve closed
7/9/2012	7:53:42 PM	SiCl4 post valve closed
7/9/2012	7:53:42 PM	Bypass valve closed
7/9/2012	7:53:42 PM	Bubbler valve closed
7/9/2012	7:53:42 PM	Main Vac valve opened
7/9/2012	7:53:42 PM	Helium MFC set to  0.000000
7/9/2012	7:53:42 PM	H2 MFC set to  0.000000
7/9/2012	7:53:42 PM	BCl3 MFC set to  0.000000
7/9/2012	7:53:42 PM	PH3 MFC set to  0.000000
7/9/2012	7:53:42 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:53:42 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:53:42 PM	Tube furnace set to 150
7/9/2012	7:54:12 PM	H2 valve closed
7/9/2012	7:54:12 PM	BCl3 valve closed
7/9/2012	7:54:12 PM	PH3 valve closed
7/9/2012	7:54:12 PM	SiCl4 pre valve closed
7/9/2012	7:54:12 PM	SiCl4 post valve closed
7/9/2012	7:54:12 PM	Bypass valve closed
7/9/2012	7:54:12 PM	Bubbler valve closed
7/9/2012	7:54:12 PM	Helium valve opened
7/9/2012	7:54:12 PM	Main Vac valve opened
7/9/2012	7:54:12 PM	Helium MFC set to  20.000000
7/9/2012	7:54:12 PM	H2 MFC set to  0.000000
7/9/2012	7:54:12 PM	BCl3 MFC set to  0.000000
7/9/2012	7:54:12 PM	PH3 MFC set to  0.000000
7/9/2012	7:54:12 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:54:12 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:54:12 PM	Tube furnace set to 150
7/9/2012	7:54:42 PM	Helium valve closed
7/9/2012	7:54:42 PM	H2 valve closed
7/9/2012	7:54:42 PM	BCl3 valve closed
7/9/2012	7:54:42 PM	PH3 valve closed
7/9/2012	7:54:42 PM	SiCl4 pre valve closed
7/9/2012	7:54:42 PM	SiCl4 post valve closed
7/9/2012	7:54:42 PM	Bypass valve closed
7/9/2012	7:54:42 PM	Bubbler valve closed
7/9/2012	7:54:42 PM	Main Vac valve opened
7/9/2012	7:54:42 PM	Helium MFC set to  0.000000
7/9/2012	7:54:42 PM	H2 MFC set to  0.000000
7/9/2012	7:54:42 PM	BCl3 MFC set to  0.000000
7/9/2012	7:54:42 PM	PH3 MFC set to  0.000000
7/9/2012	7:54:42 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:54:42 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:54:42 PM	Tube furnace set to 150
7/9/2012	7:55:12 PM	H2 valve closed
7/9/2012	7:55:12 PM	BCl3 valve closed
7/9/2012	7:55:12 PM	PH3 valve closed
7/9/2012	7:55:12 PM	SiCl4 pre valve closed
7/9/2012	7:55:12 PM	SiCl4 post valve closed
7/9/2012	7:55:12 PM	Bypass valve closed
7/9/2012	7:55:12 PM	Bubbler valve closed
7/9/2012	7:55:12 PM	Helium valve opened
7/9/2012	7:55:12 PM	Main Vac valve opened
7/9/2012	7:55:12 PM	Helium MFC set to  20.000000
7/9/2012	7:55:12 PM	H2 MFC set to  0.000000
7/9/2012	7:55:12 PM	BCl3 MFC set to  0.000000
7/9/2012	7:55:12 PM	PH3 MFC set to  0.000000
7/9/2012	7:55:12 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:55:12 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:55:12 PM	Tube furnace set to 150
7/9/2012	7:55:43 PM	Helium valve closed
7/9/2012	7:55:43 PM	H2 valve closed
7/9/2012	7:55:43 PM	BCl3 valve closed
7/9/2012	7:55:43 PM	PH3 valve closed
7/9/2012	7:55:43 PM	SiCl4 pre valve closed
7/9/2012	7:55:43 PM	SiCl4 post valve closed
7/9/2012	7:55:43 PM	Bypass valve closed
7/9/2012	7:55:43 PM	Bubbler valve closed
7/9/2012	7:55:43 PM	Main Vac valve opened
7/9/2012	7:55:43 PM	Helium MFC set to  0.000000
7/9/2012	7:55:43 PM	H2 MFC set to  0.000000
7/9/2012	7:55:43 PM	BCl3 MFC set to  0.000000
7/9/2012	7:55:43 PM	PH3 MFC set to  0.000000
7/9/2012	7:55:43 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:55:43 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:55:43 PM	Tube furnace set to 150
7/9/2012	7:56:13 PM	H2 valve closed
7/9/2012	7:56:13 PM	BCl3 valve closed
7/9/2012	7:56:13 PM	PH3 valve closed
7/9/2012	7:56:13 PM	SiCl4 pre valve closed
7/9/2012	7:56:13 PM	SiCl4 post valve closed
7/9/2012	7:56:13 PM	Bypass valve closed
7/9/2012	7:56:13 PM	Bubbler valve closed
7/9/2012	7:56:13 PM	Helium valve opened
7/9/2012	7:56:13 PM	Main Vac valve opened
7/9/2012	7:56:13 PM	Helium MFC set to  20.000000
7/9/2012	7:56:13 PM	H2 MFC set to  0.000000
7/9/2012	7:56:13 PM	BCl3 MFC set to  0.000000
7/9/2012	7:56:13 PM	PH3 MFC set to  0.000000
7/9/2012	7:56:13 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:56:13 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:56:13 PM	Tube furnace set to 150
7/9/2012	7:56:43 PM	Helium valve closed
7/9/2012	7:56:43 PM	H2 valve closed
7/9/2012	7:56:43 PM	BCl3 valve closed
7/9/2012	7:56:43 PM	PH3 valve closed
7/9/2012	7:56:43 PM	SiCl4 pre valve closed
7/9/2012	7:56:43 PM	SiCl4 post valve closed
7/9/2012	7:56:43 PM	Bypass valve closed
7/9/2012	7:56:43 PM	Bubbler valve closed
7/9/2012	7:56:43 PM	Main Vac valve opened
7/9/2012	7:56:43 PM	Helium MFC set to  0.000000
7/9/2012	7:56:43 PM	H2 MFC set to  0.000000
7/9/2012	7:56:43 PM	BCl3 MFC set to  0.000000
7/9/2012	7:56:43 PM	PH3 MFC set to  0.000000
7/9/2012	7:56:43 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:56:43 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:56:43 PM	Tube furnace set to 150
7/9/2012	7:57:13 PM	H2 valve closed
7/9/2012	7:57:13 PM	BCl3 valve closed
7/9/2012	7:57:13 PM	PH3 valve closed
7/9/2012	7:57:13 PM	SiCl4 pre valve closed
7/9/2012	7:57:13 PM	SiCl4 post valve closed
7/9/2012	7:57:13 PM	Bypass valve closed
7/9/2012	7:57:13 PM	Bubbler valve closed
7/9/2012	7:57:13 PM	Helium valve opened
7/9/2012	7:57:13 PM	Main Vac valve opened
7/9/2012	7:57:13 PM	Helium MFC set to  20.000000
7/9/2012	7:57:13 PM	H2 MFC set to  0.000000
7/9/2012	7:57:13 PM	BCl3 MFC set to  0.000000
7/9/2012	7:57:13 PM	PH3 MFC set to  0.000000
7/9/2012	7:57:13 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:57:13 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:57:13 PM	Tube furnace set to 150
7/9/2012	7:57:43 PM	Helium valve closed
7/9/2012	7:57:43 PM	H2 valve closed
7/9/2012	7:57:43 PM	BCl3 valve closed
7/9/2012	7:57:43 PM	PH3 valve closed
7/9/2012	7:57:43 PM	SiCl4 pre valve closed
7/9/2012	7:57:43 PM	SiCl4 post valve closed
7/9/2012	7:57:43 PM	Bypass valve closed
7/9/2012	7:57:43 PM	Bubbler valve closed
7/9/2012	7:57:43 PM	Main Vac valve opened
7/9/2012	7:57:44 PM	Helium MFC set to  0.000000
7/9/2012	7:57:44 PM	H2 MFC set to  0.000000
7/9/2012	7:57:44 PM	BCl3 MFC set to  0.000000
7/9/2012	7:57:44 PM	PH3 MFC set to  0.000000
7/9/2012	7:57:44 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:57:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:57:44 PM	Tube furnace set to 150
7/9/2012	7:58:14 PM	H2 valve closed
7/9/2012	7:58:14 PM	BCl3 valve closed
7/9/2012	7:58:14 PM	PH3 valve closed
7/9/2012	7:58:14 PM	SiCl4 pre valve closed
7/9/2012	7:58:14 PM	SiCl4 post valve closed
7/9/2012	7:58:14 PM	Bypass valve closed
7/9/2012	7:58:14 PM	Bubbler valve closed
7/9/2012	7:58:14 PM	Helium valve opened
7/9/2012	7:58:14 PM	Main Vac valve opened
7/9/2012	7:58:14 PM	Helium MFC set to  20.000000
7/9/2012	7:58:14 PM	H2 MFC set to  0.000000
7/9/2012	7:58:14 PM	BCl3 MFC set to  0.000000
7/9/2012	7:58:14 PM	PH3 MFC set to  0.000000
7/9/2012	7:58:14 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:58:14 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:58:14 PM	Tube furnace set to 150
7/9/2012	7:58:44 PM	Helium valve closed
7/9/2012	7:58:44 PM	H2 valve closed
7/9/2012	7:58:44 PM	BCl3 valve closed
7/9/2012	7:58:44 PM	PH3 valve closed
7/9/2012	7:58:44 PM	SiCl4 pre valve closed
7/9/2012	7:58:44 PM	SiCl4 post valve closed
7/9/2012	7:58:44 PM	Bypass valve closed
7/9/2012	7:58:44 PM	Bubbler valve closed
7/9/2012	7:58:44 PM	Main Vac valve opened
7/9/2012	7:58:44 PM	Helium MFC set to  0.000000
7/9/2012	7:58:44 PM	H2 MFC set to  0.000000
7/9/2012	7:58:44 PM	BCl3 MFC set to  0.000000
7/9/2012	7:58:44 PM	PH3 MFC set to  0.000000
7/9/2012	7:58:44 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:58:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:58:44 PM	Tube furnace set to 150
7/9/2012	7:59:14 PM	H2 valve closed
7/9/2012	7:59:14 PM	BCl3 valve closed
7/9/2012	7:59:14 PM	PH3 valve closed
7/9/2012	7:59:14 PM	SiCl4 pre valve closed
7/9/2012	7:59:14 PM	SiCl4 post valve closed
7/9/2012	7:59:14 PM	Bypass valve closed
7/9/2012	7:59:14 PM	Bubbler valve closed
7/9/2012	7:59:14 PM	Helium valve opened
7/9/2012	7:59:14 PM	Main Vac valve opened
7/9/2012	7:59:14 PM	Helium MFC set to  20.000000
7/9/2012	7:59:14 PM	H2 MFC set to  0.000000
7/9/2012	7:59:14 PM	BCl3 MFC set to  0.000000
7/9/2012	7:59:14 PM	PH3 MFC set to  0.000000
7/9/2012	7:59:14 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:59:14 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:59:14 PM	Tube furnace set to 150
7/9/2012	7:59:44 PM	Helium valve closed
7/9/2012	7:59:44 PM	H2 valve closed
7/9/2012	7:59:44 PM	BCl3 valve closed
7/9/2012	7:59:44 PM	PH3 valve closed
7/9/2012	7:59:44 PM	SiCl4 pre valve closed
7/9/2012	7:59:44 PM	SiCl4 post valve closed
7/9/2012	7:59:44 PM	Bypass valve closed
7/9/2012	7:59:44 PM	Bubbler valve closed
7/9/2012	7:59:44 PM	Main Vac valve opened
7/9/2012	7:59:44 PM	Helium MFC set to  0.000000
7/9/2012	7:59:44 PM	H2 MFC set to  0.000000
7/9/2012	7:59:44 PM	BCl3 MFC set to  0.000000
7/9/2012	7:59:44 PM	PH3 MFC set to  0.000000
7/9/2012	7:59:44 PM	SiCl4 MFC set to  0.000000
7/9/2012	7:59:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	7:59:45 PM	Tube furnace set to 150
7/9/2012	8:00:15 PM	H2 valve closed
7/9/2012	8:00:15 PM	BCl3 valve closed
7/9/2012	8:00:15 PM	PH3 valve closed
7/9/2012	8:00:15 PM	SiCl4 pre valve closed
7/9/2012	8:00:15 PM	SiCl4 post valve closed
7/9/2012	8:00:15 PM	Bypass valve closed
7/9/2012	8:00:15 PM	Bubbler valve closed
7/9/2012	8:00:15 PM	Helium valve opened
7/9/2012	8:00:15 PM	Main Vac valve opened
7/9/2012	8:00:15 PM	Helium MFC set to  20.000000
7/9/2012	8:00:15 PM	H2 MFC set to  0.000000
7/9/2012	8:00:15 PM	BCl3 MFC set to  0.000000
7/9/2012	8:00:15 PM	PH3 MFC set to  0.000000
7/9/2012	8:00:15 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:00:15 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:00:15 PM	Tube furnace set to 150
7/9/2012	8:00:45 PM	Helium valve closed
7/9/2012	8:00:45 PM	H2 valve closed
7/9/2012	8:00:45 PM	BCl3 valve closed
7/9/2012	8:00:45 PM	PH3 valve closed
7/9/2012	8:00:45 PM	SiCl4 pre valve closed
7/9/2012	8:00:45 PM	SiCl4 post valve closed
7/9/2012	8:00:45 PM	Bypass valve closed
7/9/2012	8:00:45 PM	Bubbler valve closed
7/9/2012	8:00:45 PM	Main Vac valve opened
7/9/2012	8:00:45 PM	Helium MFC set to  0.000000
7/9/2012	8:00:45 PM	H2 MFC set to  0.000000
7/9/2012	8:00:45 PM	BCl3 MFC set to  0.000000
7/9/2012	8:00:45 PM	PH3 MFC set to  0.000000
7/9/2012	8:00:45 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:00:45 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:00:45 PM	Tube furnace set to 150
7/9/2012	8:01:15 PM	H2 valve closed
7/9/2012	8:01:15 PM	BCl3 valve closed
7/9/2012	8:01:15 PM	PH3 valve closed
7/9/2012	8:01:15 PM	SiCl4 pre valve closed
7/9/2012	8:01:15 PM	SiCl4 post valve closed
7/9/2012	8:01:15 PM	Bypass valve closed
7/9/2012	8:01:15 PM	Bubbler valve closed
7/9/2012	8:01:15 PM	Helium valve opened
7/9/2012	8:01:15 PM	Main Vac valve opened
7/9/2012	8:01:15 PM	Helium MFC set to  20.000000
7/9/2012	8:01:15 PM	H2 MFC set to  0.000000
7/9/2012	8:01:15 PM	BCl3 MFC set to  0.000000
7/9/2012	8:01:15 PM	PH3 MFC set to  0.000000
7/9/2012	8:01:15 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:01:15 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:01:15 PM	Tube furnace set to 150
7/9/2012	8:01:45 PM	Helium valve closed
7/9/2012	8:01:45 PM	H2 valve closed
7/9/2012	8:01:45 PM	BCl3 valve closed
7/9/2012	8:01:45 PM	PH3 valve closed
7/9/2012	8:01:45 PM	SiCl4 pre valve closed
7/9/2012	8:01:45 PM	SiCl4 post valve closed
7/9/2012	8:01:45 PM	Bypass valve closed
7/9/2012	8:01:45 PM	Bubbler valve closed
7/9/2012	8:01:45 PM	Main Vac valve opened
7/9/2012	8:01:45 PM	Helium MFC set to  0.000000
7/9/2012	8:01:45 PM	H2 MFC set to  0.000000
7/9/2012	8:01:45 PM	BCl3 MFC set to  0.000000
7/9/2012	8:01:45 PM	PH3 MFC set to  0.000000
7/9/2012	8:01:45 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:01:45 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:01:46 PM	Tube furnace set to 150
7/9/2012	8:01:47 PM	Run finished at 8:01 PM
7/9/2012	8:39:43 PM	Recipe started at 8:39 PM
7/9/2012	8:39:43 PM	Helium valve closed
7/9/2012	8:39:43 PM	H2 valve closed
7/9/2012	8:39:43 PM	BCl3 valve closed
7/9/2012	8:39:43 PM	PH3 valve closed
7/9/2012	8:39:43 PM	SiCl4 pre valve closed
7/9/2012	8:39:43 PM	SiCl4 post valve closed
7/9/2012	8:39:43 PM	Bypass valve closed
7/9/2012	8:39:43 PM	Bubbler valve closed
7/9/2012	8:39:43 PM	Main Vac valve opened
7/9/2012	8:39:43 PM	Helium MFC set to  0.000000
7/9/2012	8:39:44 PM	H2 MFC set to  0.000000
7/9/2012	8:39:44 PM	BCl3 MFC set to  0.000000
7/9/2012	8:39:44 PM	PH3 MFC set to  0.000000
7/9/2012	8:39:44 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:39:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:39:44 PM	Tube furnace set to 150
7/9/2012	8:40:14 PM	H2 valve closed
7/9/2012	8:40:14 PM	BCl3 valve closed
7/9/2012	8:40:14 PM	PH3 valve closed
7/9/2012	8:40:14 PM	SiCl4 pre valve closed
7/9/2012	8:40:14 PM	SiCl4 post valve closed
7/9/2012	8:40:14 PM	Bypass valve closed
7/9/2012	8:40:14 PM	Bubbler valve closed
7/9/2012	8:40:14 PM	Helium valve opened
7/9/2012	8:40:14 PM	Main Vac valve opened
7/9/2012	8:40:14 PM	Helium MFC set to  20.000000
7/9/2012	8:40:14 PM	H2 MFC set to  0.000000
7/9/2012	8:40:14 PM	BCl3 MFC set to  0.000000
7/9/2012	8:40:14 PM	PH3 MFC set to  0.000000
7/9/2012	8:40:14 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:40:14 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:40:14 PM	Tube furnace set to 150
7/9/2012	8:40:44 PM	Helium valve closed
7/9/2012	8:40:44 PM	H2 valve closed
7/9/2012	8:40:44 PM	BCl3 valve closed
7/9/2012	8:40:44 PM	PH3 valve closed
7/9/2012	8:40:44 PM	SiCl4 pre valve closed
7/9/2012	8:40:44 PM	SiCl4 post valve closed
7/9/2012	8:40:44 PM	Bypass valve closed
7/9/2012	8:40:44 PM	Bubbler valve closed
7/9/2012	8:40:44 PM	Main Vac valve opened
7/9/2012	8:40:44 PM	Helium MFC set to  0.000000
7/9/2012	8:40:44 PM	H2 MFC set to  0.000000
7/9/2012	8:40:44 PM	BCl3 MFC set to  0.000000
7/9/2012	8:40:44 PM	PH3 MFC set to  0.000000
7/9/2012	8:40:44 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:40:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:40:44 PM	Tube furnace set to 150
7/9/2012	8:41:14 PM	H2 valve closed
7/9/2012	8:41:14 PM	BCl3 valve closed
7/9/2012	8:41:14 PM	PH3 valve closed
7/9/2012	8:41:14 PM	SiCl4 pre valve closed
7/9/2012	8:41:14 PM	SiCl4 post valve closed
7/9/2012	8:41:14 PM	Bypass valve closed
7/9/2012	8:41:14 PM	Bubbler valve closed
7/9/2012	8:41:14 PM	Helium valve opened
7/9/2012	8:41:14 PM	Main Vac valve opened
7/9/2012	8:41:14 PM	Helium MFC set to  20.000000
7/9/2012	8:41:14 PM	H2 MFC set to  0.000000
7/9/2012	8:41:14 PM	BCl3 MFC set to  0.000000
7/9/2012	8:41:14 PM	PH3 MFC set to  0.000000
7/9/2012	8:41:14 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:41:14 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:41:14 PM	Tube furnace set to 150
7/9/2012	8:41:44 PM	Helium valve closed
7/9/2012	8:41:44 PM	H2 valve closed
7/9/2012	8:41:44 PM	BCl3 valve closed
7/9/2012	8:41:44 PM	PH3 valve closed
7/9/2012	8:41:44 PM	SiCl4 pre valve closed
7/9/2012	8:41:44 PM	SiCl4 post valve closed
7/9/2012	8:41:44 PM	Bypass valve closed
7/9/2012	8:41:44 PM	Bubbler valve closed
7/9/2012	8:41:44 PM	Main Vac valve opened
7/9/2012	8:41:44 PM	Helium MFC set to  0.000000
7/9/2012	8:41:44 PM	H2 MFC set to  0.000000
7/9/2012	8:41:44 PM	BCl3 MFC set to  0.000000
7/9/2012	8:41:44 PM	PH3 MFC set to  0.000000
7/9/2012	8:41:44 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:41:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:41:45 PM	Tube furnace set to 150
7/9/2012	8:42:15 PM	H2 valve closed
7/9/2012	8:42:15 PM	BCl3 valve closed
7/9/2012	8:42:15 PM	PH3 valve closed
7/9/2012	8:42:15 PM	SiCl4 pre valve closed
7/9/2012	8:42:15 PM	SiCl4 post valve closed
7/9/2012	8:42:15 PM	Bypass valve closed
7/9/2012	8:42:15 PM	Bubbler valve closed
7/9/2012	8:42:15 PM	Helium valve opened
7/9/2012	8:42:15 PM	Main Vac valve opened
7/9/2012	8:42:15 PM	Helium MFC set to  20.000000
7/9/2012	8:42:15 PM	H2 MFC set to  0.000000
7/9/2012	8:42:15 PM	BCl3 MFC set to  0.000000
7/9/2012	8:42:15 PM	PH3 MFC set to  0.000000
7/9/2012	8:42:15 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:42:15 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:42:15 PM	Tube furnace set to 150
7/9/2012	8:42:45 PM	Helium valve closed
7/9/2012	8:42:45 PM	H2 valve closed
7/9/2012	8:42:45 PM	BCl3 valve closed
7/9/2012	8:42:45 PM	PH3 valve closed
7/9/2012	8:42:45 PM	SiCl4 pre valve closed
7/9/2012	8:42:45 PM	SiCl4 post valve closed
7/9/2012	8:42:45 PM	Bypass valve closed
7/9/2012	8:42:45 PM	Bubbler valve closed
7/9/2012	8:42:45 PM	Main Vac valve opened
7/9/2012	8:42:45 PM	Helium MFC set to  0.000000
7/9/2012	8:42:45 PM	H2 MFC set to  0.000000
7/9/2012	8:42:45 PM	BCl3 MFC set to  0.000000
7/9/2012	8:42:45 PM	PH3 MFC set to  0.000000
7/9/2012	8:42:45 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:42:45 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:42:45 PM	Tube furnace set to 150
7/9/2012	8:43:15 PM	H2 valve closed
7/9/2012	8:43:15 PM	BCl3 valve closed
7/9/2012	8:43:15 PM	PH3 valve closed
7/9/2012	8:43:15 PM	SiCl4 pre valve closed
7/9/2012	8:43:15 PM	SiCl4 post valve closed
7/9/2012	8:43:15 PM	Bypass valve closed
7/9/2012	8:43:15 PM	Bubbler valve closed
7/9/2012	8:43:15 PM	Helium valve opened
7/9/2012	8:43:15 PM	Main Vac valve opened
7/9/2012	8:43:15 PM	Helium MFC set to  20.000000
7/9/2012	8:43:15 PM	H2 MFC set to  0.000000
7/9/2012	8:43:15 PM	BCl3 MFC set to  0.000000
7/9/2012	8:43:15 PM	PH3 MFC set to  0.000000
7/9/2012	8:43:15 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:43:15 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:43:15 PM	Tube furnace set to 150
7/9/2012	8:43:45 PM	Helium valve closed
7/9/2012	8:43:45 PM	H2 valve closed
7/9/2012	8:43:45 PM	BCl3 valve closed
7/9/2012	8:43:45 PM	PH3 valve closed
7/9/2012	8:43:45 PM	SiCl4 pre valve closed
7/9/2012	8:43:45 PM	SiCl4 post valve closed
7/9/2012	8:43:45 PM	Bypass valve closed
7/9/2012	8:43:45 PM	Bubbler valve closed
7/9/2012	8:43:45 PM	Main Vac valve opened
7/9/2012	8:43:45 PM	Helium MFC set to  0.000000
7/9/2012	8:43:45 PM	H2 MFC set to  0.000000
7/9/2012	8:43:45 PM	BCl3 MFC set to  0.000000
7/9/2012	8:43:45 PM	PH3 MFC set to  0.000000
7/9/2012	8:43:45 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:43:45 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:43:46 PM	Tube furnace set to 150
7/9/2012	8:44:16 PM	H2 valve closed
7/9/2012	8:44:16 PM	BCl3 valve closed
7/9/2012	8:44:16 PM	PH3 valve closed
7/9/2012	8:44:16 PM	SiCl4 pre valve closed
7/9/2012	8:44:16 PM	SiCl4 post valve closed
7/9/2012	8:44:16 PM	Bypass valve closed
7/9/2012	8:44:16 PM	Bubbler valve closed
7/9/2012	8:44:16 PM	Helium valve opened
7/9/2012	8:44:16 PM	Main Vac valve opened
7/9/2012	8:44:16 PM	Helium MFC set to  20.000000
7/9/2012	8:44:16 PM	H2 MFC set to  0.000000
7/9/2012	8:44:16 PM	BCl3 MFC set to  0.000000
7/9/2012	8:44:16 PM	PH3 MFC set to  0.000000
7/9/2012	8:44:16 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:44:16 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:44:16 PM	Tube furnace set to 150
7/9/2012	8:44:46 PM	Helium valve closed
7/9/2012	8:44:46 PM	H2 valve closed
7/9/2012	8:44:46 PM	BCl3 valve closed
7/9/2012	8:44:46 PM	PH3 valve closed
7/9/2012	8:44:46 PM	SiCl4 pre valve closed
7/9/2012	8:44:46 PM	SiCl4 post valve closed
7/9/2012	8:44:46 PM	Bypass valve closed
7/9/2012	8:44:46 PM	Bubbler valve closed
7/9/2012	8:44:46 PM	Main Vac valve opened
7/9/2012	8:44:46 PM	Helium MFC set to  0.000000
7/9/2012	8:44:46 PM	H2 MFC set to  0.000000
7/9/2012	8:44:46 PM	BCl3 MFC set to  0.000000
7/9/2012	8:44:46 PM	PH3 MFC set to  0.000000
7/9/2012	8:44:46 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:44:46 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:44:46 PM	Tube furnace set to 150
7/9/2012	8:45:16 PM	H2 valve closed
7/9/2012	8:45:16 PM	BCl3 valve closed
7/9/2012	8:45:16 PM	PH3 valve closed
7/9/2012	8:45:16 PM	SiCl4 pre valve closed
7/9/2012	8:45:16 PM	SiCl4 post valve closed
7/9/2012	8:45:16 PM	Bypass valve closed
7/9/2012	8:45:16 PM	Bubbler valve closed
7/9/2012	8:45:16 PM	Helium valve opened
7/9/2012	8:45:16 PM	Main Vac valve opened
7/9/2012	8:45:16 PM	Helium MFC set to  20.000000
7/9/2012	8:45:16 PM	H2 MFC set to  0.000000
7/9/2012	8:45:16 PM	BCl3 MFC set to  0.000000
7/9/2012	8:45:16 PM	PH3 MFC set to  0.000000
7/9/2012	8:45:16 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:45:16 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:45:16 PM	Tube furnace set to 150
7/9/2012	8:45:46 PM	Helium valve closed
7/9/2012	8:45:46 PM	H2 valve closed
7/9/2012	8:45:46 PM	BCl3 valve closed
7/9/2012	8:45:46 PM	PH3 valve closed
7/9/2012	8:45:46 PM	SiCl4 pre valve closed
7/9/2012	8:45:46 PM	SiCl4 post valve closed
7/9/2012	8:45:46 PM	Bypass valve closed
7/9/2012	8:45:46 PM	Bubbler valve closed
7/9/2012	8:45:46 PM	Main Vac valve opened
7/9/2012	8:45:46 PM	Helium MFC set to  0.000000
7/9/2012	8:45:46 PM	H2 MFC set to  0.000000
7/9/2012	8:45:46 PM	BCl3 MFC set to  0.000000
7/9/2012	8:45:46 PM	PH3 MFC set to  0.000000
7/9/2012	8:45:46 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:45:46 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:45:46 PM	Tube furnace set to 150
7/9/2012	8:46:17 PM	H2 valve closed
7/9/2012	8:46:17 PM	BCl3 valve closed
7/9/2012	8:46:17 PM	PH3 valve closed
7/9/2012	8:46:17 PM	SiCl4 pre valve closed
7/9/2012	8:46:17 PM	SiCl4 post valve closed
7/9/2012	8:46:17 PM	Bypass valve closed
7/9/2012	8:46:17 PM	Bubbler valve closed
7/9/2012	8:46:17 PM	Helium valve opened
7/9/2012	8:46:17 PM	Main Vac valve opened
7/9/2012	8:46:17 PM	Helium MFC set to  20.000000
7/9/2012	8:46:17 PM	H2 MFC set to  0.000000
7/9/2012	8:46:17 PM	BCl3 MFC set to  0.000000
7/9/2012	8:46:17 PM	PH3 MFC set to  0.000000
7/9/2012	8:46:17 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:46:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:46:17 PM	Tube furnace set to 150
7/9/2012	8:46:47 PM	Helium valve closed
7/9/2012	8:46:47 PM	H2 valve closed
7/9/2012	8:46:47 PM	BCl3 valve closed
7/9/2012	8:46:47 PM	PH3 valve closed
7/9/2012	8:46:47 PM	SiCl4 pre valve closed
7/9/2012	8:46:47 PM	SiCl4 post valve closed
7/9/2012	8:46:47 PM	Bypass valve closed
7/9/2012	8:46:47 PM	Bubbler valve closed
7/9/2012	8:46:47 PM	Main Vac valve opened
7/9/2012	8:46:47 PM	Helium MFC set to  0.000000
7/9/2012	8:46:47 PM	H2 MFC set to  0.000000
7/9/2012	8:46:47 PM	BCl3 MFC set to  0.000000
7/9/2012	8:46:47 PM	PH3 MFC set to  0.000000
7/9/2012	8:46:47 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:46:47 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:46:47 PM	Tube furnace set to 150
7/9/2012	8:47:17 PM	H2 valve closed
7/9/2012	8:47:17 PM	BCl3 valve closed
7/9/2012	8:47:17 PM	PH3 valve closed
7/9/2012	8:47:17 PM	SiCl4 pre valve closed
7/9/2012	8:47:17 PM	SiCl4 post valve closed
7/9/2012	8:47:17 PM	Bypass valve closed
7/9/2012	8:47:17 PM	Bubbler valve closed
7/9/2012	8:47:17 PM	Helium valve opened
7/9/2012	8:47:17 PM	Main Vac valve opened
7/9/2012	8:47:17 PM	Helium MFC set to  20.000000
7/9/2012	8:47:17 PM	H2 MFC set to  0.000000
7/9/2012	8:47:17 PM	BCl3 MFC set to  0.000000
7/9/2012	8:47:17 PM	PH3 MFC set to  0.000000
7/9/2012	8:47:17 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:47:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:47:17 PM	Tube furnace set to 150
7/9/2012	8:47:47 PM	Helium valve closed
7/9/2012	8:47:47 PM	H2 valve closed
7/9/2012	8:47:47 PM	BCl3 valve closed
7/9/2012	8:47:47 PM	PH3 valve closed
7/9/2012	8:47:47 PM	SiCl4 pre valve closed
7/9/2012	8:47:47 PM	SiCl4 post valve closed
7/9/2012	8:47:47 PM	Bypass valve closed
7/9/2012	8:47:47 PM	Bubbler valve closed
7/9/2012	8:47:47 PM	Main Vac valve opened
7/9/2012	8:47:47 PM	Helium MFC set to  0.000000
7/9/2012	8:47:47 PM	H2 MFC set to  0.000000
7/9/2012	8:47:47 PM	BCl3 MFC set to  0.000000
7/9/2012	8:47:47 PM	PH3 MFC set to  0.000000
7/9/2012	8:47:47 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:47:47 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:47:47 PM	Tube furnace set to 150
7/9/2012	8:48:17 PM	H2 valve closed
7/9/2012	8:48:17 PM	BCl3 valve closed
7/9/2012	8:48:17 PM	PH3 valve closed
7/9/2012	8:48:17 PM	SiCl4 pre valve closed
7/9/2012	8:48:17 PM	SiCl4 post valve closed
7/9/2012	8:48:17 PM	Bypass valve closed
7/9/2012	8:48:17 PM	Bubbler valve closed
7/9/2012	8:48:17 PM	Helium valve opened
7/9/2012	8:48:17 PM	Main Vac valve opened
7/9/2012	8:48:17 PM	Helium MFC set to  20.000000
7/9/2012	8:48:18 PM	H2 MFC set to  0.000000
7/9/2012	8:48:18 PM	BCl3 MFC set to  0.000000
7/9/2012	8:48:18 PM	PH3 MFC set to  0.000000
7/9/2012	8:48:18 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:48:18 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:48:18 PM	Tube furnace set to 150
7/9/2012	8:48:48 PM	Helium valve closed
7/9/2012	8:48:48 PM	H2 valve closed
7/9/2012	8:48:48 PM	BCl3 valve closed
7/9/2012	8:48:48 PM	PH3 valve closed
7/9/2012	8:48:48 PM	SiCl4 pre valve closed
7/9/2012	8:48:48 PM	SiCl4 post valve closed
7/9/2012	8:48:48 PM	Bypass valve closed
7/9/2012	8:48:48 PM	Bubbler valve closed
7/9/2012	8:48:48 PM	Main Vac valve opened
7/9/2012	8:48:48 PM	Helium MFC set to  0.000000
7/9/2012	8:48:48 PM	H2 MFC set to  0.000000
7/9/2012	8:48:48 PM	BCl3 MFC set to  0.000000
7/9/2012	8:48:48 PM	PH3 MFC set to  0.000000
7/9/2012	8:48:48 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:48:48 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:48:48 PM	Tube furnace set to 150
7/9/2012	8:49:18 PM	H2 valve closed
7/9/2012	8:49:18 PM	BCl3 valve closed
7/9/2012	8:49:18 PM	PH3 valve closed
7/9/2012	8:49:18 PM	SiCl4 pre valve closed
7/9/2012	8:49:18 PM	SiCl4 post valve closed
7/9/2012	8:49:18 PM	Bypass valve closed
7/9/2012	8:49:18 PM	Bubbler valve closed
7/9/2012	8:49:18 PM	Helium valve opened
7/9/2012	8:49:18 PM	Main Vac valve opened
7/9/2012	8:49:18 PM	Helium MFC set to  20.000000
7/9/2012	8:49:18 PM	H2 MFC set to  0.000000
7/9/2012	8:49:18 PM	BCl3 MFC set to  0.000000
7/9/2012	8:49:18 PM	PH3 MFC set to  0.000000
7/9/2012	8:49:18 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:49:18 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:49:18 PM	Tube furnace set to 150
7/9/2012	8:49:48 PM	Helium valve closed
7/9/2012	8:49:48 PM	H2 valve closed
7/9/2012	8:49:48 PM	BCl3 valve closed
7/9/2012	8:49:48 PM	PH3 valve closed
7/9/2012	8:49:48 PM	SiCl4 pre valve closed
7/9/2012	8:49:48 PM	SiCl4 post valve closed
7/9/2012	8:49:48 PM	Bypass valve closed
7/9/2012	8:49:48 PM	Bubbler valve closed
7/9/2012	8:49:48 PM	Main Vac valve opened
7/9/2012	8:49:48 PM	Helium MFC set to  0.000000
7/9/2012	8:49:48 PM	H2 MFC set to  0.000000
7/9/2012	8:49:48 PM	BCl3 MFC set to  0.000000
7/9/2012	8:49:48 PM	PH3 MFC set to  0.000000
7/9/2012	8:49:48 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:49:48 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:49:48 PM	Tube furnace set to 150
7/9/2012	8:49:49 PM	Run finished at 8:49 PM
7/9/2012	8:50:38 PM	Main Vac valve closed
7/9/2012	8:50:44 PM	Main Vac valve opened
7/9/2012	8:52:08 PM	Helium MFC set to  20.000000
7/9/2012	8:52:10 PM	Helium valve opened
7/9/2012	8:52:29 PM	Helium MFC set to  0.000000
7/9/2012	8:52:30 PM	Helium valve closed
7/9/2012	8:53:00 PM	Recipe started at 8:52 PM
7/9/2012	8:53:00 PM	Helium valve closed
7/9/2012	8:53:00 PM	H2 valve closed
7/9/2012	8:53:00 PM	BCl3 valve closed
7/9/2012	8:53:00 PM	PH3 valve closed
7/9/2012	8:53:00 PM	SiCl4 pre valve closed
7/9/2012	8:53:00 PM	SiCl4 post valve closed
7/9/2012	8:53:00 PM	Main Vac valve closed
7/9/2012	8:53:00 PM	Bypass valve closed
7/9/2012	8:53:00 PM	Bubbler valve closed
7/9/2012	8:53:00 PM	Helium MFC set to  0.000000
7/9/2012	8:53:00 PM	H2 MFC set to  0.000000
7/9/2012	8:53:00 PM	BCl3 MFC set to  0.000000
7/9/2012	8:53:00 PM	PH3 MFC set to  0.000000
7/9/2012	8:53:00 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:53:00 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:53:00 PM	Tube furnace set to 0
7/9/2012	8:53:03 PM	Helium valve closed
7/9/2012	8:53:03 PM	BCl3 valve closed
7/9/2012	8:53:03 PM	PH3 valve closed
7/9/2012	8:53:03 PM	SiCl4 pre valve closed
7/9/2012	8:53:03 PM	SiCl4 post valve closed
7/9/2012	8:53:03 PM	Main Vac valve closed
7/9/2012	8:53:03 PM	Bypass valve closed
7/9/2012	8:53:03 PM	Bubbler valve closed
7/9/2012	8:53:03 PM	H2 valve opened
7/9/2012	8:53:03 PM	Helium MFC set to  0.000000
7/9/2012	8:53:03 PM	H2 MFC set to  500.000000
7/9/2012	8:53:03 PM	BCl3 MFC set to  0.000000
7/9/2012	8:53:03 PM	PH3 MFC set to  0.000000
7/9/2012	8:53:03 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:53:03 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:53:03 PM	Tube furnace set to 0
7/9/2012	8:54:16 PM	Helium valve closed
7/9/2012	8:54:16 PM	BCl3 valve closed
7/9/2012	8:54:16 PM	PH3 valve closed
7/9/2012	8:54:16 PM	SiCl4 pre valve closed
7/9/2012	8:54:16 PM	SiCl4 post valve closed
7/9/2012	8:54:16 PM	Main Vac valve closed
7/9/2012	8:54:16 PM	Bypass valve closed
7/9/2012	8:54:16 PM	H2 valve opened
7/9/2012	8:54:16 PM	Bubbler valve opened
7/9/2012	8:54:16 PM	Helium MFC set to  0.000000
7/9/2012	8:54:16 PM	H2 MFC set to  500.000000
7/9/2012	8:54:16 PM	BCl3 MFC set to  0.000000
7/9/2012	8:54:16 PM	PH3 MFC set to  0.000000
7/9/2012	8:54:16 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:54:16 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:54:16 PM	Tube furnace set to 0
7/9/2012	8:54:17 PM	Helium valve closed
7/9/2012	8:54:17 PM	BCl3 valve closed
7/9/2012	8:54:17 PM	PH3 valve closed
7/9/2012	8:54:17 PM	SiCl4 pre valve closed
7/9/2012	8:54:17 PM	SiCl4 post valve closed
7/9/2012	8:54:17 PM	Main Vac valve closed
7/9/2012	8:54:17 PM	Bypass valve closed
7/9/2012	8:54:17 PM	H2 valve opened
7/9/2012	8:54:17 PM	Bubbler valve opened
7/9/2012	8:54:17 PM	Helium MFC set to  0.000000
7/9/2012	8:54:17 PM	H2 MFC set to  500.000000
7/9/2012	8:54:17 PM	BCl3 MFC set to  0.000000
7/9/2012	8:54:17 PM	PH3 MFC set to  0.000000
7/9/2012	8:54:17 PM	SiCl4 MFC set to  0.000000
7/9/2012	8:54:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	8:54:17 PM	Tube furnace set to 1000
7/9/2012	9:14:17 PM	Helium valve closed
7/9/2012	9:14:17 PM	PH3 valve closed
7/9/2012	9:14:17 PM	Main Vac valve closed
7/9/2012	9:14:17 PM	Bypass valve closed
7/9/2012	9:14:17 PM	H2 valve opened
7/9/2012	9:14:17 PM	BCl3 valve opened
7/9/2012	9:14:17 PM	SiCl4 pre valve opened
7/9/2012	9:14:17 PM	SiCl4 post valve opened
7/9/2012	9:14:17 PM	Bubbler valve opened
7/9/2012	9:14:17 PM	Helium MFC set to  0.000000
7/9/2012	9:14:17 PM	H2 MFC set to  500.000000
7/9/2012	9:14:17 PM	BCl3 MFC set to  1.000000
7/9/2012	9:14:17 PM	PH3 MFC set to  0.000000
7/9/2012	9:14:17 PM	SiCl4 MFC set to  50.000000
7/9/2012	9:14:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	9:14:17 PM	Tube furnace set to 1000
7/9/2012	9:29:17 PM	Helium valve closed
7/9/2012	9:29:17 PM	BCl3 valve closed
7/9/2012	9:29:17 PM	PH3 valve closed
7/9/2012	9:29:17 PM	SiCl4 pre valve closed
7/9/2012	9:29:17 PM	SiCl4 post valve closed
7/9/2012	9:29:17 PM	Main Vac valve closed
7/9/2012	9:29:17 PM	Bypass valve closed
7/9/2012	9:29:17 PM	H2 valve opened
7/9/2012	9:29:17 PM	Bubbler valve opened
7/9/2012	9:29:17 PM	Helium MFC set to  0.000000
7/9/2012	9:29:17 PM	H2 MFC set to  500.000000
7/9/2012	9:29:17 PM	BCl3 MFC set to  0.000000
7/9/2012	9:29:17 PM	PH3 MFC set to  0.000000
7/9/2012	9:29:17 PM	SiCl4 MFC set to  0.000000
7/9/2012	9:29:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	9:29:17 PM	Tube furnace set to 750
7/9/2012	9:34:17 PM	H2 valve closed
7/9/2012	9:34:17 PM	BCl3 valve closed
7/9/2012	9:34:17 PM	PH3 valve closed
7/9/2012	9:34:17 PM	SiCl4 pre valve closed
7/9/2012	9:34:17 PM	SiCl4 post valve closed
7/9/2012	9:34:17 PM	Main Vac valve closed
7/9/2012	9:34:17 PM	Bypass valve closed
7/9/2012	9:34:17 PM	Helium valve opened
7/9/2012	9:34:17 PM	Bubbler valve opened
7/9/2012	9:34:17 PM	Helium MFC set to  500.000000
7/9/2012	9:34:17 PM	H2 MFC set to  0.000000
7/9/2012	9:34:17 PM	BCl3 MFC set to  0.000000
7/9/2012	9:34:17 PM	PH3 MFC set to  0.000000
7/9/2012	9:34:17 PM	SiCl4 MFC set to  0.000000
7/9/2012	9:34:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	9:34:17 PM	Tube furnace set to 0
7/9/2012	9:54:17 PM	Helium valve closed
7/9/2012	9:54:17 PM	H2 valve closed
7/9/2012	9:54:17 PM	BCl3 valve closed
7/9/2012	9:54:17 PM	PH3 valve closed
7/9/2012	9:54:17 PM	SiCl4 pre valve closed
7/9/2012	9:54:17 PM	SiCl4 post valve closed
7/9/2012	9:54:17 PM	Main Vac valve closed
7/9/2012	9:54:17 PM	Bypass valve closed
7/9/2012	9:54:17 PM	Bubbler valve closed
7/9/2012	9:54:17 PM	Helium MFC set to  0.000000
7/9/2012	9:54:17 PM	H2 MFC set to  0.000000
7/9/2012	9:54:18 PM	BCl3 MFC set to  0.000000
7/9/2012	9:54:18 PM	PH3 MFC set to  0.000000
7/9/2012	9:54:18 PM	SiCl4 MFC set to  0.000000
7/9/2012	9:54:18 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	9:54:18 PM	Tube furnace set to 0
7/9/2012	9:54:19 PM	Run finished at 9:54 PM
7/9/2012	10:21:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	10:21:58 PM	Recipe started at 10:21 PM
7/9/2012	10:21:58 PM	Helium valve closed
7/9/2012	10:21:58 PM	H2 valve closed
7/9/2012	10:21:58 PM	BCl3 valve closed
7/9/2012	10:21:58 PM	PH3 valve closed
7/9/2012	10:21:58 PM	SiCl4 pre valve closed
7/9/2012	10:21:58 PM	SiCl4 post valve closed
7/9/2012	10:21:58 PM	Main Vac valve closed
7/9/2012	10:21:58 PM	Bypass valve closed
7/9/2012	10:21:58 PM	Bubbler valve closed
7/9/2012	10:21:58 PM	Helium MFC set to  0.000000
7/9/2012	10:21:58 PM	H2 MFC set to  0.000000
7/9/2012	10:21:58 PM	BCl3 MFC set to  0.000000
7/9/2012	10:21:58 PM	PH3 MFC set to  0.000000
7/9/2012	10:21:58 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:21:58 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:21:58 PM	Tube furnace set to 0
7/9/2012	10:22:01 PM	H2 valve closed
7/9/2012	10:22:01 PM	BCl3 valve closed
7/9/2012	10:22:01 PM	PH3 valve closed
7/9/2012	10:22:01 PM	SiCl4 pre valve closed
7/9/2012	10:22:01 PM	SiCl4 post valve closed
7/9/2012	10:22:01 PM	Main Vac valve closed
7/9/2012	10:22:01 PM	Bypass valve closed
7/9/2012	10:22:01 PM	Bubbler valve closed
7/9/2012	10:22:01 PM	Helium valve opened
7/9/2012	10:22:01 PM	Helium MFC set to  500.000000
7/9/2012	10:22:01 PM	H2 MFC set to  0.000000
7/9/2012	10:22:01 PM	BCl3 MFC set to  0.000000
7/9/2012	10:22:01 PM	PH3 MFC set to  0.000000
7/9/2012	10:22:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:22:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:22:01 PM	Tube furnace set to 0
7/9/2012	10:22:04 PM	Helium valve closed
7/9/2012	10:22:04 PM	H2 valve closed
7/9/2012	10:22:04 PM	BCl3 valve closed
7/9/2012	10:22:04 PM	PH3 valve closed
7/9/2012	10:22:04 PM	SiCl4 pre valve closed
7/9/2012	10:22:04 PM	SiCl4 post valve closed
7/9/2012	10:22:04 PM	Main Vac valve closed
7/9/2012	10:22:04 PM	Bypass valve closed
7/9/2012	10:22:04 PM	Bubbler valve closed
7/9/2012	10:22:04 PM	Helium MFC set to  0.000000
7/9/2012	10:22:04 PM	H2 MFC set to  0.000000
7/9/2012	10:22:04 PM	BCl3 MFC set to  0.000000
7/9/2012	10:22:04 PM	PH3 MFC set to  0.000000
7/9/2012	10:22:04 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:22:04 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:22:04 PM	Tube furnace set to 0
7/9/2012	10:22:05 PM	Run finished at 10:22 PM
7/9/2012	10:22:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	10:28:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	10:28:53 PM	Recipe started at 10:28 PM
7/9/2012	10:28:53 PM	Helium valve closed
7/9/2012	10:28:53 PM	H2 valve closed
7/9/2012	10:28:53 PM	BCl3 valve closed
7/9/2012	10:28:53 PM	PH3 valve closed
7/9/2012	10:28:53 PM	SiCl4 pre valve closed
7/9/2012	10:28:53 PM	SiCl4 post valve closed
7/9/2012	10:28:53 PM	Main Vac valve closed
7/9/2012	10:28:53 PM	Bubbler valve closed
7/9/2012	10:28:53 PM	Bypass valve opened
7/9/2012	10:28:53 PM	Helium MFC set to  0.000000
7/9/2012	10:28:53 PM	H2 MFC set to  0.000000
7/9/2012	10:28:53 PM	BCl3 MFC set to  0.000000
7/9/2012	10:28:53 PM	PH3 MFC set to  0.000000
7/9/2012	10:28:53 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:28:53 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:28:53 PM	Tube furnace set to 0
7/9/2012	10:30:01 PM	Helium valve closed
7/9/2012	10:30:01 PM	H2 valve closed
7/9/2012	10:30:01 PM	BCl3 valve closed
7/9/2012	10:30:01 PM	PH3 valve closed
7/9/2012	10:30:01 PM	SiCl4 pre valve closed
7/9/2012	10:30:01 PM	SiCl4 post valve closed
7/9/2012	10:30:01 PM	Main Vac valve closed
7/9/2012	10:30:01 PM	Bubbler valve closed
7/9/2012	10:30:01 PM	Bypass valve opened
7/9/2012	10:30:01 PM	Helium MFC set to  0.000000
7/9/2012	10:30:01 PM	H2 MFC set to  0.000000
7/9/2012	10:30:01 PM	BCl3 MFC set to  0.000000
7/9/2012	10:30:01 PM	PH3 MFC set to  0.000000
7/9/2012	10:30:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:30:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:30:02 PM	Tube furnace set to 0
7/9/2012	10:31:02 PM	Helium valve closed
7/9/2012	10:31:02 PM	H2 valve closed
7/9/2012	10:31:02 PM	BCl3 valve closed
7/9/2012	10:31:02 PM	PH3 valve closed
7/9/2012	10:31:02 PM	SiCl4 pre valve closed
7/9/2012	10:31:02 PM	SiCl4 post valve closed
7/9/2012	10:31:02 PM	Bypass valve closed
7/9/2012	10:31:02 PM	Bubbler valve closed
7/9/2012	10:31:02 PM	Main Vac valve opened
7/9/2012	10:31:02 PM	Helium MFC set to  0.000000
7/9/2012	10:31:02 PM	H2 MFC set to  0.000000
7/9/2012	10:31:02 PM	BCl3 MFC set to  0.000000
7/9/2012	10:31:02 PM	PH3 MFC set to  0.000000
7/9/2012	10:31:02 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:31:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:31:02 PM	Tube furnace set to 0
7/9/2012	10:31:03 PM	Run finished at 10:31 PM
7/9/2012	10:31:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	10:37:58 PM	Recipe started at 10:37 PM
7/9/2012	10:37:58 PM	Helium valve closed
7/9/2012	10:37:58 PM	H2 valve closed
7/9/2012	10:37:58 PM	BCl3 valve closed
7/9/2012	10:37:58 PM	PH3 valve closed
7/9/2012	10:37:58 PM	SiCl4 pre valve closed
7/9/2012	10:37:58 PM	SiCl4 post valve closed
7/9/2012	10:37:58 PM	Bypass valve closed
7/9/2012	10:37:58 PM	Bubbler valve closed
7/9/2012	10:37:58 PM	Main Vac valve opened
7/9/2012	10:37:58 PM	Helium MFC set to  0.000000
7/9/2012	10:37:58 PM	H2 MFC set to  0.000000
7/9/2012	10:37:58 PM	BCl3 MFC set to  0.000000
7/9/2012	10:37:58 PM	PH3 MFC set to  0.000000
7/9/2012	10:37:58 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:37:58 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:37:59 PM	Tube furnace set to 150
7/9/2012	10:38:29 PM	H2 valve closed
7/9/2012	10:38:29 PM	BCl3 valve closed
7/9/2012	10:38:29 PM	PH3 valve closed
7/9/2012	10:38:29 PM	SiCl4 pre valve closed
7/9/2012	10:38:29 PM	SiCl4 post valve closed
7/9/2012	10:38:29 PM	Bypass valve closed
7/9/2012	10:38:29 PM	Bubbler valve closed
7/9/2012	10:38:29 PM	Helium valve opened
7/9/2012	10:38:29 PM	Main Vac valve opened
7/9/2012	10:38:29 PM	Helium MFC set to  20.000000
7/9/2012	10:38:29 PM	H2 MFC set to  0.000000
7/9/2012	10:38:29 PM	BCl3 MFC set to  0.000000
7/9/2012	10:38:29 PM	PH3 MFC set to  0.000000
7/9/2012	10:38:29 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:38:29 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:38:29 PM	Tube furnace set to 150
7/9/2012	10:38:59 PM	Helium valve closed
7/9/2012	10:38:59 PM	H2 valve closed
7/9/2012	10:38:59 PM	BCl3 valve closed
7/9/2012	10:38:59 PM	PH3 valve closed
7/9/2012	10:38:59 PM	SiCl4 pre valve closed
7/9/2012	10:38:59 PM	SiCl4 post valve closed
7/9/2012	10:38:59 PM	Bypass valve closed
7/9/2012	10:38:59 PM	Bubbler valve closed
7/9/2012	10:38:59 PM	Main Vac valve opened
7/9/2012	10:38:59 PM	Helium MFC set to  0.000000
7/9/2012	10:38:59 PM	H2 MFC set to  0.000000
7/9/2012	10:38:59 PM	BCl3 MFC set to  0.000000
7/9/2012	10:38:59 PM	PH3 MFC set to  0.000000
7/9/2012	10:38:59 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:38:59 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:38:59 PM	Tube furnace set to 150
7/9/2012	10:39:29 PM	H2 valve closed
7/9/2012	10:39:29 PM	BCl3 valve closed
7/9/2012	10:39:29 PM	PH3 valve closed
7/9/2012	10:39:29 PM	SiCl4 pre valve closed
7/9/2012	10:39:29 PM	SiCl4 post valve closed
7/9/2012	10:39:29 PM	Bypass valve closed
7/9/2012	10:39:29 PM	Bubbler valve closed
7/9/2012	10:39:29 PM	Helium valve opened
7/9/2012	10:39:29 PM	Main Vac valve opened
7/9/2012	10:39:29 PM	Helium MFC set to  20.000000
7/9/2012	10:39:29 PM	H2 MFC set to  0.000000
7/9/2012	10:39:29 PM	BCl3 MFC set to  0.000000
7/9/2012	10:39:29 PM	PH3 MFC set to  0.000000
7/9/2012	10:39:29 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:39:29 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:39:29 PM	Tube furnace set to 150
7/9/2012	10:39:59 PM	Helium valve closed
7/9/2012	10:39:59 PM	H2 valve closed
7/9/2012	10:39:59 PM	BCl3 valve closed
7/9/2012	10:39:59 PM	PH3 valve closed
7/9/2012	10:39:59 PM	SiCl4 pre valve closed
7/9/2012	10:39:59 PM	SiCl4 post valve closed
7/9/2012	10:39:59 PM	Bypass valve closed
7/9/2012	10:39:59 PM	Bubbler valve closed
7/9/2012	10:39:59 PM	Main Vac valve opened
7/9/2012	10:39:59 PM	Helium MFC set to  0.000000
7/9/2012	10:39:59 PM	H2 MFC set to  0.000000
7/9/2012	10:39:59 PM	BCl3 MFC set to  0.000000
7/9/2012	10:39:59 PM	PH3 MFC set to  0.000000
7/9/2012	10:39:59 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:39:59 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:40:00 PM	Tube furnace set to 150
7/9/2012	10:40:30 PM	H2 valve closed
7/9/2012	10:40:30 PM	BCl3 valve closed
7/9/2012	10:40:30 PM	PH3 valve closed
7/9/2012	10:40:30 PM	SiCl4 pre valve closed
7/9/2012	10:40:30 PM	SiCl4 post valve closed
7/9/2012	10:40:30 PM	Bypass valve closed
7/9/2012	10:40:30 PM	Bubbler valve closed
7/9/2012	10:40:30 PM	Helium valve opened
7/9/2012	10:40:30 PM	Main Vac valve opened
7/9/2012	10:40:30 PM	Helium MFC set to  20.000000
7/9/2012	10:40:30 PM	H2 MFC set to  0.000000
7/9/2012	10:40:30 PM	BCl3 MFC set to  0.000000
7/9/2012	10:40:30 PM	PH3 MFC set to  0.000000
7/9/2012	10:40:30 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:40:30 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:40:30 PM	Tube furnace set to 150
7/9/2012	10:41:00 PM	Helium valve closed
7/9/2012	10:41:00 PM	H2 valve closed
7/9/2012	10:41:00 PM	BCl3 valve closed
7/9/2012	10:41:00 PM	PH3 valve closed
7/9/2012	10:41:00 PM	SiCl4 pre valve closed
7/9/2012	10:41:00 PM	SiCl4 post valve closed
7/9/2012	10:41:00 PM	Bypass valve closed
7/9/2012	10:41:00 PM	Bubbler valve closed
7/9/2012	10:41:00 PM	Main Vac valve opened
7/9/2012	10:41:00 PM	Helium MFC set to  0.000000
7/9/2012	10:41:00 PM	H2 MFC set to  0.000000
7/9/2012	10:41:00 PM	BCl3 MFC set to  0.000000
7/9/2012	10:41:00 PM	PH3 MFC set to  0.000000
7/9/2012	10:41:00 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:41:00 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:41:00 PM	Tube furnace set to 150
7/9/2012	10:41:30 PM	H2 valve closed
7/9/2012	10:41:30 PM	BCl3 valve closed
7/9/2012	10:41:30 PM	PH3 valve closed
7/9/2012	10:41:30 PM	SiCl4 pre valve closed
7/9/2012	10:41:30 PM	SiCl4 post valve closed
7/9/2012	10:41:30 PM	Bypass valve closed
7/9/2012	10:41:30 PM	Bubbler valve closed
7/9/2012	10:41:30 PM	Helium valve opened
7/9/2012	10:41:30 PM	Main Vac valve opened
7/9/2012	10:41:30 PM	Helium MFC set to  20.000000
7/9/2012	10:41:30 PM	H2 MFC set to  0.000000
7/9/2012	10:41:30 PM	BCl3 MFC set to  0.000000
7/9/2012	10:41:30 PM	PH3 MFC set to  0.000000
7/9/2012	10:41:30 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:41:30 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:41:30 PM	Tube furnace set to 150
7/9/2012	10:42:00 PM	Helium valve closed
7/9/2012	10:42:00 PM	H2 valve closed
7/9/2012	10:42:00 PM	BCl3 valve closed
7/9/2012	10:42:00 PM	PH3 valve closed
7/9/2012	10:42:00 PM	SiCl4 pre valve closed
7/9/2012	10:42:00 PM	SiCl4 post valve closed
7/9/2012	10:42:00 PM	Bypass valve closed
7/9/2012	10:42:00 PM	Bubbler valve closed
7/9/2012	10:42:00 PM	Main Vac valve opened
7/9/2012	10:42:00 PM	Helium MFC set to  0.000000
7/9/2012	10:42:00 PM	H2 MFC set to  0.000000
7/9/2012	10:42:00 PM	BCl3 MFC set to  0.000000
7/9/2012	10:42:00 PM	PH3 MFC set to  0.000000
7/9/2012	10:42:00 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:42:00 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:42:00 PM	Tube furnace set to 150
7/9/2012	10:42:31 PM	H2 valve closed
7/9/2012	10:42:31 PM	BCl3 valve closed
7/9/2012	10:42:31 PM	PH3 valve closed
7/9/2012	10:42:31 PM	SiCl4 pre valve closed
7/9/2012	10:42:31 PM	SiCl4 post valve closed
7/9/2012	10:42:31 PM	Bypass valve closed
7/9/2012	10:42:31 PM	Bubbler valve closed
7/9/2012	10:42:31 PM	Helium valve opened
7/9/2012	10:42:31 PM	Main Vac valve opened
7/9/2012	10:42:31 PM	Helium MFC set to  20.000000
7/9/2012	10:42:31 PM	H2 MFC set to  0.000000
7/9/2012	10:42:31 PM	BCl3 MFC set to  0.000000
7/9/2012	10:42:31 PM	PH3 MFC set to  0.000000
7/9/2012	10:42:31 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:42:31 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:42:31 PM	Tube furnace set to 150
7/9/2012	10:43:01 PM	Helium valve closed
7/9/2012	10:43:01 PM	H2 valve closed
7/9/2012	10:43:01 PM	BCl3 valve closed
7/9/2012	10:43:01 PM	PH3 valve closed
7/9/2012	10:43:01 PM	SiCl4 pre valve closed
7/9/2012	10:43:01 PM	SiCl4 post valve closed
7/9/2012	10:43:01 PM	Bypass valve closed
7/9/2012	10:43:01 PM	Bubbler valve closed
7/9/2012	10:43:01 PM	Main Vac valve opened
7/9/2012	10:43:01 PM	Helium MFC set to  0.000000
7/9/2012	10:43:01 PM	H2 MFC set to  0.000000
7/9/2012	10:43:01 PM	BCl3 MFC set to  0.000000
7/9/2012	10:43:01 PM	PH3 MFC set to  0.000000
7/9/2012	10:43:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:43:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:43:01 PM	Tube furnace set to 150
7/9/2012	10:43:31 PM	H2 valve closed
7/9/2012	10:43:31 PM	BCl3 valve closed
7/9/2012	10:43:31 PM	PH3 valve closed
7/9/2012	10:43:31 PM	SiCl4 pre valve closed
7/9/2012	10:43:31 PM	SiCl4 post valve closed
7/9/2012	10:43:31 PM	Bypass valve closed
7/9/2012	10:43:31 PM	Bubbler valve closed
7/9/2012	10:43:31 PM	Helium valve opened
7/9/2012	10:43:31 PM	Main Vac valve opened
7/9/2012	10:43:31 PM	Helium MFC set to  20.000000
7/9/2012	10:43:31 PM	H2 MFC set to  0.000000
7/9/2012	10:43:31 PM	BCl3 MFC set to  0.000000
7/9/2012	10:43:31 PM	PH3 MFC set to  0.000000
7/9/2012	10:43:31 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:43:31 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:43:31 PM	Tube furnace set to 150
7/9/2012	10:44:01 PM	Helium valve closed
7/9/2012	10:44:01 PM	H2 valve closed
7/9/2012	10:44:01 PM	BCl3 valve closed
7/9/2012	10:44:01 PM	PH3 valve closed
7/9/2012	10:44:01 PM	SiCl4 pre valve closed
7/9/2012	10:44:01 PM	SiCl4 post valve closed
7/9/2012	10:44:01 PM	Bypass valve closed
7/9/2012	10:44:01 PM	Bubbler valve closed
7/9/2012	10:44:01 PM	Main Vac valve opened
7/9/2012	10:44:01 PM	Helium MFC set to  0.000000
7/9/2012	10:44:01 PM	H2 MFC set to  0.000000
7/9/2012	10:44:01 PM	BCl3 MFC set to  0.000000
7/9/2012	10:44:01 PM	PH3 MFC set to  0.000000
7/9/2012	10:44:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:44:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:44:01 PM	Tube furnace set to 150
7/9/2012	10:44:31 PM	H2 valve closed
7/9/2012	10:44:31 PM	BCl3 valve closed
7/9/2012	10:44:31 PM	PH3 valve closed
7/9/2012	10:44:31 PM	SiCl4 pre valve closed
7/9/2012	10:44:31 PM	SiCl4 post valve closed
7/9/2012	10:44:32 PM	Bypass valve closed
7/9/2012	10:44:32 PM	Bubbler valve closed
7/9/2012	10:44:32 PM	Helium valve opened
7/9/2012	10:44:32 PM	Main Vac valve opened
7/9/2012	10:44:32 PM	Helium MFC set to  20.000000
7/9/2012	10:44:32 PM	H2 MFC set to  0.000000
7/9/2012	10:44:32 PM	BCl3 MFC set to  0.000000
7/9/2012	10:44:32 PM	PH3 MFC set to  0.000000
7/9/2012	10:44:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:44:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:44:32 PM	Tube furnace set to 150
7/9/2012	10:45:02 PM	Helium valve closed
7/9/2012	10:45:02 PM	H2 valve closed
7/9/2012	10:45:02 PM	BCl3 valve closed
7/9/2012	10:45:02 PM	PH3 valve closed
7/9/2012	10:45:02 PM	SiCl4 pre valve closed
7/9/2012	10:45:02 PM	SiCl4 post valve closed
7/9/2012	10:45:02 PM	Bypass valve closed
7/9/2012	10:45:02 PM	Bubbler valve closed
7/9/2012	10:45:02 PM	Main Vac valve opened
7/9/2012	10:45:02 PM	Helium MFC set to  0.000000
7/9/2012	10:45:02 PM	H2 MFC set to  0.000000
7/9/2012	10:45:02 PM	BCl3 MFC set to  0.000000
7/9/2012	10:45:02 PM	PH3 MFC set to  0.000000
7/9/2012	10:45:02 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:45:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:45:02 PM	Tube furnace set to 150
7/9/2012	10:45:32 PM	H2 valve closed
7/9/2012	10:45:32 PM	BCl3 valve closed
7/9/2012	10:45:32 PM	PH3 valve closed
7/9/2012	10:45:32 PM	SiCl4 pre valve closed
7/9/2012	10:45:32 PM	SiCl4 post valve closed
7/9/2012	10:45:32 PM	Bypass valve closed
7/9/2012	10:45:32 PM	Bubbler valve closed
7/9/2012	10:45:32 PM	Helium valve opened
7/9/2012	10:45:32 PM	Main Vac valve opened
7/9/2012	10:45:32 PM	Helium MFC set to  20.000000
7/9/2012	10:45:32 PM	H2 MFC set to  0.000000
7/9/2012	10:45:32 PM	BCl3 MFC set to  0.000000
7/9/2012	10:45:32 PM	PH3 MFC set to  0.000000
7/9/2012	10:45:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:45:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:45:32 PM	Tube furnace set to 150
7/9/2012	10:46:02 PM	Helium valve closed
7/9/2012	10:46:02 PM	H2 valve closed
7/9/2012	10:46:02 PM	BCl3 valve closed
7/9/2012	10:46:02 PM	PH3 valve closed
7/9/2012	10:46:02 PM	SiCl4 pre valve closed
7/9/2012	10:46:02 PM	SiCl4 post valve closed
7/9/2012	10:46:02 PM	Bypass valve closed
7/9/2012	10:46:02 PM	Bubbler valve closed
7/9/2012	10:46:02 PM	Main Vac valve opened
7/9/2012	10:46:02 PM	Helium MFC set to  0.000000
7/9/2012	10:46:02 PM	H2 MFC set to  0.000000
7/9/2012	10:46:02 PM	BCl3 MFC set to  0.000000
7/9/2012	10:46:02 PM	PH3 MFC set to  0.000000
7/9/2012	10:46:02 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:46:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:46:02 PM	Tube furnace set to 150
7/9/2012	10:46:32 PM	H2 valve closed
7/9/2012	10:46:32 PM	BCl3 valve closed
7/9/2012	10:46:32 PM	PH3 valve closed
7/9/2012	10:46:32 PM	SiCl4 pre valve closed
7/9/2012	10:46:32 PM	SiCl4 post valve closed
7/9/2012	10:46:32 PM	Bypass valve closed
7/9/2012	10:46:32 PM	Bubbler valve closed
7/9/2012	10:46:32 PM	Helium valve opened
7/9/2012	10:46:32 PM	Main Vac valve opened
7/9/2012	10:46:32 PM	Helium MFC set to  20.000000
7/9/2012	10:46:32 PM	H2 MFC set to  0.000000
7/9/2012	10:46:32 PM	BCl3 MFC set to  0.000000
7/9/2012	10:46:32 PM	PH3 MFC set to  0.000000
7/9/2012	10:46:32 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:46:32 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:46:33 PM	Tube furnace set to 150
7/9/2012	10:47:03 PM	Helium valve closed
7/9/2012	10:47:03 PM	H2 valve closed
7/9/2012	10:47:03 PM	BCl3 valve closed
7/9/2012	10:47:03 PM	PH3 valve closed
7/9/2012	10:47:03 PM	SiCl4 pre valve closed
7/9/2012	10:47:03 PM	SiCl4 post valve closed
7/9/2012	10:47:03 PM	Bypass valve closed
7/9/2012	10:47:03 PM	Bubbler valve closed
7/9/2012	10:47:03 PM	Main Vac valve opened
7/9/2012	10:47:03 PM	Helium MFC set to  0.000000
7/9/2012	10:47:03 PM	H2 MFC set to  0.000000
7/9/2012	10:47:03 PM	BCl3 MFC set to  0.000000
7/9/2012	10:47:03 PM	PH3 MFC set to  0.000000
7/9/2012	10:47:03 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:47:03 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:47:03 PM	Tube furnace set to 150
7/9/2012	10:47:33 PM	H2 valve closed
7/9/2012	10:47:33 PM	BCl3 valve closed
7/9/2012	10:47:33 PM	PH3 valve closed
7/9/2012	10:47:33 PM	SiCl4 pre valve closed
7/9/2012	10:47:33 PM	SiCl4 post valve closed
7/9/2012	10:47:33 PM	Bypass valve closed
7/9/2012	10:47:33 PM	Bubbler valve closed
7/9/2012	10:47:33 PM	Helium valve opened
7/9/2012	10:47:33 PM	Main Vac valve opened
7/9/2012	10:47:33 PM	Helium MFC set to  20.000000
7/9/2012	10:47:33 PM	H2 MFC set to  0.000000
7/9/2012	10:47:33 PM	BCl3 MFC set to  0.000000
7/9/2012	10:47:33 PM	PH3 MFC set to  0.000000
7/9/2012	10:47:33 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:47:33 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:47:33 PM	Tube furnace set to 150
7/9/2012	10:48:03 PM	Helium valve closed
7/9/2012	10:48:03 PM	H2 valve closed
7/9/2012	10:48:03 PM	BCl3 valve closed
7/9/2012	10:48:03 PM	PH3 valve closed
7/9/2012	10:48:03 PM	SiCl4 pre valve closed
7/9/2012	10:48:03 PM	SiCl4 post valve closed
7/9/2012	10:48:03 PM	Bypass valve closed
7/9/2012	10:48:03 PM	Bubbler valve closed
7/9/2012	10:48:03 PM	Main Vac valve opened
7/9/2012	10:48:03 PM	Helium MFC set to  0.000000
7/9/2012	10:48:03 PM	H2 MFC set to  0.000000
7/9/2012	10:48:03 PM	BCl3 MFC set to  0.000000
7/9/2012	10:48:03 PM	PH3 MFC set to  0.000000
7/9/2012	10:48:03 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:48:03 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:48:03 PM	Tube furnace set to 150
7/9/2012	10:48:04 PM	Run finished at 10:48 PM
7/9/2012	10:49:54 PM	Recipe started at 10:49 PM
7/9/2012	10:49:54 PM	Helium valve closed
7/9/2012	10:49:54 PM	H2 valve closed
7/9/2012	10:49:54 PM	BCl3 valve closed
7/9/2012	10:49:54 PM	PH3 valve closed
7/9/2012	10:49:54 PM	SiCl4 pre valve closed
7/9/2012	10:49:54 PM	SiCl4 post valve closed
7/9/2012	10:49:54 PM	Bypass valve closed
7/9/2012	10:49:54 PM	Bubbler valve closed
7/9/2012	10:49:54 PM	Main Vac valve opened
7/9/2012	10:49:54 PM	Helium MFC set to  0.000000
7/9/2012	10:49:54 PM	H2 MFC set to  0.000000
7/9/2012	10:49:54 PM	BCl3 MFC set to  0.000000
7/9/2012	10:49:54 PM	PH3 MFC set to  0.000000
7/9/2012	10:49:54 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:49:54 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:49:54 PM	Tube furnace set to 150
7/9/2012	10:50:24 PM	H2 valve closed
7/9/2012	10:50:24 PM	BCl3 valve closed
7/9/2012	10:50:24 PM	PH3 valve closed
7/9/2012	10:50:24 PM	SiCl4 pre valve closed
7/9/2012	10:50:24 PM	SiCl4 post valve closed
7/9/2012	10:50:24 PM	Bypass valve closed
7/9/2012	10:50:24 PM	Bubbler valve closed
7/9/2012	10:50:24 PM	Helium valve opened
7/9/2012	10:50:24 PM	Main Vac valve opened
7/9/2012	10:50:24 PM	Helium MFC set to  20.000000
7/9/2012	10:50:24 PM	H2 MFC set to  0.000000
7/9/2012	10:50:24 PM	BCl3 MFC set to  0.000000
7/9/2012	10:50:24 PM	PH3 MFC set to  0.000000
7/9/2012	10:50:24 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:50:24 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:50:24 PM	Tube furnace set to 150
7/9/2012	10:50:55 PM	Helium valve closed
7/9/2012	10:50:55 PM	H2 valve closed
7/9/2012	10:50:55 PM	BCl3 valve closed
7/9/2012	10:50:55 PM	PH3 valve closed
7/9/2012	10:50:55 PM	SiCl4 pre valve closed
7/9/2012	10:50:55 PM	SiCl4 post valve closed
7/9/2012	10:50:55 PM	Bypass valve closed
7/9/2012	10:50:55 PM	Bubbler valve closed
7/9/2012	10:50:55 PM	Main Vac valve opened
7/9/2012	10:50:55 PM	Helium MFC set to  0.000000
7/9/2012	10:50:55 PM	H2 MFC set to  0.000000
7/9/2012	10:50:55 PM	BCl3 MFC set to  0.000000
7/9/2012	10:50:55 PM	PH3 MFC set to  0.000000
7/9/2012	10:50:55 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:50:55 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:50:55 PM	Tube furnace set to 150
7/9/2012	10:51:25 PM	H2 valve closed
7/9/2012	10:51:25 PM	BCl3 valve closed
7/9/2012	10:51:25 PM	PH3 valve closed
7/9/2012	10:51:25 PM	SiCl4 pre valve closed
7/9/2012	10:51:25 PM	SiCl4 post valve closed
7/9/2012	10:51:25 PM	Bypass valve closed
7/9/2012	10:51:25 PM	Bubbler valve closed
7/9/2012	10:51:25 PM	Helium valve opened
7/9/2012	10:51:25 PM	Main Vac valve opened
7/9/2012	10:51:25 PM	Helium MFC set to  20.000000
7/9/2012	10:51:25 PM	H2 MFC set to  0.000000
7/9/2012	10:51:25 PM	BCl3 MFC set to  0.000000
7/9/2012	10:51:25 PM	PH3 MFC set to  0.000000
7/9/2012	10:51:25 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:51:25 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:51:25 PM	Tube furnace set to 150
7/9/2012	10:51:55 PM	Helium valve closed
7/9/2012	10:51:55 PM	H2 valve closed
7/9/2012	10:51:55 PM	BCl3 valve closed
7/9/2012	10:51:55 PM	PH3 valve closed
7/9/2012	10:51:55 PM	SiCl4 pre valve closed
7/9/2012	10:51:55 PM	SiCl4 post valve closed
7/9/2012	10:51:55 PM	Bypass valve closed
7/9/2012	10:51:55 PM	Bubbler valve closed
7/9/2012	10:51:55 PM	Main Vac valve opened
7/9/2012	10:51:55 PM	Helium MFC set to  0.000000
7/9/2012	10:51:55 PM	H2 MFC set to  0.000000
7/9/2012	10:51:55 PM	BCl3 MFC set to  0.000000
7/9/2012	10:51:55 PM	PH3 MFC set to  0.000000
7/9/2012	10:51:55 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:51:55 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:51:55 PM	Tube furnace set to 150
7/9/2012	10:52:25 PM	H2 valve closed
7/9/2012	10:52:25 PM	BCl3 valve closed
7/9/2012	10:52:25 PM	PH3 valve closed
7/9/2012	10:52:25 PM	SiCl4 pre valve closed
7/9/2012	10:52:25 PM	SiCl4 post valve closed
7/9/2012	10:52:25 PM	Bypass valve closed
7/9/2012	10:52:25 PM	Bubbler valve closed
7/9/2012	10:52:25 PM	Helium valve opened
7/9/2012	10:52:25 PM	Main Vac valve opened
7/9/2012	10:52:25 PM	Helium MFC set to  20.000000
7/9/2012	10:52:25 PM	H2 MFC set to  0.000000
7/9/2012	10:52:25 PM	BCl3 MFC set to  0.000000
7/9/2012	10:52:25 PM	PH3 MFC set to  0.000000
7/9/2012	10:52:25 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:52:25 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:52:25 PM	Tube furnace set to 150
7/9/2012	10:52:55 PM	Helium valve closed
7/9/2012	10:52:55 PM	H2 valve closed
7/9/2012	10:52:55 PM	BCl3 valve closed
7/9/2012	10:52:55 PM	PH3 valve closed
7/9/2012	10:52:55 PM	SiCl4 pre valve closed
7/9/2012	10:52:55 PM	SiCl4 post valve closed
7/9/2012	10:52:55 PM	Bypass valve closed
7/9/2012	10:52:55 PM	Bubbler valve closed
7/9/2012	10:52:55 PM	Main Vac valve opened
7/9/2012	10:52:55 PM	Helium MFC set to  0.000000
7/9/2012	10:52:56 PM	H2 MFC set to  0.000000
7/9/2012	10:52:56 PM	BCl3 MFC set to  0.000000
7/9/2012	10:52:56 PM	PH3 MFC set to  0.000000
7/9/2012	10:52:56 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:52:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:52:56 PM	Tube furnace set to 150
7/9/2012	10:53:26 PM	H2 valve closed
7/9/2012	10:53:26 PM	BCl3 valve closed
7/9/2012	10:53:26 PM	PH3 valve closed
7/9/2012	10:53:26 PM	SiCl4 pre valve closed
7/9/2012	10:53:26 PM	SiCl4 post valve closed
7/9/2012	10:53:26 PM	Bypass valve closed
7/9/2012	10:53:26 PM	Bubbler valve closed
7/9/2012	10:53:26 PM	Helium valve opened
7/9/2012	10:53:26 PM	Main Vac valve opened
7/9/2012	10:53:26 PM	Helium MFC set to  20.000000
7/9/2012	10:53:26 PM	H2 MFC set to  0.000000
7/9/2012	10:53:26 PM	BCl3 MFC set to  0.000000
7/9/2012	10:53:26 PM	PH3 MFC set to  0.000000
7/9/2012	10:53:26 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:53:26 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:53:26 PM	Tube furnace set to 150
7/9/2012	10:53:56 PM	Helium valve closed
7/9/2012	10:53:56 PM	H2 valve closed
7/9/2012	10:53:56 PM	BCl3 valve closed
7/9/2012	10:53:56 PM	PH3 valve closed
7/9/2012	10:53:56 PM	SiCl4 pre valve closed
7/9/2012	10:53:56 PM	SiCl4 post valve closed
7/9/2012	10:53:56 PM	Bypass valve closed
7/9/2012	10:53:56 PM	Bubbler valve closed
7/9/2012	10:53:56 PM	Main Vac valve opened
7/9/2012	10:53:56 PM	Helium MFC set to  0.000000
7/9/2012	10:53:56 PM	H2 MFC set to  0.000000
7/9/2012	10:53:56 PM	BCl3 MFC set to  0.000000
7/9/2012	10:53:56 PM	PH3 MFC set to  0.000000
7/9/2012	10:53:56 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:53:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:53:56 PM	Tube furnace set to 150
7/9/2012	10:54:26 PM	H2 valve closed
7/9/2012	10:54:26 PM	BCl3 valve closed
7/9/2012	10:54:26 PM	PH3 valve closed
7/9/2012	10:54:26 PM	SiCl4 pre valve closed
7/9/2012	10:54:26 PM	SiCl4 post valve closed
7/9/2012	10:54:26 PM	Bypass valve closed
7/9/2012	10:54:26 PM	Bubbler valve closed
7/9/2012	10:54:26 PM	Helium valve opened
7/9/2012	10:54:26 PM	Main Vac valve opened
7/9/2012	10:54:26 PM	Helium MFC set to  20.000000
7/9/2012	10:54:26 PM	H2 MFC set to  0.000000
7/9/2012	10:54:26 PM	BCl3 MFC set to  0.000000
7/9/2012	10:54:26 PM	PH3 MFC set to  0.000000
7/9/2012	10:54:26 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:54:26 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:54:26 PM	Tube furnace set to 150
7/9/2012	10:54:56 PM	Helium valve closed
7/9/2012	10:54:56 PM	H2 valve closed
7/9/2012	10:54:56 PM	BCl3 valve closed
7/9/2012	10:54:56 PM	PH3 valve closed
7/9/2012	10:54:56 PM	SiCl4 pre valve closed
7/9/2012	10:54:56 PM	SiCl4 post valve closed
7/9/2012	10:54:56 PM	Bypass valve closed
7/9/2012	10:54:56 PM	Bubbler valve closed
7/9/2012	10:54:56 PM	Main Vac valve opened
7/9/2012	10:54:56 PM	Helium MFC set to  0.000000
7/9/2012	10:54:56 PM	H2 MFC set to  0.000000
7/9/2012	10:54:56 PM	BCl3 MFC set to  0.000000
7/9/2012	10:54:56 PM	PH3 MFC set to  0.000000
7/9/2012	10:54:56 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:54:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:54:57 PM	Tube furnace set to 150
7/9/2012	10:55:27 PM	H2 valve closed
7/9/2012	10:55:27 PM	BCl3 valve closed
7/9/2012	10:55:27 PM	PH3 valve closed
7/9/2012	10:55:27 PM	SiCl4 pre valve closed
7/9/2012	10:55:27 PM	SiCl4 post valve closed
7/9/2012	10:55:27 PM	Bypass valve closed
7/9/2012	10:55:27 PM	Bubbler valve closed
7/9/2012	10:55:27 PM	Helium valve opened
7/9/2012	10:55:27 PM	Main Vac valve opened
7/9/2012	10:55:27 PM	Helium MFC set to  20.000000
7/9/2012	10:55:27 PM	H2 MFC set to  0.000000
7/9/2012	10:55:27 PM	BCl3 MFC set to  0.000000
7/9/2012	10:55:27 PM	PH3 MFC set to  0.000000
7/9/2012	10:55:27 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:55:27 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:55:27 PM	Tube furnace set to 150
7/9/2012	10:55:57 PM	Helium valve closed
7/9/2012	10:55:57 PM	H2 valve closed
7/9/2012	10:55:57 PM	BCl3 valve closed
7/9/2012	10:55:57 PM	PH3 valve closed
7/9/2012	10:55:57 PM	SiCl4 pre valve closed
7/9/2012	10:55:57 PM	SiCl4 post valve closed
7/9/2012	10:55:57 PM	Bypass valve closed
7/9/2012	10:55:57 PM	Bubbler valve closed
7/9/2012	10:55:57 PM	Main Vac valve opened
7/9/2012	10:55:57 PM	Helium MFC set to  0.000000
7/9/2012	10:55:57 PM	H2 MFC set to  0.000000
7/9/2012	10:55:57 PM	BCl3 MFC set to  0.000000
7/9/2012	10:55:57 PM	PH3 MFC set to  0.000000
7/9/2012	10:55:57 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:55:57 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:55:57 PM	Tube furnace set to 150
7/9/2012	10:56:27 PM	H2 valve closed
7/9/2012	10:56:27 PM	BCl3 valve closed
7/9/2012	10:56:27 PM	PH3 valve closed
7/9/2012	10:56:27 PM	SiCl4 pre valve closed
7/9/2012	10:56:27 PM	SiCl4 post valve closed
7/9/2012	10:56:27 PM	Bypass valve closed
7/9/2012	10:56:27 PM	Bubbler valve closed
7/9/2012	10:56:27 PM	Helium valve opened
7/9/2012	10:56:27 PM	Main Vac valve opened
7/9/2012	10:56:27 PM	Helium MFC set to  20.000000
7/9/2012	10:56:27 PM	H2 MFC set to  0.000000
7/9/2012	10:56:27 PM	BCl3 MFC set to  0.000000
7/9/2012	10:56:27 PM	PH3 MFC set to  0.000000
7/9/2012	10:56:27 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:56:27 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:56:27 PM	Tube furnace set to 150
7/9/2012	10:56:57 PM	Helium valve closed
7/9/2012	10:56:57 PM	H2 valve closed
7/9/2012	10:56:57 PM	BCl3 valve closed
7/9/2012	10:56:57 PM	PH3 valve closed
7/9/2012	10:56:57 PM	SiCl4 pre valve closed
7/9/2012	10:56:57 PM	SiCl4 post valve closed
7/9/2012	10:56:57 PM	Bypass valve closed
7/9/2012	10:56:57 PM	Bubbler valve closed
7/9/2012	10:56:57 PM	Main Vac valve opened
7/9/2012	10:56:57 PM	Helium MFC set to  0.000000
7/9/2012	10:56:57 PM	H2 MFC set to  0.000000
7/9/2012	10:56:57 PM	BCl3 MFC set to  0.000000
7/9/2012	10:56:57 PM	PH3 MFC set to  0.000000
7/9/2012	10:56:57 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:56:57 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:56:58 PM	Tube furnace set to 150
7/9/2012	10:57:28 PM	H2 valve closed
7/9/2012	10:57:28 PM	BCl3 valve closed
7/9/2012	10:57:28 PM	PH3 valve closed
7/9/2012	10:57:28 PM	SiCl4 pre valve closed
7/9/2012	10:57:28 PM	SiCl4 post valve closed
7/9/2012	10:57:28 PM	Bypass valve closed
7/9/2012	10:57:28 PM	Bubbler valve closed
7/9/2012	10:57:28 PM	Helium valve opened
7/9/2012	10:57:28 PM	Main Vac valve opened
7/9/2012	10:57:28 PM	Helium MFC set to  20.000000
7/9/2012	10:57:28 PM	H2 MFC set to  0.000000
7/9/2012	10:57:28 PM	BCl3 MFC set to  0.000000
7/9/2012	10:57:28 PM	PH3 MFC set to  0.000000
7/9/2012	10:57:28 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:57:28 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:57:28 PM	Tube furnace set to 150
7/9/2012	10:57:58 PM	Helium valve closed
7/9/2012	10:57:58 PM	H2 valve closed
7/9/2012	10:57:58 PM	BCl3 valve closed
7/9/2012	10:57:58 PM	PH3 valve closed
7/9/2012	10:57:58 PM	SiCl4 pre valve closed
7/9/2012	10:57:58 PM	SiCl4 post valve closed
7/9/2012	10:57:58 PM	Bypass valve closed
7/9/2012	10:57:58 PM	Bubbler valve closed
7/9/2012	10:57:58 PM	Main Vac valve opened
7/9/2012	10:57:58 PM	Helium MFC set to  0.000000
7/9/2012	10:57:58 PM	H2 MFC set to  0.000000
7/9/2012	10:57:58 PM	BCl3 MFC set to  0.000000
7/9/2012	10:57:58 PM	PH3 MFC set to  0.000000
7/9/2012	10:57:58 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:57:58 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:57:58 PM	Tube furnace set to 150
7/9/2012	10:58:28 PM	H2 valve closed
7/9/2012	10:58:28 PM	BCl3 valve closed
7/9/2012	10:58:28 PM	PH3 valve closed
7/9/2012	10:58:28 PM	SiCl4 pre valve closed
7/9/2012	10:58:28 PM	SiCl4 post valve closed
7/9/2012	10:58:28 PM	Bypass valve closed
7/9/2012	10:58:28 PM	Bubbler valve closed
7/9/2012	10:58:28 PM	Helium valve opened
7/9/2012	10:58:28 PM	Main Vac valve opened
7/9/2012	10:58:28 PM	Helium MFC set to  20.000000
7/9/2012	10:58:28 PM	H2 MFC set to  0.000000
7/9/2012	10:58:28 PM	BCl3 MFC set to  0.000000
7/9/2012	10:58:28 PM	PH3 MFC set to  0.000000
7/9/2012	10:58:28 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:58:28 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:58:28 PM	Tube furnace set to 150
7/9/2012	10:58:58 PM	Helium valve closed
7/9/2012	10:58:58 PM	H2 valve closed
7/9/2012	10:58:58 PM	BCl3 valve closed
7/9/2012	10:58:58 PM	PH3 valve closed
7/9/2012	10:58:58 PM	SiCl4 pre valve closed
7/9/2012	10:58:58 PM	SiCl4 post valve closed
7/9/2012	10:58:58 PM	Bypass valve closed
7/9/2012	10:58:58 PM	Bubbler valve closed
7/9/2012	10:58:58 PM	Main Vac valve opened
7/9/2012	10:58:58 PM	Helium MFC set to  0.000000
7/9/2012	10:58:58 PM	H2 MFC set to  0.000000
7/9/2012	10:58:58 PM	BCl3 MFC set to  0.000000
7/9/2012	10:58:58 PM	PH3 MFC set to  0.000000
7/9/2012	10:58:58 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:58:58 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:58:59 PM	Tube furnace set to 150
7/9/2012	10:59:29 PM	H2 valve closed
7/9/2012	10:59:29 PM	BCl3 valve closed
7/9/2012	10:59:29 PM	PH3 valve closed
7/9/2012	10:59:29 PM	SiCl4 pre valve closed
7/9/2012	10:59:29 PM	SiCl4 post valve closed
7/9/2012	10:59:29 PM	Bypass valve closed
7/9/2012	10:59:29 PM	Bubbler valve closed
7/9/2012	10:59:29 PM	Helium valve opened
7/9/2012	10:59:29 PM	Main Vac valve opened
7/9/2012	10:59:29 PM	Helium MFC set to  20.000000
7/9/2012	10:59:29 PM	H2 MFC set to  0.000000
7/9/2012	10:59:29 PM	BCl3 MFC set to  0.000000
7/9/2012	10:59:29 PM	PH3 MFC set to  0.000000
7/9/2012	10:59:29 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:59:29 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:59:29 PM	Tube furnace set to 150
7/9/2012	10:59:59 PM	Helium valve closed
7/9/2012	10:59:59 PM	H2 valve closed
7/9/2012	10:59:59 PM	BCl3 valve closed
7/9/2012	10:59:59 PM	PH3 valve closed
7/9/2012	10:59:59 PM	SiCl4 pre valve closed
7/9/2012	10:59:59 PM	SiCl4 post valve closed
7/9/2012	10:59:59 PM	Bypass valve closed
7/9/2012	10:59:59 PM	Bubbler valve closed
7/9/2012	10:59:59 PM	Main Vac valve opened
7/9/2012	10:59:59 PM	Helium MFC set to  0.000000
7/9/2012	10:59:59 PM	H2 MFC set to  0.000000
7/9/2012	10:59:59 PM	BCl3 MFC set to  0.000000
7/9/2012	10:59:59 PM	PH3 MFC set to  0.000000
7/9/2012	10:59:59 PM	SiCl4 MFC set to  0.000000
7/9/2012	10:59:59 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	10:59:59 PM	Tube furnace set to 150
7/9/2012	11:00:00 PM	Run finished at 11:00 PM
7/9/2012	11:00:29 PM	Recipe started at 11:00 PM
7/9/2012	11:00:29 PM	Helium valve closed
7/9/2012	11:00:29 PM	H2 valve closed
7/9/2012	11:00:29 PM	BCl3 valve closed
7/9/2012	11:00:29 PM	PH3 valve closed
7/9/2012	11:00:29 PM	SiCl4 pre valve closed
7/9/2012	11:00:29 PM	SiCl4 post valve closed
7/9/2012	11:00:29 PM	Bypass valve closed
7/9/2012	11:00:29 PM	Bubbler valve closed
7/9/2012	11:00:29 PM	Main Vac valve opened
7/9/2012	11:00:29 PM	Helium MFC set to  0.000000
7/9/2012	11:00:29 PM	H2 MFC set to  0.000000
7/9/2012	11:00:29 PM	BCl3 MFC set to  0.000000
7/9/2012	11:00:29 PM	PH3 MFC set to  0.000000
7/9/2012	11:00:29 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:00:29 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:00:29 PM	Tube furnace set to 150
7/9/2012	11:00:59 PM	H2 valve closed
7/9/2012	11:00:59 PM	BCl3 valve closed
7/9/2012	11:00:59 PM	PH3 valve closed
7/9/2012	11:00:59 PM	SiCl4 pre valve closed
7/9/2012	11:00:59 PM	SiCl4 post valve closed
7/9/2012	11:00:59 PM	Bypass valve closed
7/9/2012	11:00:59 PM	Bubbler valve closed
7/9/2012	11:00:59 PM	Helium valve opened
7/9/2012	11:00:59 PM	Main Vac valve opened
7/9/2012	11:00:59 PM	Helium MFC set to  20.000000
7/9/2012	11:00:59 PM	H2 MFC set to  0.000000
7/9/2012	11:00:59 PM	BCl3 MFC set to  0.000000
7/9/2012	11:00:59 PM	PH3 MFC set to  0.000000
7/9/2012	11:00:59 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:00:59 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:00:59 PM	Tube furnace set to 150
7/9/2012	11:01:29 PM	Helium valve closed
7/9/2012	11:01:29 PM	H2 valve closed
7/9/2012	11:01:29 PM	BCl3 valve closed
7/9/2012	11:01:29 PM	PH3 valve closed
7/9/2012	11:01:29 PM	SiCl4 pre valve closed
7/9/2012	11:01:29 PM	SiCl4 post valve closed
7/9/2012	11:01:29 PM	Bypass valve closed
7/9/2012	11:01:29 PM	Bubbler valve closed
7/9/2012	11:01:29 PM	Main Vac valve opened
7/9/2012	11:01:29 PM	Helium MFC set to  0.000000
7/9/2012	11:01:29 PM	H2 MFC set to  0.000000
7/9/2012	11:01:29 PM	BCl3 MFC set to  0.000000
7/9/2012	11:01:29 PM	PH3 MFC set to  0.000000
7/9/2012	11:01:29 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:01:29 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:01:29 PM	Tube furnace set to 150
7/9/2012	11:01:59 PM	H2 valve closed
7/9/2012	11:01:59 PM	BCl3 valve closed
7/9/2012	11:01:59 PM	PH3 valve closed
7/9/2012	11:01:59 PM	SiCl4 pre valve closed
7/9/2012	11:01:59 PM	SiCl4 post valve closed
7/9/2012	11:01:59 PM	Bypass valve closed
7/9/2012	11:01:59 PM	Bubbler valve closed
7/9/2012	11:01:59 PM	Helium valve opened
7/9/2012	11:01:59 PM	Main Vac valve opened
7/9/2012	11:01:59 PM	Helium MFC set to  20.000000
7/9/2012	11:01:59 PM	H2 MFC set to  0.000000
7/9/2012	11:01:59 PM	BCl3 MFC set to  0.000000
7/9/2012	11:01:59 PM	PH3 MFC set to  0.000000
7/9/2012	11:01:59 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:01:59 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:02:00 PM	Tube furnace set to 150
7/9/2012	11:02:30 PM	Helium valve closed
7/9/2012	11:02:30 PM	H2 valve closed
7/9/2012	11:02:30 PM	BCl3 valve closed
7/9/2012	11:02:30 PM	PH3 valve closed
7/9/2012	11:02:30 PM	SiCl4 pre valve closed
7/9/2012	11:02:30 PM	SiCl4 post valve closed
7/9/2012	11:02:30 PM	Bypass valve closed
7/9/2012	11:02:30 PM	Bubbler valve closed
7/9/2012	11:02:30 PM	Main Vac valve opened
7/9/2012	11:02:30 PM	Helium MFC set to  0.000000
7/9/2012	11:02:30 PM	H2 MFC set to  0.000000
7/9/2012	11:02:30 PM	BCl3 MFC set to  0.000000
7/9/2012	11:02:30 PM	PH3 MFC set to  0.000000
7/9/2012	11:02:30 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:02:30 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:02:30 PM	Tube furnace set to 150
7/9/2012	11:02:58 PM	Run aborted at 11:02 PM
7/9/2012	11:02:58 PM	Helium valve closed
7/9/2012	11:02:58 PM	H2 valve closed
7/9/2012	11:02:58 PM	BCl3 valve closed
7/9/2012	11:02:58 PM	PH3 valve closed
7/9/2012	11:02:58 PM	SiCl4 pre valve closed
7/9/2012	11:02:58 PM	SiCl4 post valve closed
7/9/2012	11:02:58 PM	Bypass valve closed
7/9/2012	11:02:58 PM	Main Vac valve closed
7/9/2012	11:02:58 PM	Bubbler valve closed
7/9/2012	11:02:58 PM	Helium MFC set to  0.000000
7/9/2012	11:02:58 PM	H2 MFC set to  0.000000
7/9/2012	11:02:58 PM	BCl3 MFC set to  0.000000
7/9/2012	11:02:58 PM	PH3 MFC set to  0.000000
7/9/2012	11:02:58 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:02:59 PM	Tube furnace set to 0
7/9/2012	11:03:00 PM	Main Vac valve opened
7/9/2012	11:03:07 PM	Helium MFC set to  20.000000
7/9/2012	11:03:08 PM	Helium valve opened
7/9/2012	11:03:46 PM	Helium valve closed
7/9/2012	11:04:41 PM	Helium valve opened
7/9/2012	11:05:11 PM	Helium valve closed
7/9/2012	11:05:40 PM	Helium valve opened
7/9/2012	11:06:33 PM	Helium valve closed
7/9/2012	11:06:36 PM	Helium MFC set to  0.000000
7/9/2012	11:07:01 PM	Recipe started at 11:06 PM
7/9/2012	11:07:01 PM	Helium valve closed
7/9/2012	11:07:01 PM	H2 valve closed
7/9/2012	11:07:01 PM	BCl3 valve closed
7/9/2012	11:07:01 PM	PH3 valve closed
7/9/2012	11:07:01 PM	SiCl4 pre valve closed
7/9/2012	11:07:01 PM	SiCl4 post valve closed
7/9/2012	11:07:01 PM	Main Vac valve closed
7/9/2012	11:07:01 PM	Bypass valve closed
7/9/2012	11:07:01 PM	Bubbler valve closed
7/9/2012	11:07:01 PM	Helium MFC set to  0.000000
7/9/2012	11:07:01 PM	H2 MFC set to  0.000000
7/9/2012	11:07:01 PM	BCl3 MFC set to  0.000000
7/9/2012	11:07:01 PM	PH3 MFC set to  0.000000
7/9/2012	11:07:01 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:07:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:07:01 PM	Tube furnace set to 0
7/9/2012	11:07:04 PM	Helium valve closed
7/9/2012	11:07:04 PM	BCl3 valve closed
7/9/2012	11:07:04 PM	PH3 valve closed
7/9/2012	11:07:04 PM	SiCl4 pre valve closed
7/9/2012	11:07:04 PM	SiCl4 post valve closed
7/9/2012	11:07:04 PM	Main Vac valve closed
7/9/2012	11:07:04 PM	Bypass valve closed
7/9/2012	11:07:04 PM	Bubbler valve closed
7/9/2012	11:07:04 PM	H2 valve opened
7/9/2012	11:07:04 PM	Helium MFC set to  0.000000
7/9/2012	11:07:04 PM	H2 MFC set to  500.000000
7/9/2012	11:07:04 PM	BCl3 MFC set to  0.000000
7/9/2012	11:07:04 PM	PH3 MFC set to  0.000000
7/9/2012	11:07:04 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:07:04 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:07:04 PM	Tube furnace set to 0
7/9/2012	11:08:16 PM	Helium valve closed
7/9/2012	11:08:16 PM	BCl3 valve closed
7/9/2012	11:08:16 PM	PH3 valve closed
7/9/2012	11:08:16 PM	SiCl4 pre valve closed
7/9/2012	11:08:16 PM	SiCl4 post valve closed
7/9/2012	11:08:16 PM	Main Vac valve closed
7/9/2012	11:08:16 PM	Bypass valve closed
7/9/2012	11:08:16 PM	H2 valve opened
7/9/2012	11:08:16 PM	Bubbler valve opened
7/9/2012	11:08:16 PM	Helium MFC set to  0.000000
7/9/2012	11:08:16 PM	H2 MFC set to  500.000000
7/9/2012	11:08:16 PM	BCl3 MFC set to  0.000000
7/9/2012	11:08:16 PM	PH3 MFC set to  0.000000
7/9/2012	11:08:16 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:08:16 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:08:16 PM	Tube furnace set to 0
7/9/2012	11:08:17 PM	Helium valve closed
7/9/2012	11:08:17 PM	BCl3 valve closed
7/9/2012	11:08:17 PM	PH3 valve closed
7/9/2012	11:08:17 PM	SiCl4 pre valve closed
7/9/2012	11:08:17 PM	SiCl4 post valve closed
7/9/2012	11:08:17 PM	Main Vac valve closed
7/9/2012	11:08:17 PM	Bypass valve closed
7/9/2012	11:08:17 PM	H2 valve opened
7/9/2012	11:08:17 PM	Bubbler valve opened
7/9/2012	11:08:17 PM	Helium MFC set to  0.000000
7/9/2012	11:08:17 PM	H2 MFC set to  500.000000
7/9/2012	11:08:17 PM	BCl3 MFC set to  0.000000
7/9/2012	11:08:17 PM	PH3 MFC set to  0.000000
7/9/2012	11:08:17 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:08:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:08:17 PM	Tube furnace set to 1000
7/9/2012	11:28:17 PM	Helium valve closed
7/9/2012	11:28:17 PM	PH3 valve closed
7/9/2012	11:28:17 PM	Main Vac valve closed
7/9/2012	11:28:17 PM	Bypass valve closed
7/9/2012	11:28:17 PM	H2 valve opened
7/9/2012	11:28:17 PM	BCl3 valve opened
7/9/2012	11:28:17 PM	SiCl4 pre valve opened
7/9/2012	11:28:17 PM	SiCl4 post valve opened
7/9/2012	11:28:17 PM	Bubbler valve opened
7/9/2012	11:28:17 PM	Helium MFC set to  0.000000
7/9/2012	11:28:17 PM	H2 MFC set to  500.000000
7/9/2012	11:28:17 PM	BCl3 MFC set to  1.000000
7/9/2012	11:28:17 PM	PH3 MFC set to  0.000000
7/9/2012	11:28:17 PM	SiCl4 MFC set to  50.000000
7/9/2012	11:28:17 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:28:18 PM	Tube furnace set to 1000
7/9/2012	11:43:18 PM	Helium valve closed
7/9/2012	11:43:18 PM	BCl3 valve closed
7/9/2012	11:43:18 PM	PH3 valve closed
7/9/2012	11:43:18 PM	SiCl4 pre valve closed
7/9/2012	11:43:18 PM	SiCl4 post valve closed
7/9/2012	11:43:18 PM	Main Vac valve closed
7/9/2012	11:43:18 PM	Bypass valve closed
7/9/2012	11:43:18 PM	H2 valve opened
7/9/2012	11:43:18 PM	Bubbler valve opened
7/9/2012	11:43:18 PM	Helium MFC set to  0.000000
7/9/2012	11:43:18 PM	H2 MFC set to  500.000000
7/9/2012	11:43:18 PM	BCl3 MFC set to  0.000000
7/9/2012	11:43:18 PM	PH3 MFC set to  0.000000
7/9/2012	11:43:18 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:43:18 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:43:18 PM	Tube furnace set to 750
7/9/2012	11:48:18 PM	H2 valve closed
7/9/2012	11:48:18 PM	BCl3 valve closed
7/9/2012	11:48:18 PM	PH3 valve closed
7/9/2012	11:48:18 PM	SiCl4 pre valve closed
7/9/2012	11:48:18 PM	SiCl4 post valve closed
7/9/2012	11:48:18 PM	Main Vac valve closed
7/9/2012	11:48:18 PM	Bypass valve closed
7/9/2012	11:48:18 PM	Helium valve opened
7/9/2012	11:48:18 PM	Bubbler valve opened
7/9/2012	11:48:18 PM	Helium MFC set to  500.000000
7/9/2012	11:48:18 PM	H2 MFC set to  0.000000
7/9/2012	11:48:18 PM	BCl3 MFC set to  0.000000
7/9/2012	11:48:18 PM	PH3 MFC set to  0.000000
7/9/2012	11:48:18 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:48:18 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:48:18 PM	Tube furnace set to 0
7/9/2012	11:53:10 PM	Run aborted at 11:53 PM
7/9/2012	11:53:10 PM	Helium valve closed
7/9/2012	11:53:10 PM	H2 valve closed
7/9/2012	11:53:10 PM	BCl3 valve closed
7/9/2012	11:53:10 PM	PH3 valve closed
7/9/2012	11:53:10 PM	SiCl4 pre valve closed
7/9/2012	11:53:10 PM	SiCl4 post valve closed
7/9/2012	11:53:10 PM	Bypass valve closed
7/9/2012	11:53:10 PM	Main Vac valve closed
7/9/2012	11:53:10 PM	Bubbler valve closed
7/9/2012	11:53:10 PM	Helium MFC set to  0.000000
7/9/2012	11:53:10 PM	H2 MFC set to  0.000000
7/9/2012	11:53:10 PM	BCl3 MFC set to  0.000000
7/9/2012	11:53:10 PM	PH3 MFC set to  0.000000
7/9/2012	11:53:10 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:53:10 PM	Tube furnace set to 0
7/9/2012	11:53:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	11:53:13 PM	Recipe started at 11:53 PM
7/9/2012	11:53:13 PM	Helium valve closed
7/9/2012	11:53:13 PM	H2 valve closed
7/9/2012	11:53:13 PM	BCl3 valve closed
7/9/2012	11:53:13 PM	PH3 valve closed
7/9/2012	11:53:13 PM	SiCl4 pre valve closed
7/9/2012	11:53:13 PM	SiCl4 post valve closed
7/9/2012	11:53:13 PM	Main Vac valve closed
7/9/2012	11:53:13 PM	Bypass valve closed
7/9/2012	11:53:13 PM	Bubbler valve closed
7/9/2012	11:53:13 PM	Helium MFC set to  0.000000
7/9/2012	11:53:13 PM	H2 MFC set to  0.000000
7/9/2012	11:53:13 PM	BCl3 MFC set to  0.000000
7/9/2012	11:53:13 PM	PH3 MFC set to  0.000000
7/9/2012	11:53:13 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:53:13 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:53:13 PM	Tube furnace set to 0
7/9/2012	11:53:16 PM	H2 valve closed
7/9/2012	11:53:16 PM	BCl3 valve closed
7/9/2012	11:53:16 PM	PH3 valve closed
7/9/2012	11:53:16 PM	SiCl4 pre valve closed
7/9/2012	11:53:16 PM	SiCl4 post valve closed
7/9/2012	11:53:16 PM	Main Vac valve closed
7/9/2012	11:53:16 PM	Bypass valve closed
7/9/2012	11:53:16 PM	Bubbler valve closed
7/9/2012	11:53:16 PM	Helium valve opened
7/9/2012	11:53:16 PM	Helium MFC set to  500.000000
7/9/2012	11:53:16 PM	H2 MFC set to  0.000000
7/9/2012	11:53:16 PM	BCl3 MFC set to  0.000000
7/9/2012	11:53:16 PM	PH3 MFC set to  0.000000
7/9/2012	11:53:16 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:53:16 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:53:16 PM	Tube furnace set to 0
7/9/2012	11:53:16 PM	Helium valve closed
7/9/2012	11:53:16 PM	H2 valve closed
7/9/2012	11:53:16 PM	BCl3 valve closed
7/9/2012	11:53:16 PM	PH3 valve closed
7/9/2012	11:53:16 PM	SiCl4 pre valve closed
7/9/2012	11:53:16 PM	SiCl4 post valve closed
7/9/2012	11:53:16 PM	Main Vac valve closed
7/9/2012	11:53:16 PM	Bypass valve closed
7/9/2012	11:53:16 PM	Bubbler valve closed
7/9/2012	11:53:16 PM	Helium MFC set to  0.000000
7/9/2012	11:53:16 PM	H2 MFC set to  0.000000
7/9/2012	11:53:16 PM	BCl3 MFC set to  0.000000
7/9/2012	11:53:16 PM	PH3 MFC set to  0.000000
7/9/2012	11:53:16 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:53:16 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:53:17 PM	Tube furnace set to 0
7/9/2012	11:53:18 PM	Run finished at 11:53 PM
7/9/2012	11:53:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2012	11:55:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2012	11:55:34 PM	Recipe started at 11:55 PM
7/9/2012	11:55:34 PM	Helium valve closed
7/9/2012	11:55:34 PM	H2 valve closed
7/9/2012	11:55:34 PM	BCl3 valve closed
7/9/2012	11:55:34 PM	PH3 valve closed
7/9/2012	11:55:34 PM	SiCl4 pre valve closed
7/9/2012	11:55:34 PM	SiCl4 post valve closed
7/9/2012	11:55:34 PM	Main Vac valve closed
7/9/2012	11:55:34 PM	Bubbler valve closed
7/9/2012	11:55:34 PM	Bypass valve opened
7/9/2012	11:55:34 PM	Helium MFC set to  0.000000
7/9/2012	11:55:34 PM	H2 MFC set to  0.000000
7/9/2012	11:55:34 PM	BCl3 MFC set to  0.000000
7/9/2012	11:55:34 PM	PH3 MFC set to  0.000000
7/9/2012	11:55:34 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:55:34 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:55:34 PM	Tube furnace set to 0
7/9/2012	11:56:39 PM	Helium valve closed
7/9/2012	11:56:39 PM	H2 valve closed
7/9/2012	11:56:39 PM	BCl3 valve closed
7/9/2012	11:56:39 PM	PH3 valve closed
7/9/2012	11:56:39 PM	SiCl4 pre valve closed
7/9/2012	11:56:39 PM	SiCl4 post valve closed
7/9/2012	11:56:39 PM	Main Vac valve closed
7/9/2012	11:56:39 PM	Bubbler valve closed
7/9/2012	11:56:39 PM	Bypass valve opened
7/9/2012	11:56:39 PM	Helium MFC set to  0.000000
7/9/2012	11:56:39 PM	H2 MFC set to  0.000000
7/9/2012	11:56:39 PM	BCl3 MFC set to  0.000000
7/9/2012	11:56:39 PM	PH3 MFC set to  0.000000
7/9/2012	11:56:39 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:56:39 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:56:39 PM	Tube furnace set to 0
7/9/2012	11:57:39 PM	Helium valve closed
7/9/2012	11:57:39 PM	H2 valve closed
7/9/2012	11:57:39 PM	BCl3 valve closed
7/9/2012	11:57:39 PM	PH3 valve closed
7/9/2012	11:57:39 PM	SiCl4 pre valve closed
7/9/2012	11:57:39 PM	SiCl4 post valve closed
7/9/2012	11:57:39 PM	Bypass valve closed
7/9/2012	11:57:39 PM	Bubbler valve closed
7/9/2012	11:57:39 PM	Main Vac valve opened
7/9/2012	11:57:39 PM	Helium MFC set to  0.000000
7/9/2012	11:57:39 PM	H2 MFC set to  0.000000
7/9/2012	11:57:39 PM	BCl3 MFC set to  0.000000
7/9/2012	11:57:39 PM	PH3 MFC set to  0.000000
7/9/2012	11:57:39 PM	SiCl4 MFC set to  0.000000
7/9/2012	11:57:39 PM	Bypass solenoid MFC set to  0.000000
7/9/2012	11:57:39 PM	Tube furnace set to 0
7/9/2012	11:57:40 PM	Run finished at 11:57 PM
7/9/2012	11:57:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
